IL24630A - Annular hollow cathode discharge apparatus - Google Patents
Annular hollow cathode discharge apparatusInfo
- Publication number
- IL24630A IL24630A IL24630A IL2463065A IL24630A IL 24630 A IL24630 A IL 24630A IL 24630 A IL24630 A IL 24630A IL 2463065 A IL2463065 A IL 2463065A IL 24630 A IL24630 A IL 24630A
- Authority
- IL
- Israel
- Prior art keywords
- cathode
- cathode structure
- hollow
- aperture
- enclosure
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 230000002159 abnormal effect Effects 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 208000028659 discharge Diseases 0.000 description 25
- 239000007789 gas Substances 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- 230000001788 irregular Effects 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000615 nonconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 101100516913 Mus musculus Npat gene Proteins 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 101100516914 Xenopus laevis npat gene Proteins 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Arc Welding In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US417399A US3381157A (en) | 1964-12-10 | 1964-12-10 | Annular hollow cathode discharge apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL24630A true IL24630A (en) | 1969-11-30 |
Family
ID=23653867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL24630A IL24630A (en) | 1964-12-10 | 1965-11-16 | Annular hollow cathode discharge apparatus |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3381157A (xx) |
| BE (1) | BE673420A (xx) |
| CH (1) | CH457631A (xx) |
| DE (1) | DE1514990A1 (xx) |
| ES (1) | ES320887A1 (xx) |
| FR (1) | FR1455620A (xx) |
| GB (1) | GB1121115A (xx) |
| IL (1) | IL24630A (xx) |
| NL (1) | NL6516051A (xx) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5552675A (en) * | 1959-04-08 | 1996-09-03 | Lemelson; Jerome H. | High temperature reaction apparatus |
| US3452179A (en) * | 1967-04-12 | 1969-06-24 | Us Air Force | Electron optical system |
| US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
| US3492525A (en) * | 1968-03-11 | 1970-01-27 | United Aircraft Corp | Sectional hollow cathode discharge apparatus |
| GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
| US3769008A (en) * | 1971-05-19 | 1973-10-30 | B Borok | Method for sintering workpieces of pressed powdered refractory metal or alloy and vacuum furnace for performing the same |
| JPS547321B2 (xx) * | 1973-11-21 | 1979-04-05 | ||
| US4377773A (en) * | 1980-12-12 | 1983-03-22 | The United States Of America As Represented By The Department Of Energy | Negative ion source with hollow cathode discharge plasma |
| GB8601421D0 (en) * | 1986-01-21 | 1986-02-26 | Welding Inst | Charged particle beam generator |
| GB2194673B (en) * | 1986-08-30 | 1990-10-24 | English Electric Valve Co Ltd | Apparatus for forming an electron beam sheet |
| FR2618602B1 (fr) * | 1987-07-22 | 1990-01-05 | Centre Nat Rech Scient | Source d'electrons |
| EP2316252B1 (en) | 2008-08-04 | 2018-10-31 | AGC Flat Glass North America, Inc. | Plasma source and method for depositing thin film coatings using plasma enhanced chemical vapor deposition and method thereof |
| US9640369B2 (en) * | 2009-02-24 | 2017-05-02 | University Of Virginia Patent Foundation | Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof |
| CN107615888B (zh) | 2014-12-05 | 2022-01-04 | 北美Agc平板玻璃公司 | 利用宏粒子减少涂层的等离子体源和将等离子体源用于沉积薄膜涂层和表面改性的方法 |
| US10586685B2 (en) | 2014-12-05 | 2020-03-10 | Agc Glass Europe | Hollow cathode plasma source |
| US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2084172A (en) * | 1930-12-13 | 1937-06-15 | Rca Corp | Electron tube |
| GB888609A (en) * | 1957-07-31 | 1962-01-31 | Cie Francaise Thomsom Houston | Improvements in and relating to electron emitting devices |
| US3262013A (en) * | 1962-02-02 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
| US3210518A (en) * | 1962-12-21 | 1965-10-05 | Alloyd Electronics Corp | Hollow cathode device |
| US3218431A (en) * | 1962-12-27 | 1965-11-16 | Gen Electric | Self-focusing electron beam apparatus |
-
1964
- 1964-12-10 US US417399A patent/US3381157A/en not_active Expired - Lifetime
-
1965
- 1965-11-16 IL IL24630A patent/IL24630A/en unknown
- 1965-11-19 GB GB49176/65A patent/GB1121115A/en not_active Expired
- 1965-11-23 DE DE19651514990 patent/DE1514990A1/de active Pending
- 1965-11-25 FR FR39701A patent/FR1455620A/fr not_active Expired
- 1965-12-03 CH CH1673865A patent/CH457631A/de unknown
- 1965-12-08 BE BE673420D patent/BE673420A/xx unknown
- 1965-12-09 NL NL6516051A patent/NL6516051A/xx unknown
- 1965-12-10 ES ES0320887A patent/ES320887A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ES320887A1 (es) | 1966-09-01 |
| NL6516051A (xx) | 1966-06-13 |
| GB1121115A (en) | 1968-07-24 |
| BE673420A (xx) | 1966-04-01 |
| CH457631A (de) | 1968-06-15 |
| DE1514990A1 (de) | 1970-07-23 |
| US3381157A (en) | 1968-04-30 |
| FR1455620A (fr) | 1966-10-14 |
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