IL115933A0 - Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls - Google Patents

Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls

Info

Publication number
IL115933A0
IL115933A0 IL11593395A IL11593395A IL115933A0 IL 115933 A0 IL115933 A0 IL 115933A0 IL 11593395 A IL11593395 A IL 11593395A IL 11593395 A IL11593395 A IL 11593395A IL 115933 A0 IL115933 A0 IL 115933A0
Authority
IL
Israel
Prior art keywords
sidewalls
oblique beam
effective laser
laser stripping
beam revolution
Prior art date
Application number
IL11593395A
Other languages
English (en)
Original Assignee
Oramir Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oramir Semiconductor Ltd filed Critical Oramir Semiconductor Ltd
Priority to IL11593395A priority Critical patent/IL115933A0/xx
Publication of IL115933A0 publication Critical patent/IL115933A0/xx
Priority to US09/068,056 priority patent/US6265138B1/en
Priority to JP9518032A priority patent/JP2000500284A/ja
Priority to KR1019980703445A priority patent/KR19990067434A/ko
Priority to PCT/IL1996/000140 priority patent/WO1997017163A1/en
Priority to EP96935313A priority patent/EP0859682A1/en
Priority to IL12413696A priority patent/IL124136A/en
Priority to AU73311/96A priority patent/AU7331196A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
IL11593395A 1995-11-09 1995-11-09 Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls IL115933A0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
IL11593395A IL115933A0 (en) 1995-11-09 1995-11-09 Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls
US09/068,056 US6265138B1 (en) 1995-11-09 1996-11-04 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
JP9518032A JP2000500284A (ja) 1995-11-09 1996-11-04 側壁を効果的にレーザ剥離するためにビームを斜めに回転させる方法と装置
KR1019980703445A KR19990067434A (ko) 1995-11-09 1996-11-04 효과적인 측벽의 레이저 스트리핑을 위한 경사 빔 회전 공정 및장치
PCT/IL1996/000140 WO1997017163A1 (en) 1995-11-09 1996-11-04 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
EP96935313A EP0859682A1 (en) 1995-11-09 1996-11-04 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
IL12413696A IL124136A (en) 1995-11-09 1996-11-04 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
AU73311/96A AU7331196A (en) 1995-11-09 1996-11-04 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL11593395A IL115933A0 (en) 1995-11-09 1995-11-09 Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls

Publications (1)

Publication Number Publication Date
IL115933A0 true IL115933A0 (en) 1996-01-31

Family

ID=11068163

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11593395A IL115933A0 (en) 1995-11-09 1995-11-09 Process and apparatus for oblique beam revolution for the effective laser stripping of sidewalls

Country Status (7)

Country Link
US (1) US6265138B1 (ja)
EP (1) EP0859682A1 (ja)
JP (1) JP2000500284A (ja)
KR (1) KR19990067434A (ja)
AU (1) AU7331196A (ja)
IL (1) IL115933A0 (ja)
WO (1) WO1997017163A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5800625A (en) * 1996-07-26 1998-09-01 Cauldron Limited Partnership Removal of material by radiation applied at an oblique angle
IL123416A0 (en) 1998-02-23 1998-09-24 Oramir Semiconductor Ltd Multi laser surface treatment in ambient fast flowing photoreactive gases
US6596644B1 (en) * 2002-01-16 2003-07-22 Xerox Corporation Methods for forming features in polymer layers
KR100840678B1 (ko) * 2002-06-12 2008-06-24 엘지디스플레이 주식회사 포토레지스트의 제거장치 및 이를 이용한 포토레지스트제거방법
US7820369B2 (en) * 2003-12-04 2010-10-26 International Business Machines Corporation Method for patterning a low activation energy photoresist
SG149039A1 (en) 2003-12-17 2009-01-29 Elan Pharm Inc Ass IMMUNOGENIC PEPTIDE CARRIER CONJUGATES AND METHODS OF PRODUCING SAME
TWI355390B (en) 2003-12-17 2012-01-01 Wyeth Llc Immunogenic peptide carrier conjugates and methods
WO2016122738A1 (en) 2015-01-31 2016-08-04 The Trustees Of The University Of Pennsylvania Compositions and methods for t cell delivery of therapeutic molecules
CN112666674A (zh) * 2020-12-28 2021-04-16 中国科学院长春光学精密机械与物理研究所 一种光学像移补偿方法及装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2060455A (en) 1979-10-20 1981-05-07 Metal Box Co Ltd Preparing thin metal sheet for welding
JP2674746B2 (ja) 1986-02-20 1997-11-12 日本電気株式会社 半導体製造装置
US4752668A (en) 1986-04-28 1988-06-21 Rosenfield Michael G System for laser removal of excess material from a semiconductor wafer
JPS6418226A (en) 1987-07-14 1989-01-23 M T C Japan Kk Dry ashing device
IL84255A (en) * 1987-10-23 1993-02-21 Galram Technology Ind Ltd Process for removal of post- baked photoresist layer
US4932282A (en) 1988-07-05 1990-06-12 Ford Motor Company Timing valve for manually selected gears of an automatic transmission
US5099557A (en) 1988-07-08 1992-03-31 Engelsberg Audrey C Removal of surface contaminants by irradiation from a high-energy source
US5024968A (en) 1988-07-08 1991-06-18 Engelsberg Audrey C Removal of surface contaminants by irradiation from a high-energy source
US5643472A (en) 1988-07-08 1997-07-01 Cauldron Limited Partnership Selective removal of material by irradiation
US4914270A (en) 1988-11-08 1990-04-03 University Of Southern California Method and apparatus for shaping articles using a laser beam
JPH02165616A (ja) 1988-12-19 1990-06-26 Mitsubishi Electric Corp 露光装置
EP0407969B1 (de) * 1989-07-14 1993-10-06 MAHO Aktiengesellschaft Verfahren und Vorrichtung zum Herstellen von Hohlräumen in Werkstücken mittels Laserstrahls
US5225650A (en) * 1989-07-14 1993-07-06 Maho Aktiengesellschaft Process and device for the manufacture of cavities in workpieces through laser beams
US5023424A (en) 1990-01-22 1991-06-11 Tencor Instruments Shock wave particle removal method and apparatus
US5319183A (en) * 1992-02-18 1994-06-07 Fujitsu Limited Method and apparatus for cutting patterns of printed wiring boards and method and apparatus for cleaning printed wiring boards
BR9306174A (pt) 1992-03-31 1998-01-13 Cauldron Lp Remoção de contaminantes de superfície através de irradiação
TW252211B (ja) 1993-04-12 1995-07-21 Cauldron Ltd Parthership
AU7682594A (en) * 1993-09-08 1995-03-27 Uvtech Systems, Inc. Surface processing
TW260806B (ja) 1993-11-26 1995-10-21 Ushio Electric Inc
US6009888A (en) 1998-05-07 2000-01-04 Chartered Semiconductor Manufacturing Company, Ltd. Photoresist and polymer removal by UV laser aqueous oxidant

Also Published As

Publication number Publication date
EP0859682A1 (en) 1998-08-26
WO1997017163A1 (en) 1997-05-15
JP2000500284A (ja) 2000-01-11
AU7331196A (en) 1997-05-29
KR19990067434A (ko) 1999-08-16
US6265138B1 (en) 2001-07-24

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