IL113258A0 - Ceramic target for thin film deposition
- Google Patents
Ceramic target for thin film deposition
Info
Publication number
IL113258A0
IL113258A0IL11325895AIL11325895AIL113258A0IL 113258 A0IL113258 A0IL 113258A0IL 11325895 AIL11325895 AIL 11325895AIL 11325895 AIL11325895 AIL 11325895AIL 113258 A0IL113258 A0IL 113258A0
Authority
IL
Israel
Prior art keywords
thin film
film deposition
ceramic target
ceramic
target
Prior art date
Application number
IL11325895A
Original Assignee
Technion Res & Dev Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technion Res & Dev FoundationfiledCriticalTechnion Res & Dev Foundation
Priority to IL11325895ApriorityCriticalpatent/IL113258A0/en
Publication of IL113258A0publicationCriticalpatent/IL113258A0/en