IL145207A0 - Dual stage deformanable mirror - Google Patents

Dual stage deformanable mirror

Info

Publication number
IL145207A0
IL145207A0 IL14520701A IL14520701A IL145207A0 IL 145207 A0 IL145207 A0 IL 145207A0 IL 14520701 A IL14520701 A IL 14520701A IL 14520701 A IL14520701 A IL 14520701A IL 145207 A0 IL145207 A0 IL 145207A0
Authority
IL
Israel
Prior art keywords
deformanable
mirror
dual stage
dual
stage
Prior art date
Application number
IL14520701A
Other languages
English (en)
Original Assignee
Goodrich Co B F
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goodrich Co B F filed Critical Goodrich Co B F
Publication of IL145207A0 publication Critical patent/IL145207A0/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
IL14520701A 2000-01-05 2001-01-05 Dual stage deformanable mirror IL145207A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/478,159 US6236490B1 (en) 2000-01-05 2000-01-05 Dual stage deformable mirror
PCT/US2001/000303 WO2001050173A2 (fr) 2000-01-05 2001-01-05 Miroir deformable a deux etages

Publications (1)

Publication Number Publication Date
IL145207A0 true IL145207A0 (en) 2002-06-30

Family

ID=23898777

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14520701A IL145207A0 (en) 2000-01-05 2001-01-05 Dual stage deformanable mirror

Country Status (7)

Country Link
US (1) US6236490B1 (fr)
EP (1) EP1190272A2 (fr)
JP (1) JP2003519404A (fr)
AU (1) AU2629801A (fr)
CA (1) CA2362460A1 (fr)
IL (1) IL145207A0 (fr)
WO (1) WO2001050173A2 (fr)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6756317B2 (en) 2001-04-23 2004-06-29 Memx, Inc. Method for making a microstructure by surface micromachining
US6600587B2 (en) * 2001-04-23 2003-07-29 Memx, Inc. Surface micromachined optical system with reinforced mirror microstructure
DE10160893A1 (de) * 2001-12-12 2003-07-17 Diehl Munitionssysteme Gmbh Verformbarer Spiegel
US6951397B1 (en) * 2002-03-19 2005-10-04 Lockheed Martin Corporation Composite ultra-light weight active mirror for space applications
US6984049B2 (en) * 2002-11-04 2006-01-10 General Dynamics Advanced Information Systems, Inc. Hinged substrate for large-aperture, lightweight, deformable mirrors
WO2004057407A1 (fr) * 2002-12-23 2004-07-08 Bae Systems Plc Miroir deformable
JP2006516761A (ja) 2003-01-24 2006-07-06 モンタナ ステート ユニバーシティー−ボーズマン 軸外可変焦点および収差制御鏡および方法
US7188964B2 (en) * 2003-02-25 2007-03-13 Xinetics, Inc. Integrated actuator meniscus mirror
JP2007503623A (ja) * 2003-03-03 2007-02-22 モンタナ ステート ユニバーシティー−ボーズマン 小型共焦点光学装置、システムおよび方法
US20060018045A1 (en) * 2003-10-23 2006-01-26 Carl Zeiss Smt Ag Mirror arrangement and method of manufacturing thereof, optical system and lithographic method of manufacturing a miniaturized device
US7125128B2 (en) * 2004-01-26 2006-10-24 Nikon Corporation Adaptive-optics actuator arrays and methods for using such arrays
US7352791B2 (en) * 2004-07-27 2008-04-01 Corning Incorporated Optical systems including wavefront correcting optical surfaces
US20060050419A1 (en) * 2004-09-08 2006-03-09 Ealey Mark A Integrated wavefront correction module
US20060050421A1 (en) * 2004-09-08 2006-03-09 Ealey Mark A Adaptive mirror system
US20060077579A1 (en) * 2004-10-12 2006-04-13 Margeson Christopher S Force actuator with clamp
JP4817702B2 (ja) * 2005-04-14 2011-11-16 キヤノン株式会社 光学装置及びそれを備えた露光装置
US7355777B2 (en) * 2006-05-09 2008-04-08 Texas Instruments Incorporated Energy storage structures using electromechanically active materials for micro electromechanical systems
CN100476462C (zh) * 2006-06-20 2009-04-08 刘彤 反射镜基体及其制造方法
CN100454080C (zh) * 2006-12-09 2009-01-21 中国科学技术大学 一种压电厚膜驱动的微变形镜及其制备方法
US8292441B2 (en) 2009-02-10 2012-10-23 Optical Physics Company Deformable mirror
US8102583B2 (en) * 2009-03-26 2012-01-24 Raytheon Company Real-time optical compensation of orbit-induced distortion effects in long integration time imagers
FR2958415B1 (fr) * 2010-04-06 2012-08-17 Alpao Miroir deformable a faible empreinte de collage et procede de fabrication d'un tel miroir
DE102014211546B4 (de) 2014-06-17 2022-08-25 Robert Bosch Gmbh Mikrospiegelanordnung
CN104102002B (zh) * 2014-07-14 2016-06-08 中国工程物理研究院激光聚变研究中心 一种提高变形镜校正能力的方法
CN105182529A (zh) * 2015-09-24 2015-12-23 中国科学院西安光学精密机械研究所 球面金属变形镜及其一体化加工工艺
FR3047321B1 (fr) * 2016-02-03 2018-02-23 Thales Miroir deformable
KR101829684B1 (ko) * 2016-11-07 2018-02-20 한국표준과학연구원 변형 거울 보상 장치
DE112018002600B4 (de) * 2017-05-19 2023-08-10 Kawasaki Jukogyo Kabushiki Kaisha Adaptiv-optische vorrichtung, optisches system und optisches wellenfrontkompensationsverfahren
DE112018002593B4 (de) * 2017-05-19 2023-08-10 Kawasaki Jukogyo Kabushiki Kaisha Adaptiv-optische vorrichtung, optisches system und optisches wellenfrontkompensationsverfahren
FR3120451B1 (fr) * 2021-03-03 2023-11-24 Alpao Dispositif d’optique adaptative ameliore et procede de fabrication afferent

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280756A (en) * 1979-01-02 1981-07-28 Itek Corporation Piezoelectric bi-morph mirror actuator
US4295710A (en) * 1979-09-04 1981-10-20 Rockwell International Corporation Deformable mirror with dither
US4655563A (en) * 1985-11-25 1987-04-07 Itek Corporation Variable thickness deformable mirror
US5864215A (en) * 1992-03-06 1999-01-26 Hughes Aircraft Company Steering apparatus for controllably displacing a structure relative to a frame member
US5274479A (en) * 1992-07-30 1993-12-28 Hughes Aircraft Company Mirror alignment and/or figure sensing with surface mounted holographic optical elements

Also Published As

Publication number Publication date
JP2003519404A (ja) 2003-06-17
CA2362460A1 (fr) 2001-07-12
EP1190272A2 (fr) 2002-03-27
WO2001050173A2 (fr) 2001-07-12
WO2001050173A3 (fr) 2001-12-20
US6236490B1 (en) 2001-05-22
AU2629801A (en) 2001-07-16

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