IL273001B2 - Metrology method and instruments - Google Patents
Metrology method and instrumentsInfo
- Publication number
- IL273001B2 IL273001B2 IL273001A IL27300120A IL273001B2 IL 273001 B2 IL273001 B2 IL 273001B2 IL 273001 A IL273001 A IL 273001A IL 27300120 A IL27300120 A IL 27300120A IL 273001 B2 IL273001 B2 IL 273001B2
- Authority
- IL
- Israel
- Prior art keywords
- polarization characteristics
- measurement
- polarization
- metrology
- metrology target
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims 17
- 230000010287 polarization Effects 0.000 claims 22
- 238000005259 measurement Methods 0.000 claims 13
- 230000005855 radiation Effects 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 3
- 238000004590 computer program Methods 0.000 claims 2
- 238000005286 illumination Methods 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 2
- 230000035945 sensitivity Effects 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000004088 simulation Methods 0.000 claims 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70608—Monitoring the unpatterned workpiece, e.g. measuring thickness, reflectivity or effects of immersion liquid on resist
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17189662.4A EP3454123A1 (de) | 2017-09-06 | 2017-09-06 | Metrologieverfahren und -vorrichtung |
| PCT/EP2018/072294 WO2019048214A1 (en) | 2017-09-06 | 2018-08-17 | METHOD AND APPARATUS FOR METROLOGY |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| IL273001A IL273001A (en) | 2020-04-30 |
| IL273001B1 IL273001B1 (en) | 2023-06-01 |
| IL273001B2 true IL273001B2 (en) | 2023-10-01 |
Family
ID=59811114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL273001A IL273001B2 (en) | 2017-09-06 | 2018-08-17 | Metrology method and instruments |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10620550B2 (de) |
| EP (1) | EP3454123A1 (de) |
| JP (1) | JP7110327B2 (de) |
| KR (2) | KR102565829B1 (de) |
| CN (1) | CN111065970B (de) |
| IL (1) | IL273001B2 (de) |
| TW (1) | TWI716729B (de) |
| WO (1) | WO2019048214A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019063245A1 (en) | 2017-09-28 | 2019-04-04 | Asml Netherlands B.V. | LITHOGRAPHIC METHOD |
| US11422095B2 (en) * | 2019-01-18 | 2022-08-23 | Kla Corporation | Scatterometry modeling in the presence of undesired diffraction orders |
| EP3994526A1 (de) * | 2019-07-03 | 2022-05-11 | ASML Netherlands B.V. | Verfahren zum aufbringen eines abscheidungsmodells in einem halbleiterherstellungsprozess |
| US11487929B2 (en) * | 2020-04-28 | 2022-11-01 | Kla Corporation | Target design process for overlay targets intended for multi-signal measurements |
| CN117882010A (zh) * | 2021-10-21 | 2024-04-12 | 极光先进雷射株式会社 | 电子器件的制造方法和光刻控制处理器 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030002043A1 (en) | 2001-04-10 | 2003-01-02 | Kla-Tencor Corporation | Periodic patterns and technique to control misalignment |
| US7791727B2 (en) | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| NL1036245A1 (nl) | 2007-12-17 | 2009-06-18 | Asml Netherlands Bv | Diffraction based overlay metrology tool and method of diffraction based overlay metrology. |
| NL1036597A1 (nl) | 2008-02-29 | 2009-09-01 | Asml Netherlands Bv | Metrology method and apparatus, lithographic apparatus, and device manufacturing method. |
| CN102498441B (zh) | 2009-07-31 | 2015-09-16 | Asml荷兰有限公司 | 量测方法和设备、光刻系统以及光刻处理单元 |
| EP2470960A1 (de) | 2009-08-24 | 2012-07-04 | ASML Netherlands BV | Messverfahren und messgerät, lithografisches gerät, lithografische verarbeitungszelle und substrat mit messzielen |
| JP5377595B2 (ja) | 2011-03-25 | 2013-12-25 | 富士フイルム株式会社 | 着色感放射線性組成物、カラーフィルタ、着色パターンの製造方法、カラーフィルタの製造方法、固体撮像素子、及び液晶表示装置 |
| NL2009294A (en) | 2011-08-30 | 2013-03-04 | Asml Netherlands Bv | Method and apparatus for determining an overlay error. |
| NL2010401A (en) | 2012-03-27 | 2013-09-30 | Asml Netherlands Bv | Metrology method and apparatus, lithographic system and device manufacturing method. |
| KR102235615B1 (ko) * | 2014-07-29 | 2021-04-02 | 삼성전자주식회사 | 노광 공정 계측용 기판 타겟 및 노광 공정 계측 방법과 이를 이용한 집적회로 소자의 제조 방법 |
| US10072921B2 (en) * | 2014-12-05 | 2018-09-11 | Kla-Tencor Corporation | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element |
| KR102353145B1 (ko) * | 2015-04-10 | 2022-01-18 | 에이에스엠엘 네델란즈 비.브이. | 검사와 계측을 위한 방법 및 장치 |
| US10520832B2 (en) | 2015-05-19 | 2019-12-31 | Kla-Tencor Corporation | Topographic phase control for overlay measurement |
| WO2017099843A1 (en) * | 2015-12-08 | 2017-06-15 | Kla-Tencor Corporation | Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination |
| KR20180095605A (ko) * | 2015-12-17 | 2018-08-27 | 에이에스엠엘 네델란즈 비.브이. | 스캐터로메트리에서의 편광 튜닝 |
| NL2017949A (en) * | 2015-12-23 | 2017-06-28 | Asml Netherlands Bv | Metrology method, target and substrate |
| EP3299890A1 (de) | 2016-09-27 | 2018-03-28 | ASML Netherlands B.V. | Metrologierezeptauswahl |
-
2017
- 2017-09-06 EP EP17189662.4A patent/EP3454123A1/de not_active Withdrawn
-
2018
- 2018-08-17 WO PCT/EP2018/072294 patent/WO2019048214A1/en active Application Filing
- 2018-08-17 CN CN201880057786.7A patent/CN111065970B/zh active Active
- 2018-08-17 JP JP2020509496A patent/JP7110327B2/ja active Active
- 2018-08-17 IL IL273001A patent/IL273001B2/en unknown
- 2018-08-17 KR KR1020207006594A patent/KR102565829B1/ko active IP Right Grant
- 2018-08-17 KR KR1020227012934A patent/KR20220051433A/ko not_active Application Discontinuation
- 2018-08-30 US US16/117,614 patent/US10620550B2/en active Active
- 2018-09-05 TW TW107131106A patent/TWI716729B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| TW201920939A (zh) | 2019-06-01 |
| KR102565829B1 (ko) | 2023-08-09 |
| KR20200032749A (ko) | 2020-03-26 |
| TWI716729B (zh) | 2021-01-21 |
| US10620550B2 (en) | 2020-04-14 |
| JP2020532759A (ja) | 2020-11-12 |
| IL273001A (en) | 2020-04-30 |
| CN111065970A (zh) | 2020-04-24 |
| CN111065970B (zh) | 2023-03-31 |
| US20190072859A1 (en) | 2019-03-07 |
| EP3454123A1 (de) | 2019-03-13 |
| WO2019048214A1 (en) | 2019-03-14 |
| KR20220051433A (ko) | 2022-04-26 |
| JP7110327B2 (ja) | 2022-08-01 |
| IL273001B1 (en) | 2023-06-01 |
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