IL243167A0 - מקורות אור מרובים הניתנים להפרדה בבדיקה אופטית - Google Patents

מקורות אור מרובים הניתנים להפרדה בבדיקה אופטית

Info

Publication number
IL243167A0
IL243167A0 IL243167A IL24316715A IL243167A0 IL 243167 A0 IL243167 A0 IL 243167A0 IL 243167 A IL243167 A IL 243167A IL 24316715 A IL24316715 A IL 24316715A IL 243167 A0 IL243167 A0 IL 243167A0
Authority
IL
Israel
Prior art keywords
optical inspection
illumination sources
multiple illumination
separable multiple
separable
Prior art date
Application number
IL243167A
Other languages
English (en)
Other versions
IL243167B (he
Inventor
Gordon Noam
Cohen Itay
Tzhori Amir
Original Assignee
Camtek Imaging Tech Suzhou Co Ltd
Gordon Noam
Cohen Itay
Tzhori Amir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Imaging Tech Suzhou Co Ltd, Gordon Noam, Cohen Itay, Tzhori Amir filed Critical Camtek Imaging Tech Suzhou Co Ltd
Publication of IL243167A0 publication Critical patent/IL243167A0/he
Publication of IL243167B publication Critical patent/IL243167B/he

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
IL243167A 2014-12-18 2015-12-16 מקורות אור מרובים הניתנים להפרדה בבדיקה אופטית IL243167B (he)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462093477P 2014-12-18 2014-12-18

Publications (2)

Publication Number Publication Date
IL243167A0 true IL243167A0 (he) 2016-02-29
IL243167B IL243167B (he) 2021-02-28

Family

ID=56822577

Family Applications (1)

Application Number Title Priority Date Filing Date
IL243167A IL243167B (he) 2014-12-18 2015-12-16 מקורות אור מרובים הניתנים להפרדה בבדיקה אופטית

Country Status (3)

Country Link
CN (1) CN205562358U (he)
IL (1) IL243167B (he)
TW (1) TWI711816B (he)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017115658A1 (de) * 2017-07-12 2019-01-17 Carl Zeiss Microscopy Gmbh Flackern bei Winkel-variabler Beleuchtung
CN109030495A (zh) * 2018-06-26 2018-12-18 大连鉴影光学科技有限公司 一种基于机器视觉技术的光学元件缺陷检测方法
CN111610195A (zh) * 2019-02-22 2020-09-01 上海微电子装备（集团）股份有限公司 一种缺陷检测装置
CN115015275B (zh) * 2022-07-11 2025-05-23 凌云光技术股份有限公司 一种缺陷检测装置
KR20250174967A (ko) * 2023-04-24 2025-12-15 캠텍 리미티드 반도체 구조의 에지 및 베벨 검사를 위한 검사 시스템
TWI881588B (zh) * 2023-12-11 2025-04-21 家碩科技股份有限公司 可消除電路表面金屬紋路的光學檢測系統

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080035592A (ko) * 2005-11-28 2008-04-23 닛토덴코 가부시키가이샤 광학 보상층 부착 편광판 및 그것을 이용한 화상 표시 장치
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
DE112009000832T5 (de) * 2008-04-04 2011-07-28 Nanda Technologies GmbH, 85716 System und Verfahren zur optischen Inspektion
CN203490180U (zh) * 2013-09-13 2014-03-19 楚天科技股份有限公司 自动灯检机异物检测装置

Also Published As

Publication number Publication date
TWI711816B (zh) 2020-12-01
CN205562358U (zh) 2016-09-07
IL243167B (he) 2021-02-28
TW201629470A (zh) 2016-08-16

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