IL109193A0 - Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers - Google Patents

Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers

Info

Publication number
IL109193A0
IL109193A0 IL10919394A IL10919394A IL109193A0 IL 109193 A0 IL109193 A0 IL 109193A0 IL 10919394 A IL10919394 A IL 10919394A IL 10919394 A IL10919394 A IL 10919394A IL 109193 A0 IL109193 A0 IL 109193A0
Authority
IL
Israel
Prior art keywords
nonjamming
registration
semiconductor wafers
providing consistent
notched semiconductor
Prior art date
Application number
IL10919394A
Other languages
English (en)
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL109193A0 publication Critical patent/IL109193A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
IL10919394A 1993-04-12 1994-03-31 Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers IL109193A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4605393A 1993-04-12 1993-04-12

Publications (1)

Publication Number Publication Date
IL109193A0 true IL109193A0 (en) 1994-06-24

Family

ID=21941330

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10919394A IL109193A0 (en) 1993-04-12 1994-03-31 Apparatus and method for providing consistent, nonjamming registration of notched semiconductor wafers

Country Status (5)

Country Link
EP (1) EP0620584B1 (cs)
JP (1) JPH0758186A (cs)
DE (1) DE69401295T2 (cs)
IL (1) IL109193A0 (cs)
TW (1) TW244392B (cs)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19729714C2 (de) * 1997-07-11 2002-11-07 Brooks Automation Gmbh Vorrichtung und Verfahren zur Orientierung von kreisförmigen Substraten
KR100475732B1 (ko) * 1997-09-13 2005-07-05 삼성전자주식회사 포토설비의웨이퍼얼라인장치
FR2778496B1 (fr) 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
FR2835337B1 (fr) 2002-01-29 2004-08-20 Recif Sa Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation
DE102005007821B4 (de) * 2005-02-21 2014-08-21 Infineon Technologies Ag Vorrichtung mit einem Montageträger
CN103117239B (zh) * 2013-02-01 2017-02-01 上海华虹宏力半导体制造有限公司 一种用于干刻设备的导航片及导航方法
SG11201811325QA (en) * 2017-01-31 2019-01-30 Illumina Inc Wafer alignment method and system
CN107088770B (zh) * 2017-06-20 2023-09-08 浙江联宜电机有限公司 箱体车凸台工装

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820930A (en) * 1984-06-20 1989-04-11 Canon Kabushiki Kaisha Photomask positioning device
US4887904A (en) * 1985-08-23 1989-12-19 Canon Kabushiki Kaisha Device for positioning a semi-conductor wafer
US5180150A (en) * 1992-01-24 1993-01-19 Hughes Danbury Optical Systems, Inc. Apparatus for providing consistent registration of semiconductor wafers

Also Published As

Publication number Publication date
EP0620584A1 (en) 1994-10-19
JPH0758186A (ja) 1995-03-03
DE69401295D1 (de) 1997-02-13
TW244392B (cs) 1995-04-01
DE69401295T2 (de) 1997-07-24
EP0620584B1 (en) 1997-01-02

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