IL274827A - V(mo)ox active material with a transition metal oxide doped vanadium target for microbolometer applications and a method thereof - Google Patents

V(mo)ox active material with a transition metal oxide doped vanadium target for microbolometer applications and a method thereof

Info

Publication number
IL274827A
IL274827A IL274827A IL27482720A IL274827A IL 274827 A IL274827 A IL 274827A IL 274827 A IL274827 A IL 274827A IL 27482720 A IL27482720 A IL 27482720A IL 274827 A IL274827 A IL 274827A
Authority
IL
Israel
Prior art keywords
active material
metal oxide
transition metal
oxide doped
doped vanadium
Prior art date
Application number
IL274827A
Other languages
Hebrew (he)
Other versions
IL274827B (en
Original Assignee
Aselsan Elektronik Sanayi Ve Ticaret Anonim Sirketi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aselsan Elektronik Sanayi Ve Ticaret Anonim Sirketi filed Critical Aselsan Elektronik Sanayi Ve Ticaret Anonim Sirketi
Publication of IL274827A publication Critical patent/IL274827A/en
Publication of IL274827B publication Critical patent/IL274827B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
IL274827A 2018-05-17 2020-05-21 V(mo)ox active material with a transition metal oxide doped vanadium target for microbolometer applications and a method thereof IL274827B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/TR2018/050242 WO2019221677A1 (en) 2018-05-17 2018-05-17 V(mo)ox active material with a transition metal oxide doped vanadium target for microbolometer applications and a method thereof

Publications (2)

Publication Number Publication Date
IL274827A true IL274827A (en) 2020-07-30
IL274827B IL274827B (en) 2022-04-01

Family

ID=64316962

Family Applications (1)

Application Number Title Priority Date Filing Date
IL274827A IL274827B (en) 2018-05-17 2020-05-21 V(mo)ox active material with a transition metal oxide doped vanadium target for microbolometer applications and a method thereof

Country Status (5)

Country Link
EP (1) EP3688428A1 (en)
JP (1) JP2021505756A (en)
IL (1) IL274827B (en)
RU (1) RU2740633C1 (en)
WO (1) WO2019221677A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6322670B2 (en) * 1996-12-31 2001-11-27 Honeywell International Inc. Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process
JP3080093B2 (en) 1998-09-01 2000-08-21 日本電気株式会社 Oxide thin film for bolometer and infrared sensor using the oxide thin film
JP2002118004A (en) * 2000-10-11 2002-04-19 Sharp Corp Temperature-sensitive resistance film, its manufacturing method, and infrared sensor using the same
KR100596196B1 (en) * 2004-01-29 2006-07-03 한국과학기술연구원 Oxide thin film for bolometer and infrared detector using the oxide thin film

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
ADEM OZCELIK, VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS, 1 August 2011 (2011-08-01) *
VARDI NAOR SHARONI AMOS, " HIGH TEMPERATURE COEFFICIENT OF RESISTANCE ACHIEVED BY ION BEAM ASSISTED SPUTTERING WITH NO HEAT TREATMENT IN VYM1-YOX(M=NB, HF ", 1 January 1901 (1901-01-01) *
YONG-HEE HAN ET AL, " FABRICATION AND CHARACTERIZATION OF BOLOMETRIC OXIDE THIN FILM BASED ON VANADIUM-TUNGSTEN ALLOY", 1 September 2005 (2005-09-01) *

Also Published As

Publication number Publication date
WO2019221677A1 (en) 2019-11-21
RU2740633C1 (en) 2021-01-18
IL274827B (en) 2022-04-01
EP3688428A1 (en) 2020-08-05
JP2021505756A (en) 2021-02-18

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