IL116156A0 - Cooled gas distribution system for a plasma - Google Patents

Cooled gas distribution system for a plasma

Info

Publication number
IL116156A0
IL116156A0 IL11615695A IL11615695A IL116156A0 IL 116156 A0 IL116156 A0 IL 116156A0 IL 11615695 A IL11615695 A IL 11615695A IL 11615695 A IL11615695 A IL 11615695A IL 116156 A0 IL116156 A0 IL 116156A0
Authority
IL
Israel
Prior art keywords
plasma
distribution system
gas distribution
cooled gas
cooled
Prior art date
Application number
IL11615695A
Other languages
English (en)
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL116156A0 publication Critical patent/IL116156A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
IL11615695A 1994-12-05 1995-11-27 Cooled gas distribution system for a plasma IL116156A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34929494A 1994-12-05 1994-12-05

Publications (1)

Publication Number Publication Date
IL116156A0 true IL116156A0 (en) 1996-01-31

Family

ID=23371747

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11615695A IL116156A0 (en) 1994-12-05 1995-11-27 Cooled gas distribution system for a plasma

Country Status (4)

Country Link
EP (1) EP0716440A1 (ja)
JP (1) JPH08236295A (ja)
KR (1) KR960023995A (ja)
IL (1) IL116156A0 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102368466B (zh) * 2011-09-20 2013-11-27 天通吉成机器技术有限公司 一种干法刻蚀坚硬无机材料基板等离子体刻蚀机的电极
KR101482630B1 (ko) 2012-11-07 2015-01-14 삼성디스플레이 주식회사 기상 증착 장치
KR101518398B1 (ko) * 2013-12-06 2015-05-08 참엔지니어링(주) 기판 처리 장치
KR101538461B1 (ko) * 2013-12-06 2015-07-22 참엔지니어링(주) 기판 처리 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209357A (en) * 1979-05-18 1980-06-24 Tegal Corporation Plasma reactor apparatus
US4590042A (en) * 1984-12-24 1986-05-20 Tegal Corporation Plasma reactor having slotted manifold
JPS61208222A (ja) * 1985-03-13 1986-09-16 Hitachi Ltd プラズマ処理方法及び装置
DE3677659D1 (de) * 1985-07-25 1991-04-04 Texas Instruments Inc Verfahren und geraet zur plasmabehandlung.
US5209291A (en) 1991-06-28 1993-05-11 Hughes Aircraft Company Cooling apparatus for optical devices
US5168924A (en) 1991-06-28 1992-12-08 Hughes Danbury Optical Systems, Inc. Low surface distortion monochromator
US5372674A (en) * 1993-05-14 1994-12-13 Hughes Aircraft Company Electrode for use in a plasma assisted chemical etching process

Also Published As

Publication number Publication date
EP0716440A1 (en) 1996-06-12
KR960023995A (ko) 1996-07-20
JPH08236295A (ja) 1996-09-13

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