HUP0202964A2 - Alátámasztással stabilizált, integrálható, termikusan és elektromosan szigetelt membrán mikroszerkezetek - Google Patents
Alátámasztással stabilizált, integrálható, termikusan és elektromosan szigetelt membrán mikroszerkezetek Download PDFInfo
- Publication number
- HUP0202964A2 HUP0202964A2 HU0202964A HUP0202964A HUP0202964A2 HU P0202964 A2 HUP0202964 A2 HU P0202964A2 HU 0202964 A HU0202964 A HU 0202964A HU P0202964 A HUP0202964 A HU P0202964A HU P0202964 A2 HUP0202964 A2 HU P0202964A2
- Authority
- HU
- Hungary
- Prior art keywords
- membrane
- support
- point
- crystal
- gravity
- Prior art date
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- 239000012528 membrane Substances 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 claims abstract description 28
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 12
- 230000005484 gravity Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 7
- 239000013078 crystal Substances 0.000 claims abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract 2
- 229910021426 porous silicon Inorganic materials 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 239000003054 catalyst Substances 0.000 claims 1
- 230000003197 catalytic effect Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000001788 irregular Effects 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 239000011540 sensing material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 3
- 238000001312 dry etching Methods 0.000 abstract description 2
- 238000000427 thin-film deposition Methods 0.000 abstract description 2
- 238000001039 wet etching Methods 0.000 abstract description 2
- 230000007261 regionalization Effects 0.000 abstract 1
- 238000003801 milling Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HU0202964A HUP0202964A2 (hu) | 2002-09-09 | 2002-09-09 | Alátámasztással stabilizált, integrálható, termikusan és elektromosan szigetelt membrán mikroszerkezetek |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HU0202964A HUP0202964A2 (hu) | 2002-09-09 | 2002-09-09 | Alátámasztással stabilizált, integrálható, termikusan és elektromosan szigetelt membrán mikroszerkezetek |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HU0202964D0 HU0202964D0 (enExample) | 2002-11-28 |
| HUP0202964A2 true HUP0202964A2 (hu) | 2004-03-01 |
Family
ID=89980755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| HU0202964A HUP0202964A2 (hu) | 2002-09-09 | 2002-09-09 | Alátámasztással stabilizált, integrálható, termikusan és elektromosan szigetelt membrán mikroszerkezetek |
Country Status (1)
| Country | Link |
|---|---|
| HU (1) | HUP0202964A2 (enExample) |
-
2002
- 2002-09-09 HU HU0202964A patent/HUP0202964A2/hu unknown
Also Published As
| Publication number | Publication date |
|---|---|
| HU0202964D0 (enExample) | 2002-11-28 |
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| Date | Code | Title | Description |
|---|---|---|---|
| FA9A | Lapse of provisional patent protection due to relinquishment or protection considered relinquished |