IL194322A - Gyroscopes with acoustic wave capacitance - Google Patents
Gyroscopes with acoustic wave capacitanceInfo
- Publication number
- IL194322A IL194322A IL194322A IL19432208A IL194322A IL 194322 A IL194322 A IL 194322A IL 194322 A IL194322 A IL 194322A IL 19432208 A IL19432208 A IL 19432208A IL 194322 A IL194322 A IL 194322A
- Authority
- IL
- Israel
- Prior art keywords
- disk
- resonator
- apparatus recited
- bulk acoustic
- substrate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 29
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 16
- 229920005591 polysilicon Polymers 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 2
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 25
- 230000003412 degenerative effect Effects 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 10
- 230000008901 benefit Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000013016 damping Methods 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US78630406P | 2006-03-27 | 2006-03-27 | |
| US11/601,956 US7543496B2 (en) | 2006-03-27 | 2006-11-20 | Capacitive bulk acoustic wave disk gyroscopes |
| PCT/US2006/045931 WO2007126423A2 (en) | 2006-03-27 | 2006-12-01 | Capacitive bulk acoustic wave disk gyroscopes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL194322A true IL194322A (en) | 2012-05-31 |
Family
ID=38531924
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL194322A IL194322A (en) | 2006-03-27 | 2008-09-24 | Gyroscopes with acoustic wave capacitance |
| IL216836A IL216836A (en) | 2006-03-27 | 2011-12-07 | Gyroscopes with acoustic wave capacitance |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL216836A IL216836A (en) | 2006-03-27 | 2011-12-07 | Gyroscopes with acoustic wave capacitance |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7543496B2 (de) |
| EP (1) | EP2010924B1 (de) |
| JP (1) | JP5261371B2 (de) |
| KR (1) | KR20090010034A (de) |
| CN (2) | CN103363978B (de) |
| CA (1) | CA2647526C (de) |
| IL (2) | IL194322A (de) |
| WO (1) | WO2007126423A2 (de) |
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- 2006-11-20 US US11/601,956 patent/US7543496B2/en active Active
- 2006-12-01 JP JP2009502763A patent/JP5261371B2/ja not_active Expired - Fee Related
- 2006-12-01 CN CN201310232722.5A patent/CN103363978B/zh active Active
- 2006-12-01 EP EP06838738.0A patent/EP2010924B1/de active Active
- 2006-12-01 KR KR1020087026172A patent/KR20090010034A/ko not_active Ceased
- 2006-12-01 CN CN2006800544502A patent/CN101553734B/zh active Active
- 2006-12-01 WO PCT/US2006/045931 patent/WO2007126423A2/en not_active Ceased
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Also Published As
| Publication number | Publication date |
|---|---|
| IL216836A (en) | 2013-05-30 |
| WO2007126423A3 (en) | 2009-03-26 |
| US8166816B2 (en) | 2012-05-01 |
| EP2010924A2 (de) | 2009-01-07 |
| WO2007126423A2 (en) | 2007-11-08 |
| US20090266162A1 (en) | 2009-10-29 |
| JP2009531707A (ja) | 2009-09-03 |
| CA2647526A1 (en) | 2007-11-08 |
| US20070220971A1 (en) | 2007-09-27 |
| CN103363978B (zh) | 2016-09-14 |
| CN103363978A (zh) | 2013-10-23 |
| EP2010924A4 (de) | 2010-12-22 |
| KR20090010034A (ko) | 2009-01-28 |
| US7543496B2 (en) | 2009-06-09 |
| CA2647526C (en) | 2017-06-27 |
| CN101553734A (zh) | 2009-10-07 |
| EP2010924B1 (de) | 2014-09-17 |
| CN101553734B (zh) | 2013-07-10 |
| IL216836A0 (en) | 2012-01-31 |
| JP5261371B2 (ja) | 2013-08-14 |
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