IL134008A0 - A method and system for measuring bump height - Google Patents

A method and system for measuring bump height

Info

Publication number
IL134008A0
IL134008A0 IL13400800A IL13400800A IL134008A0 IL 134008 A0 IL134008 A0 IL 134008A0 IL 13400800 A IL13400800 A IL 13400800A IL 13400800 A IL13400800 A IL 13400800A IL 134008 A0 IL134008 A0 IL 134008A0
Authority
IL
Israel
Prior art keywords
bump height
measuring bump
measuring
height
bump
Prior art date
Application number
IL13400800A
Original Assignee
Inspectech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inspectech Ltd filed Critical Inspectech Ltd
Priority to IL13400800A priority Critical patent/IL134008A0/en
Priority to AU2001223931A priority patent/AU2001223931A1/en
Priority to PCT/IL2001/000019 priority patent/WO2001051885A1/en
Publication of IL134008A0 publication Critical patent/IL134008A0/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IL13400800A 2000-01-12 2000-01-12 A method and system for measuring bump height IL134008A0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IL13400800A IL134008A0 (en) 2000-01-12 2000-01-12 A method and system for measuring bump height
AU2001223931A AU2001223931A1 (en) 2000-01-12 2001-01-09 A method and system for measuring bumps height
PCT/IL2001/000019 WO2001051885A1 (en) 2000-01-12 2001-01-09 A method and system for measuring bumps height

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL13400800A IL134008A0 (en) 2000-01-12 2000-01-12 A method and system for measuring bump height

Publications (1)

Publication Number Publication Date
IL134008A0 true IL134008A0 (en) 2001-04-30

Family

ID=11073700

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13400800A IL134008A0 (en) 2000-01-12 2000-01-12 A method and system for measuring bump height

Country Status (3)

Country Link
AU (1) AU2001223931A1 (en)
IL (1) IL134008A0 (en)
WO (1) WO2001051885A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL146174A (en) * 2001-10-25 2007-08-19 Camtek Ltd Confocal wafer-inspection system
US9599558B2 (en) 2012-08-07 2017-03-21 Carl Zeiss Industrielle Messtechnik Gmbh Measuring device for measuring a measurement object and related method
WO2014023344A1 (en) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Improved chromatic sensor and method
JP6098505B2 (en) * 2013-12-27 2017-03-22 トヨタ自動車株式会社 Welding quality inspection device and welding quality inspection method
DE102014108789A1 (en) * 2014-06-24 2016-01-07 Byk-Gardner Gmbh Multi-stage process for the examination of surfaces and corresponding device
CN104197837B (en) * 2014-09-19 2017-08-01 福建师范大学 The non-contact optical measuring method and device of a kind of complex surface object volume
CN110757278B (en) * 2019-10-23 2020-09-18 清华大学 Wafer thickness measuring device and grinding machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2126745B (en) * 1982-09-02 1986-07-23 Mo Nauchno Issledovatelskyinst Method and device for determining cornea surface topography
US5039868A (en) * 1988-11-24 1991-08-13 Omron Corporation Method of and apparatus for inspecting printed circuit boards and the like

Also Published As

Publication number Publication date
WO2001051885A1 (en) 2001-07-19
AU2001223931A1 (en) 2001-07-24

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