IL109638A - Polishing tool components - Google Patents
Polishing tool componentsInfo
- Publication number
- IL109638A IL109638A IL10963894A IL10963894A IL109638A IL 109638 A IL109638 A IL 109638A IL 10963894 A IL10963894 A IL 10963894A IL 10963894 A IL10963894 A IL 10963894A IL 109638 A IL109638 A IL 109638A
- Authority
- IL
- Israel
- Prior art keywords
- elements
- abrasive
- component according
- carrier
- working
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 32
- 239000002245 particle Substances 0.000 claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 229920001169 thermoplastic Polymers 0.000 claims description 5
- 239000010432 diamond Substances 0.000 abstract description 4
- 229910003460 diamond Inorganic materials 0.000 abstract description 3
- 229910052582 BN Inorganic materials 0.000 abstract description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 229920008285 Poly(ether ketone) PEK Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004736 Ryton® Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229920003997 Torlon® Polymers 0.000 description 1
- 229920004878 Ultrapek® Polymers 0.000 description 1
- 229920004695 VICTREX™ PEEK Polymers 0.000 description 1
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- HJJVPARKXDDIQD-UHFFFAOYSA-N bromuconazole Chemical compound ClC1=CC(Cl)=CC=C1C1(CN2N=CN=C2)OCC(Br)C1 HJJVPARKXDDIQD-UHFFFAOYSA-N 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920006260 polyaryletherketone Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006389 polyphenyl polymer Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000004634 thermosetting polymer Substances 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D99/00—Subject matter not provided for in other groups of this subclass
- B24D99/005—Segments of abrasive wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
- B24D7/066—Grinding blocks; their mountings or supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Processing Of Terminals (AREA)
- Gripping On Spindles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB939309972A GB9309972D0 (en) | 1993-05-14 | 1993-05-14 | Tool insert |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL109638A0 IL109638A0 (en) | 1994-08-26 |
| IL109638A true IL109638A (en) | 1998-09-24 |
Family
ID=10735491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL10963894A IL109638A (en) | 1993-05-14 | 1994-05-12 | Polishing tool components |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US5607346A (de) |
| EP (1) | EP0655024B1 (de) |
| JP (1) | JPH08502930A (de) |
| AT (1) | ATE187377T1 (de) |
| AU (1) | AU682184B2 (de) |
| CA (1) | CA2136014A1 (de) |
| DE (1) | DE69422004T2 (de) |
| ES (1) | ES2139075T3 (de) |
| GB (1) | GB9309972D0 (de) |
| IL (1) | IL109638A (de) |
| WO (1) | WO1994026470A1 (de) |
| ZA (1) | ZA943301B (de) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1269964B (it) * | 1994-06-29 | 1997-04-16 | S E A Utensili Diamantati S P | Utensile porta-inserti diamantati per macchine automatiche e manuali tipo calibratrici, levigatrici e lucidatrici per l'industria lapidea, ceramica e piastrelle |
| US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| US6368198B1 (en) * | 1999-11-22 | 2002-04-09 | Kinik Company | Diamond grid CMP pad dresser |
| US6194317B1 (en) | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
