AU2001223931A1 - A method and system for measuring bumps height - Google Patents

A method and system for measuring bumps height

Info

Publication number
AU2001223931A1
AU2001223931A1 AU2001223931A AU2393101A AU2001223931A1 AU 2001223931 A1 AU2001223931 A1 AU 2001223931A1 AU 2001223931 A AU2001223931 A AU 2001223931A AU 2393101 A AU2393101 A AU 2393101A AU 2001223931 A1 AU2001223931 A1 AU 2001223931A1
Authority
AU
Australia
Prior art keywords
measuring
bumps height
height
measuring bumps
bumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001223931A
Inventor
Michael Gefen
Yakov Levi
Alexander Zaslavski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Camtek Ltd
Original Assignee
Inspectech Ltd Israel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inspectech Ltd Israel filed Critical Inspectech Ltd Israel
Publication of AU2001223931A1 publication Critical patent/AU2001223931A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU2001223931A 2000-01-12 2001-01-09 A method and system for measuring bumps height Abandoned AU2001223931A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL13400800A IL134008A0 (en) 2000-01-12 2000-01-12 A method and system for measuring bump height
IL134008 2000-01-12
PCT/IL2001/000019 WO2001051885A1 (en) 2000-01-12 2001-01-09 A method and system for measuring bumps height

Publications (1)

Publication Number Publication Date
AU2001223931A1 true AU2001223931A1 (en) 2001-07-24

Family

ID=11073700

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001223931A Abandoned AU2001223931A1 (en) 2000-01-12 2001-01-09 A method and system for measuring bumps height

Country Status (3)

Country Link
AU (1) AU2001223931A1 (en)
IL (1) IL134008A0 (en)
WO (1) WO2001051885A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL146174A (en) 2001-10-25 2007-08-19 Camtek Ltd Confocal wafer-inspection system
WO2014023344A1 (en) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Improved chromatic sensor and method
US9599558B2 (en) 2012-08-07 2017-03-21 Carl Zeiss Industrielle Messtechnik Gmbh Measuring device for measuring a measurement object and related method
JP6098505B2 (en) * 2013-12-27 2017-03-22 トヨタ自動車株式会社 Welding quality inspection device and welding quality inspection method
DE102014108789A1 (en) * 2014-06-24 2016-01-07 Byk-Gardner Gmbh Multi-stage process for the examination of surfaces and corresponding device
CN104197837B (en) * 2014-09-19 2017-08-01 福建师范大学 The non-contact optical measuring method and device of a kind of complex surface object volume
CN110757278B (en) * 2019-10-23 2020-09-18 清华大学 Wafer thickness measuring device and grinding machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2126745B (en) * 1982-09-02 1986-07-23 Mo Nauchno Issledovatelskyinst Method and device for determining cornea surface topography
US5039868A (en) * 1988-11-24 1991-08-13 Omron Corporation Method of and apparatus for inspecting printed circuit boards and the like

Also Published As

Publication number Publication date
IL134008A0 (en) 2001-04-30
WO2001051885A1 (en) 2001-07-19

Similar Documents

Publication Publication Date Title
EP1191747A3 (en) System and method for interfacing a can device and a peripheral device
AU2001250686A1 (en) Method and device for testing a well
AU2001279532A1 (en) Method and device for measuring distances
AU2001296205A1 (en) A method and system for detecting rogue software
AU2002210755A1 (en) Method and system for determining the popularity of a subject
WO2002007460A8 (en) A system and method for context association
AU2001239781A1 (en) Method and system for facilitating a sale
AU2001271994A1 (en) A method and system for investment integration
AU2001289082A1 (en) Method and system for a lumped-distributed balun
AU2002251690A1 (en) A method and system for electrostatic bonding
AU7365800A (en) Method and apparatus for determining that a train has changed paths
AU2001292067A1 (en) Method and apparatus for obtaining information from a utility meter
AU2001262605A1 (en) Method and system for implementing a game
AU2002243272A1 (en) A system and method for validating specifications for parts
AU5521600A (en) Method for measuring a handling device
AU2001239863A1 (en) System and method for implementing a project facility
AU2001284897A1 (en) Method and system for defining and verifying a part
AU2001223931A1 (en) A method and system for measuring bumps height
AU4760800A (en) Method and arrangement for measuring a jumping distance
AU2002341319A1 (en) Method and system for authenticating a packaged good
AU6844200A (en) A method and a device for producing a signal
AU2002213934A1 (en) Device and method for carrying out a remote e-business transaction
AU7566700A (en) Method and device for interlocking
AU2001288153A1 (en) Coupling device and a method for coupling
AU2001294492A1 (en) Method and system for measuring objects