IL300012A - Systems having heated valve manifold assemblies, and methods of manufacturing them - Google Patents

Systems having heated valve manifold assemblies, and methods of manufacturing them

Info

Publication number
IL300012A
IL300012A IL300012A IL30001223A IL300012A IL 300012 A IL300012 A IL 300012A IL 300012 A IL300012 A IL 300012A IL 30001223 A IL30001223 A IL 30001223A IL 300012 A IL300012 A IL 300012A
Authority
IL
Israel
Prior art keywords
manufacture
systems
methods
same
valve manifold
Prior art date
Application number
IL300012A
Other languages
English (en)
Hebrew (he)
Original Assignee
Versum Mat Us Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Versum Mat Us Llc filed Critical Versum Mat Us Llc
Publication of IL300012A publication Critical patent/IL300012A/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipe Accessories (AREA)
IL300012A 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, and methods of manufacturing them IL300012A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same

Publications (1)

Publication Number Publication Date
IL300012A true IL300012A (en) 2023-03-01

Family

ID=80036646

Family Applications (1)

Application Number Title Priority Date Filing Date
IL300012A IL300012A (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, and methods of manufacturing them

Country Status (8)

Country Link
US (1) US20230287992A1 (ko)
EP (1) EP4169060A4 (ko)
JP (1) JP2023540004A (ko)
KR (1) KR20230042364A (ko)
CN (1) CN115997477A (ko)
IL (1) IL300012A (ko)
TW (1) TWI761973B (ko)
WO (1) WO2022025950A1 (ko)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JP3752578B2 (ja) * 1997-04-21 2006-03-08 株式会社フジキン 流体制御器用加熱装置
US6283143B1 (en) * 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP2005098347A (ja) * 2003-09-24 2005-04-14 Fujikin Inc 流体制御器の加熱方法
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9140466B2 (en) * 2012-07-17 2015-09-22 Eemax, Inc. Fluid heating system and instant fluid heating device
JP6627464B2 (ja) * 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
US11215309B2 (en) * 2015-07-01 2022-01-04 Nichias Corporation Heating device and method of heating a heated object using the same
KR102375472B1 (ko) * 2017-03-29 2022-03-18 히타치 긴조쿠 가부시키가이샤 기화기
WO2019021948A1 (ja) * 2017-07-25 2019-01-31 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
TWI761973B (zh) 2022-04-21
CN115997477A (zh) 2023-04-21
KR20230042364A (ko) 2023-03-28
EP4169060A1 (en) 2023-04-26
TW202204794A (zh) 2022-02-01
US20230287992A1 (en) 2023-09-14
EP4169060A4 (en) 2024-07-24
WO2022025950A1 (en) 2022-02-03
JP2023540004A (ja) 2023-09-21

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