IL201339A0 - A method of monitoring a surfactant in a microelectronic process by absorbance - Google Patents

A method of monitoring a surfactant in a microelectronic process by absorbance

Info

Publication number
IL201339A0
IL201339A0 IL201339A IL20133909A IL201339A0 IL 201339 A0 IL201339 A0 IL 201339A0 IL 201339 A IL201339 A IL 201339A IL 20133909 A IL20133909 A IL 20133909A IL 201339 A0 IL201339 A0 IL 201339A0
Authority
IL
Israel
Prior art keywords
absorbance
surfactant
monitoring
microelectronic process
microelectronic
Prior art date
Application number
IL201339A
Original Assignee
Nalco Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/696,797 external-priority patent/US8372651B2/en
Priority claimed from PCT/US2008/059644 external-priority patent/WO2009126148A1/en
Application filed by Nalco Co filed Critical Nalco Co
Publication of IL201339A0 publication Critical patent/IL201339A0/en

Links

IL201339A 2007-04-05 2009-10-01 A method of monitoring a surfactant in a microelectronic process by absorbance IL201339A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/696,797 US8372651B2 (en) 2007-04-05 2007-04-05 Method of monitoring a surfactant in a microelectronic process by absorbance
PCT/US2008/059644 WO2009126148A1 (en) 2008-04-08 2008-04-08 A method of monitoring a surfactant in a microelectronic process by absorbance

Publications (1)

Publication Number Publication Date
IL201339A0 true IL201339A0 (en) 2010-05-31

Family

ID=42263623

Family Applications (1)

Application Number Title Priority Date Filing Date
IL201339A IL201339A0 (en) 2007-04-05 2009-10-01 A method of monitoring a surfactant in a microelectronic process by absorbance

Country Status (1)

Country Link
IL (1) IL201339A0 (en)

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