IL113258A0 - Ceramic target for thin film deposition - Google Patents

Ceramic target for thin film deposition

Info

Publication number
IL113258A0
IL113258A0 IL11325895A IL11325895A IL113258A0 IL 113258 A0 IL113258 A0 IL 113258A0 IL 11325895 A IL11325895 A IL 11325895A IL 11325895 A IL11325895 A IL 11325895A IL 113258 A0 IL113258 A0 IL 113258A0
Authority
IL
Israel
Prior art keywords
thin film
film deposition
ceramic target
ceramic
target
Prior art date
Application number
IL11325895A
Original Assignee
Technion Res & Dev Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technion Res & Dev Foundation filed Critical Technion Res & Dev Foundation
Priority to IL11325895A priority Critical patent/IL113258A0/en
Publication of IL113258A0 publication Critical patent/IL113258A0/en

Links

IL11325895A 1995-04-05 1995-04-05 Ceramic target for thin film deposition IL113258A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL11325895A IL113258A0 (en) 1995-04-05 1995-04-05 Ceramic target for thin film deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL11325895A IL113258A0 (en) 1995-04-05 1995-04-05 Ceramic target for thin film deposition

Publications (1)

Publication Number Publication Date
IL113258A0 true IL113258A0 (en) 1995-07-31

Family

ID=11067318

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11325895A IL113258A0 (en) 1995-04-05 1995-04-05 Ceramic target for thin film deposition

Country Status (1)

Country Link
IL (1) IL113258A0 (en)

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