IL201339A0 - A method of monitoring a surfactant in a microelectronic process by absorbance
- Google Patents
A method of monitoring a surfactant in a microelectronic process by absorbance
Info
Publication number
IL201339A0
IL201339A0IL201339AIL20133909AIL201339A0IL 201339 A0IL201339 A0IL 201339A0IL 201339 AIL201339 AIL 201339AIL 20133909 AIL20133909 AIL 20133909AIL 201339 A0IL201339 A0IL 201339A0
Authority
IL
Israel
Prior art keywords
absorbance
surfactant
monitoring
microelectronic process
microelectronic
Prior art date
Application number
IL201339A
Original Assignee
Nalco Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/696,797external-prioritypatent/US8372651B2/en
Priority claimed from PCT/US2008/059644external-prioritypatent/WO2009126148A1/en
Application filed by Nalco CofiledCriticalNalco Co
Publication of IL201339A0publicationCriticalpatent/IL201339A0/en