BE673420A - - Google Patents
Info
- Publication number
- BE673420A BE673420A BE673420DA BE673420A BE 673420 A BE673420 A BE 673420A BE 673420D A BE673420D A BE 673420DA BE 673420 A BE673420 A BE 673420A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
- Arc Welding In General (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US417399A US3381157A (en) | 1964-12-10 | 1964-12-10 | Annular hollow cathode discharge apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
BE673420A true BE673420A (xx) | 1966-04-01 |
Family
ID=23653867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE673420D BE673420A (xx) | 1964-12-10 | 1965-12-08 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3381157A (xx) |
BE (1) | BE673420A (xx) |
CH (1) | CH457631A (xx) |
DE (1) | DE1514990A1 (xx) |
ES (1) | ES320887A1 (xx) |
FR (1) | FR1455620A (xx) |
GB (1) | GB1121115A (xx) |
IL (1) | IL24630A (xx) |
NL (1) | NL6516051A (xx) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5552675A (en) * | 1959-04-08 | 1996-09-03 | Lemelson; Jerome H. | High temperature reaction apparatus |
US3452179A (en) * | 1967-04-12 | 1969-06-24 | Us Air Force | Electron optical system |
US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
US3492525A (en) * | 1968-03-11 | 1970-01-27 | United Aircraft Corp | Sectional hollow cathode discharge apparatus |
GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
US3769008A (en) * | 1971-05-19 | 1973-10-30 | B Borok | Method for sintering workpieces of pressed powdered refractory metal or alloy and vacuum furnace for performing the same |
JPS547321B2 (xx) * | 1973-11-21 | 1979-04-05 | ||
US4377773A (en) * | 1980-12-12 | 1983-03-22 | The United States Of America As Represented By The Department Of Energy | Negative ion source with hollow cathode discharge plasma |
GB8601421D0 (en) * | 1986-01-21 | 1986-02-26 | Welding Inst | Charged particle beam generator |
GB2194673B (en) * | 1986-08-30 | 1990-10-24 | English Electric Valve Co Ltd | Apparatus for forming an electron beam sheet |
FR2618602B1 (fr) * | 1987-07-22 | 1990-01-05 | Centre Nat Rech Scient | Source d'electrons |
TWI641292B (zh) | 2008-08-04 | 2018-11-11 | Agc北美平面玻璃公司 | 電漿源 |
US9640369B2 (en) * | 2009-02-24 | 2017-05-02 | University Of Virginia Patent Foundation | Coaxial hollow cathode plasma assisted directed vapor deposition and related method thereof |
MY192286A (en) | 2014-12-05 | 2022-08-17 | Agc Glass Europe S A | Hollow cathode plasma source |
CN107615888B (zh) | 2014-12-05 | 2022-01-04 | 北美Agc平板玻璃公司 | 利用宏粒子减少涂层的等离子体源和将等离子体源用于沉积薄膜涂层和表面改性的方法 |
US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2084172A (en) * | 1930-12-13 | 1937-06-15 | Rca Corp | Electron tube |
GB888609A (en) * | 1957-07-31 | 1962-01-31 | Cie Francaise Thomsom Houston | Improvements in and relating to electron emitting devices |
US3262013A (en) * | 1962-02-02 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
US3210518A (en) * | 1962-12-21 | 1965-10-05 | Alloyd Electronics Corp | Hollow cathode device |
US3218431A (en) * | 1962-12-27 | 1965-11-16 | Gen Electric | Self-focusing electron beam apparatus |
-
1964
- 1964-12-10 US US417399A patent/US3381157A/en not_active Expired - Lifetime
-
1965
- 1965-11-16 IL IL24630A patent/IL24630A/en unknown
- 1965-11-19 GB GB49176/65A patent/GB1121115A/en not_active Expired
- 1965-11-23 DE DE19651514990 patent/DE1514990A1/de active Pending
- 1965-11-25 FR FR39701A patent/FR1455620A/fr not_active Expired
- 1965-12-03 CH CH1673865A patent/CH457631A/de unknown
- 1965-12-08 BE BE673420D patent/BE673420A/xx unknown
- 1965-12-09 NL NL6516051A patent/NL6516051A/xx unknown
- 1965-12-10 ES ES0320887A patent/ES320887A1/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
IL24630A (en) | 1969-11-30 |
ES320887A1 (es) | 1966-09-01 |
FR1455620A (fr) | 1966-10-14 |
CH457631A (de) | 1968-06-15 |
US3381157A (en) | 1968-04-30 |
DE1514990A1 (de) | 1970-07-23 |
NL6516051A (xx) | 1966-06-13 |
GB1121115A (en) | 1968-07-24 |