HUT48826A - Sublimating device for vacuum apparatus preparing layer - Google Patents

Sublimating device for vacuum apparatus preparing layer

Info

Publication number
HUT48826A
HUT48826A HU608587A HU608587A HUT48826A HU T48826 A HUT48826 A HU T48826A HU 608587 A HU608587 A HU 608587A HU 608587 A HU608587 A HU 608587A HU T48826 A HUT48826 A HU T48826A
Authority
HU
Hungary
Prior art keywords
vacuum apparatus
apparatus preparing
preparing layer
sublimating
sublimating device
Prior art date
Application number
HU608587A
Other languages
English (en)
Hungarian (hu)
Inventor
Milan Ferdinandy
Dusan Liska
Josef Kral
Ivan Pecar
Original Assignee
Vukov Koncernovy Vyskumny Usta
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vukov Koncernovy Vyskumny Usta filed Critical Vukov Koncernovy Vyskumny Usta
Publication of HUT48826A publication Critical patent/HUT48826A/hu

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
HU608587A 1986-12-31 1987-12-29 Sublimating device for vacuum apparatus preparing layer HUT48826A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS8610314A CS259290B1 (en) 1986-12-31 1986-12-31 Sublimer for vacuum device for layers preparation

Publications (1)

Publication Number Publication Date
HUT48826A true HUT48826A (en) 1989-07-28

Family

ID=5448609

Family Applications (1)

Application Number Title Priority Date Filing Date
HU608587A HUT48826A (en) 1986-12-31 1987-12-29 Sublimating device for vacuum apparatus preparing layer

Country Status (5)

Country Link
CH (1) CH674809A5 (cs)
CS (1) CS259290B1 (cs)
DD (1) DD289656A7 (cs)
DE (1) DE3743342A1 (cs)
HU (1) HUT48826A (cs)

Also Published As

Publication number Publication date
DE3743342A1 (de) 1988-07-14
CS259290B1 (en) 1988-10-14
CS1031486A1 (en) 1988-02-15
DD289656A7 (de) 1991-05-08
CH674809A5 (cs) 1990-07-31

Similar Documents

Publication Publication Date Title
EP0271351A3 (en) Vacuum evaporating apparatus
IL81265A (en) Evaporating apparatus
GB8929318D0 (en) Suscepton for vapour growth apparatus
GB8603999D0 (en) Vacuum monitoring apparatus
GB2197289B (en) Method and apparatus for vacuum packaging
GB8617326D0 (en) Device for holding bag
GB2194920B (en) Printing-plate preparation apparatus
EP0319347A3 (en) Vacuum depositing apparatus
EP0233610A3 (en) Method and apparatus for vapor deposition
GB2219489B (en) Apparatus for preparing an infusion
GB8719466D0 (en) Apparatus for transfer
GB8927513D0 (en) Vacuum frying apparatus
EP0238084A3 (en) Apparatus for depositing mono-molecular layer
ZA885573B (en) Apparatus for preparing samples
GB8712787D0 (en) Apparatus for detecting
GB8709323D0 (en) Apparatus for disabled
HUT48826A (en) Sublimating device for vacuum apparatus preparing layer
GB8707963D0 (en) Vacuum apparatus
GB8626340D0 (en) Apparatus for locating object
GB8729245D0 (en) Vacuum apparatus
HUT50063A (en) Apparatus for carrying out thermal processes
NZ217250A (en) Bell-shaped vacuum packaging apparatus
GB2193477B (en) Apparatus for turning articles over
CS400486A1 (en) Device for continuous preparing fluorographite
GB8817853D0 (en) Vacuum apparatus for vehicle

Legal Events

Date Code Title Description
DFC9 Refusal of application