IL146733A - Process for removing contaminant from a surface and composition useful therefor - Google Patents
Process for removing contaminant from a surface and composition useful thereforInfo
- Publication number
- IL146733A IL146733A IL14673300A IL14673300A IL146733A IL 146733 A IL146733 A IL 146733A IL 14673300 A IL14673300 A IL 14673300A IL 14673300 A IL14673300 A IL 14673300A IL 146733 A IL146733 A IL 146733A
- Authority
- IL
- Israel
- Prior art keywords
- composition useful
- removing contaminant
- useful therefor
- therefor
- contaminant
- Prior art date
Links
- 239000000356 contaminant Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/046—Salts
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/042—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2082—Polycarboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2086—Hydroxy carboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/08—Acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- C11D2111/22—
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/318,814 US6147002A (en) | 1999-05-26 | 1999-05-26 | Process for removing contaminant from a surface and composition useful therefor |
US09/533,114 US6673757B1 (en) | 2000-03-22 | 2000-03-22 | Process for removing contaminant from a surface and composition useful therefor |
PCT/US2000/014181 WO2000072363A1 (en) | 1999-05-26 | 2000-05-23 | Process for removing contaminant from a surface and composition useful therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
IL146733A0 IL146733A0 (en) | 2002-07-25 |
IL146733A true IL146733A (en) | 2005-07-25 |
Family
ID=26981682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14673300A IL146733A (en) | 1999-05-26 | 2000-05-23 | Process for removing contaminant from a surface and composition useful therefor |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1196943A4 (en) |
JP (1) | JP2003500527A (en) |
KR (1) | KR100672874B1 (en) |
CN (1) | CN1158691C (en) |
AU (1) | AU5157100A (en) |
IL (1) | IL146733A (en) |
TW (1) | TW463256B (en) |
WO (1) | WO2000072363A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6627546B2 (en) | 2001-06-29 | 2003-09-30 | Ashland Inc. | Process for removing contaminant from a surface and composition useful therefor |
JP4583678B2 (en) * | 2001-09-26 | 2010-11-17 | 富士通株式会社 | Semiconductor device manufacturing method and semiconductor device cleaning solution |
ATE434033T1 (en) * | 2002-04-25 | 2009-07-15 | Fujifilm Electronic Materials | NON-CORRODIVE CLEANING AGENTS FOR REMOVAL OF CAUSTIC RESIDUE |
US20040029494A1 (en) * | 2002-08-09 | 2004-02-12 | Souvik Banerjee | Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniques |
CN1646732A (en) * | 2002-08-19 | 2005-07-27 | 伊默克化学科技股份有限公司 | Washing liquid |
US20070203041A1 (en) * | 2006-02-24 | 2007-08-30 | Ki-Jeong Lee | Cleaning composition for removing impurities and method of removing impurities using the same |
US7879783B2 (en) | 2007-01-11 | 2011-02-01 | Air Products And Chemicals, Inc. | Cleaning composition for semiconductor substrates |
WO2011078982A1 (en) * | 2009-12-23 | 2011-06-30 | Lam Research Corporation | Post deposition wafer cleaning formulation |
EP2626891A3 (en) * | 2012-02-07 | 2018-01-24 | Rohm and Haas Electronic Materials LLC | Activation process to improve metal adhesion |
US11560533B2 (en) | 2018-06-26 | 2023-01-24 | Versum Materials Us, Llc | Post chemical mechanical planarization (CMP) cleaning |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4477364A (en) * | 1983-11-07 | 1984-10-16 | Capetrol International, Inc. | Acidic glass cleaning composition |
US5662769A (en) * | 1995-02-21 | 1997-09-02 | Advanced Micro Devices, Inc. | Chemical solutions for removing metal-compound contaminants from wafers after CMP and the method of wafer cleaning |
US6296714B1 (en) * | 1997-01-16 | 2001-10-02 | Mitsubishi Materials Silicon Corporation | Washing solution of semiconductor substrate and washing method using the same |
US6083419A (en) * | 1997-07-28 | 2000-07-04 | Cabot Corporation | Polishing composition including an inhibitor of tungsten etching |
US6165956A (en) * | 1997-10-21 | 2000-12-26 | Lam Research Corporation | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film |
-
2000
- 2000-05-23 EP EP00936223A patent/EP1196943A4/en not_active Withdrawn
- 2000-05-23 KR KR1020017015034A patent/KR100672874B1/en not_active IP Right Cessation
- 2000-05-23 IL IL14673300A patent/IL146733A/en not_active IP Right Cessation
- 2000-05-23 JP JP2000620663A patent/JP2003500527A/en not_active Withdrawn
- 2000-05-23 WO PCT/US2000/014181 patent/WO2000072363A1/en active IP Right Grant
- 2000-05-23 CN CNB008080917A patent/CN1158691C/en not_active Expired - Fee Related
- 2000-05-25 AU AU51571/00A patent/AU5157100A/en not_active Abandoned
- 2000-07-03 TW TW089110192A patent/TW463256B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2003500527A (en) | 2003-01-07 |
KR20020030743A (en) | 2002-04-25 |
TW463256B (en) | 2001-11-11 |
CN1158691C (en) | 2004-07-21 |
KR100672874B1 (en) | 2007-01-24 |
AU5157100A (en) | 2000-12-12 |
EP1196943A4 (en) | 2007-01-17 |
EP1196943A1 (en) | 2002-04-17 |
CN1360733A (en) | 2002-07-24 |
IL146733A0 (en) | 2002-07-25 |
WO2000072363A1 (en) | 2000-11-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL159596A0 (en) | Process for removing contaminant from a surface and composition useful therefor | |
HUP0001290A3 (en) | Process for removing stain | |
EP1024965A4 (en) | Process for removing residues from a semiconductor substrate | |
HK1022734A1 (en) | Apparatus and process for removing volatile components from a composition | |
GB0211641D0 (en) | Apparatus and method for cleaning a surface | |
GB2330781B (en) | Graffiti removing method | |
IL146733A0 (en) | Process for removing contaminant from a surface and composition useful therefor | |
HK1051336A1 (en) | Process for removing paint from polymeric material | |
AU3996199A (en) | Process and materials for removing pollutants | |
HUP0100524A3 (en) | Hard surface cleaner composition and a method for reducing uv damage | |
IL120617A0 (en) | Method for removing liquid contaminants from a surface | |
AU1018401A (en) | Textile stain remover composition and a method for removing stains | |
GB9822294D0 (en) | Contaminant removal method | |
AU2917300A (en) | Process for removing stain in a photographic material | |
AU2001282862A1 (en) | Method and apparatus for removing minute particles from a surface | |
GB9925018D0 (en) | A process for the removal of a contaminant | |
AU2002315171A1 (en) | Process for removing contaminant from a surface and composition useful therefor | |
EP1181989A3 (en) | Method for cleaning a solid surface and washing composition for carrying out the method | |
GB2372039B (en) | Method for removing surface coatings | |
AU5678999A (en) | Process for removing contaminants from water | |
GB9827472D0 (en) | Hand held apparatus for removing loose material from a surface | |
AUPQ235899A0 (en) | Surface residue removal apparatus | |
GB9819604D0 (en) | Contaminant removal | |
AUPQ384999A0 (en) | Apparatus for removing a road surface from a road course | |
AU2001271187A1 (en) | A method and an arrangement for cleaning a surface during operation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
MM9K | Patent not in force due to non-payment of renewal fees |