| US8092707B2 (en) | 1997-04-30 | 2012-01-10 | 3M Innovative Properties Company | Compositions and methods for modifying a surface suited for semiconductor fabrication |
| IT246526Y1 (it) * | 1999-02-16 | 2002-04-09 | Master Service S R L | Spazzola per il trattamento superficiale di materiali |
| JP2002050016A (ja) * | 2000-07-28 | 2002-02-15 | Fujitsu Ltd | 磁気ヘッドスライダの製造方法及び装置 |
| JP3789744B2 (ja) | 2000-10-27 | 2006-06-28 | 富士通株式会社 | ラッピング装置及びラッピング方法 |
| SG90192A1 (en) * | 2000-11-06 | 2002-07-23 | Kinik Co | A diamond grid cmp pad dresser |
| USD501857S1 (en) * | 2003-04-24 | 2005-02-15 | 3M Innovative Properties Company | Abrasive member |
| USD498654S1 (en) | 2003-10-20 | 2004-11-23 | Smith Abrasives, Inc. | Diamond bench stone |
| KR101165114B1 (ko) * | 2004-10-06 | 2012-07-12 | 라지브 바자즈 | 향상된 화학 기계적 평탄화 작업용 장치 및 방법 |
| CN100513082C (zh) * | 2004-10-06 | 2009-07-15 | 拉杰夫·巴贾 | 用于改善的化学机械抛光的方法和设备 |
| US8075745B2 (en) * | 2004-11-29 | 2011-12-13 | Semiquest Inc. | Electro-method and apparatus for improved chemical mechanical planarization pad with uniform polish performance |
| US20070224925A1 (en) * | 2006-03-21 | 2007-09-27 | Rajeev Bajaj | Chemical Mechanical Polishing Pad |
| US7846008B2 (en) * | 2004-11-29 | 2010-12-07 | Semiquest Inc. | Method and apparatus for improved chemical mechanical planarization and CMP pad |
| US20090061744A1 (en) * | 2007-08-28 | 2009-03-05 | Rajeev Bajaj | Polishing pad and method of use |
| US7530880B2 (en) * | 2004-11-29 | 2009-05-12 | Semiquest Inc. | Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor |
| US20080318505A1 (en) * | 2004-11-29 | 2008-12-25 | Rajeev Bajaj | Chemical mechanical planarization pad and method of use thereof |
| US7815778B2 (en) * | 2005-11-23 | 2010-10-19 | Semiquest Inc. | Electro-chemical mechanical planarization pad with uniform polish performance |
| US7762871B2 (en) * | 2005-03-07 | 2010-07-27 | Rajeev Bajaj | Pad conditioner design and method of use |
| US8398463B2 (en) * | 2005-03-07 | 2013-03-19 | Rajeev Bajaj | Pad conditioner and method |
| USD576185S1 (en) * | 2006-11-23 | 2008-09-02 | Rin-Soon Park | Abrasive segment |
| USD566141S1 (en) * | 2007-02-23 | 2008-04-08 | Rin-Soon Park | Abrasive agent |
| US20090011679A1 (en) * | 2007-04-06 | 2009-01-08 | Rajeev Bajaj | Method of removal profile modulation in cmp pads |
| US8894731B2 (en) * | 2007-10-01 | 2014-11-25 | Saint-Gobain Abrasives, Inc. | Abrasive processing of hard and /or brittle materials |
| USD594889S1 (en) * | 2007-12-07 | 2009-06-23 | Rin-Soon Park | Grinding tip for grinder |
| US20090266002A1 (en) * | 2008-04-29 | 2009-10-29 | Rajeev Bajaj | Polishing pad and method of use |
| WO2009134775A1 (en) * | 2008-04-29 | 2009-11-05 | Semiquest, Inc. | Polishing pad composition and method of manufacture and use |
| US20090313905A1 (en) * | 2008-06-18 | 2009-12-24 | Stephen Fisher | Method and apparatus for assembly of cmp polishing pads |
| WO2010002832A2 (en) * | 2008-07-02 | 2010-01-07 | Saint-Gobain Abrasives, Inc. | Abrasive slicing tool for electronics industry |
| US8292692B2 (en) * | 2008-11-26 | 2012-10-23 | Semiquest, Inc. | Polishing pad with endpoint window and systems and method using the same |
| CH701596B1 (de) * | 2009-08-11 | 2013-08-15 | Meister Abrasives Ag | Abrichtwerkzeug. |
