HUP1900246A1 - Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására - Google Patents

Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására

Info

Publication number
HUP1900246A1
HUP1900246A1 HU1900246A HUP1900246A HUP1900246A1 HU P1900246 A1 HUP1900246 A1 HU P1900246A1 HU 1900246 A HU1900246 A HU 1900246A HU P1900246 A HUP1900246 A HU P1900246A HU P1900246 A1 HUP1900246 A1 HU P1900246A1
Authority
HU
Hungary
Prior art keywords
monitoring
equipment
particle generator
spark particle
spark
Prior art date
Application number
HU1900246A
Other languages
English (en)
Inventor
Galbacs Gabor Dr
Geretovszky Zsolt Dr
Kohut Attila Dr
Original Assignee
Univ Szegedi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Szegedi filed Critical Univ Szegedi
Priority to HU1900246A priority Critical patent/HUP1900246A1/hu
Priority to EP20776220.4A priority patent/EP3994452A1/en
Priority to PCT/HU2020/050027 priority patent/WO2021005387A1/en
Publication of HUP1900246A1 publication Critical patent/HUP1900246A1/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/12—Making metallic powder or suspensions thereof using physical processes starting from gaseous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32972—Spectral analysis
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Biochemistry (AREA)
  • Nanotechnology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
HU1900246A 2019-07-05 2019-07-05 Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására HUP1900246A1 (hu)

Priority Applications (3)

Application Number Priority Date Filing Date Title
HU1900246A HUP1900246A1 (hu) 2019-07-05 2019-07-05 Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására
EP20776220.4A EP3994452A1 (en) 2019-07-05 2020-06-30 Method and apparatus for monitoring a spark discharge particle generator
PCT/HU2020/050027 WO2021005387A1 (en) 2019-07-05 2020-06-30 Method and apparatus for monitoring a spark discharge particle generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU1900246A HUP1900246A1 (hu) 2019-07-05 2019-07-05 Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására

Publications (1)

Publication Number Publication Date
HUP1900246A1 true HUP1900246A1 (hu) 2021-01-28

Family

ID=89992939

Family Applications (1)

Application Number Title Priority Date Filing Date
HU1900246A HUP1900246A1 (hu) 2019-07-05 2019-07-05 Eljárás és berendezés szikrakisülési részecskegenerátor monitorozására

Country Status (3)

Country Link
EP (1) EP3994452A1 (hu)
HU (1) HUP1900246A1 (hu)
WO (1) WO2021005387A1 (hu)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115354321B (zh) * 2022-09-22 2023-06-02 南昌航空大学 一种基于火花放电的颗粒自动种植装置与方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157867A (en) * 1998-02-27 2000-12-05 Taiwan Semiconductor Manufacturing Company Method and system for on-line monitoring plasma chamber condition by comparing intensity of certain wavelength
JP4105348B2 (ja) * 1999-11-19 2008-06-25 株式会社日立製作所 試料分析用モニタ装置及びそれを用いた燃焼制御システム
US6797336B2 (en) * 2001-03-22 2004-09-28 Ambp Tech Corporation Multi-component substances and processes for preparation thereof
EP1907827A2 (en) * 2005-07-20 2008-04-09 Thermo Niton Analyzers LLC Arc/spark optical emission spectroscopy correlated with spark location
JP6386287B2 (ja) * 2014-08-06 2018-09-05 東京エレクトロン株式会社 プラズマの安定性判定方法及びプラズマ処理装置
JP6337354B2 (ja) * 2015-01-20 2018-06-06 パナソニックＩｐマネジメント株式会社 微粒子製造装置及び微粒子製造方法

Also Published As

Publication number Publication date
WO2021005387A1 (en) 2021-01-14
EP3994452A1 (en) 2022-05-11

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