CS1031486A1 - Sublimator pre vakuove zariadenie na pripravvu vrstiev - Google Patents

Sublimator pre vakuove zariadenie na pripravvu vrstiev

Info

Publication number
CS1031486A1
CS1031486A1 CS8610314A CS1031486A CS1031486A1 CS 1031486 A1 CS1031486 A1 CS 1031486A1 CS 8610314 A CS8610314 A CS 8610314A CS 1031486 A CS1031486 A CS 1031486A CS 1031486 A1 CS1031486 A1 CS 1031486A1
Authority
CS
Czechoslovakia
Prior art keywords
vrstiev
vakuove
pripravvu
zariadenie
sublimator
Prior art date
Application number
CS8610314A
Other languages
Czech (cs)
Other versions
CS259290B1 (en
Inventor
Milan Rndr Ferdinandy
Dusan Ing Liska
Jozef Ing Kral
Ivon Prom Fyz Pecar
Original Assignee
Ferdinandy Milan
Liska Dusan
Jozef Ing Kral
Ivon Prom Fyz Pecar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferdinandy Milan, Liska Dusan, Jozef Ing Kral, Ivon Prom Fyz Pecar filed Critical Ferdinandy Milan
Priority to CS8610314A priority Critical patent/CS259290B1/en
Priority to DD31076887A priority patent/DD289656A7/en
Priority to DE19873743342 priority patent/DE3743342A1/en
Priority to CH502187A priority patent/CH674809A5/de
Priority to HU608587A priority patent/HUT48826A/en
Publication of CS1031486A1 publication Critical patent/CS1031486A1/en
Publication of CS259290B1 publication Critical patent/CS259290B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CS8610314A 1986-12-31 1986-12-31 Sublimer for vacuum device for layers preparation CS259290B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CS8610314A CS259290B1 (en) 1986-12-31 1986-12-31 Sublimer for vacuum device for layers preparation
DD31076887A DD289656A7 (en) 1986-12-31 1987-12-18 SUBLIMATION PLANT FOR A VACUUM PLANT FOR THE PRODUCTION OF LAYERS
DE19873743342 DE3743342A1 (en) 1986-12-31 1987-12-21 Sublimator of a vacuum installation
CH502187A CH674809A5 (en) 1986-12-31 1987-12-23
HU608587A HUT48826A (en) 1986-12-31 1987-12-29 Sublimating device for vacuum apparatus preparing layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS8610314A CS259290B1 (en) 1986-12-31 1986-12-31 Sublimer for vacuum device for layers preparation

Publications (2)

Publication Number Publication Date
CS1031486A1 true CS1031486A1 (en) 1988-02-15
CS259290B1 CS259290B1 (en) 1988-10-14

Family

ID=5448609

Family Applications (1)

Application Number Title Priority Date Filing Date
CS8610314A CS259290B1 (en) 1986-12-31 1986-12-31 Sublimer for vacuum device for layers preparation

Country Status (5)

Country Link
CH (1) CH674809A5 (en)
CS (1) CS259290B1 (en)
DD (1) DD289656A7 (en)
DE (1) DE3743342A1 (en)
HU (1) HUT48826A (en)

Also Published As

Publication number Publication date
DE3743342A1 (en) 1988-07-14
CS259290B1 (en) 1988-10-14
DD289656A7 (en) 1991-05-08
CH674809A5 (en) 1990-07-31
HUT48826A (en) 1989-07-28

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