| ES1071330Y (es) * | 2009-09-30 | 2010-05-12 | Matilla Botella Raquel | Pieza multicapa para el pulido de piedra |
| US10226853B2 (en) | 2013-01-18 | 2019-03-12 | Applied Materials, Inc. | Methods and apparatus for conditioning of chemical mechanical polishing pads |
| KR20240061651A (ko) * | 2021-09-29 | 2024-05-08 | 엔테그리스, 아이엔씨. | 양면 패드 컨디셔너 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1290990A (en) * | 1916-05-09 | 1919-01-14 | Francis Bancroft | Abrading-disk. |
| US1953983A (en) * | 1928-02-07 | 1934-04-10 | Carborundum Co | Manufacture of rubber bonded abrasive articles |
| US2000772A (en) * | 1934-09-24 | 1935-05-07 | William H Mcgill | Grindstone |
| US2145888A (en) * | 1936-06-06 | 1939-02-07 | American Optical Corp | Abrading tool |
| US2225193A (en) * | 1937-09-15 | 1940-12-17 | Carborundum Co | Abrasive wheel |
| FR894614A (fr) * | 1943-02-05 | 1944-12-29 | Fromholt Et Janssens Ets | Perfectionnements apportés aux meules abrasives |
| US3343308A (en) * | 1965-12-30 | 1967-09-26 | Fessel Paul | Cutting and grinding devices |
| FR1533693A (fr) * | 1967-08-04 | 1968-07-19 | Tyrolit Schleifmittel Werke Sw | Meule flexible |
| DE2238387A1 (de) * | 1972-08-04 | 1974-03-28 | Winter & Sohn Ernst | Mehrschneidiges zerspanwerkzeug |
| DE2601788A1 (de) * | 1976-01-20 | 1977-07-21 | Effgen Fa Guenter | Schleifscheibe o.dgl. |
| ZA781154B (en) * | 1978-02-28 | 1979-09-26 | De Beers Ind Diamond | Abrasive bodies |
| FR2532875A1 (fr) * | 1982-09-14 | 1984-03-16 | Sti Applic Indles Diamant | Meule a patins abrasifs multiples |
| JPS59156669A (ja) * | 1983-02-21 | 1984-09-05 | Sumitomo Electric Ind Ltd | ソ−ブレ−ド用セグメント |
| DE8706303U1 (de) * | 1987-05-02 | 1987-06-19 | FAG Kugelfischer Georg Schäfer KGaA, 8720 Schweinfurt | Schleifkörper |
| GB8720498D0 (en) * | 1987-08-29 | 1987-10-07 | Saville P A | Tool/tools |
-
1993
- 1993-05-14 GB GB939309972A patent/GB9309972D0/en active Pending
-
1994
- 1994-05-12 IL IL10963894A patent/IL109638A/en not_active IP Right Cessation
- 1994-05-13 DE DE69422004T patent/DE69422004T2/de not_active Expired - Fee Related
- 1994-05-13 WO PCT/GB1994/001034 patent/WO1994026470A1/en not_active Ceased
- 1994-05-13 ES ES94915222T patent/ES2139075T3/es not_active Expired - Lifetime
- 1994-05-13 JP JP6525167A patent/JPH08502930A/ja active Pending
- 1994-05-13 AT AT94915222T patent/ATE187377T1/de active
- 1994-05-13 EP EP94915222A patent/EP0655024B1/de not_active Expired - Lifetime
- 1994-05-13 ZA ZA943301A patent/ZA943301B/xx unknown
- 1994-05-13 AU AU66551/94A patent/AU682184B2/en not_active Ceased
- 1994-05-13 CA CA002136014A patent/CA2136014A1/en not_active Abandoned
- 1994-05-13 US US08/367,301 patent/US5607346A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08502930A (ja) | 1996-04-02 |
| WO1994026470A1 (en) | 1994-11-24 |
| US5607346A (en) | 1997-03-04 |
| AU6655194A (en) | 1994-12-12 |
| ES2139075T3 (es) | 2000-02-01 |
| GB9309972D0 (en) | 1993-06-30 |
| DE69422004D1 (de) | 2000-01-13 |
| EP0655024A1 (de) | 1995-05-31 |
| DE69422004T2 (de) | 2000-06-29 |
| ATE187377T1 (de) | 1999-12-15 |
| CA2136014A1 (en) | 1994-11-24 |
| AU682184B2 (en) | 1997-09-25 |
| EP0655024B1 (de) | 1999-12-08 |
| IL109638A0 (en) | 1994-08-26 |
| ZA943301B (en) | 1995-01-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| MM9K | Patent not in force due to non-payment of renewal fees |