HUE052716T2 - Úszóval rendelkezõ párologtató olvasztótégely - Google Patents

Úszóval rendelkezõ párologtató olvasztótégely

Info

Publication number
HUE052716T2
HUE052716T2 HUE16747614A HUE16747614A HUE052716T2 HU E052716 T2 HUE052716 T2 HU E052716T2 HU E16747614 A HUE16747614 A HU E16747614A HU E16747614 A HUE16747614 A HU E16747614A HU E052716 T2 HUE052716 T2 HU E052716T2
Authority
HU
Hungary
Prior art keywords
floater
evaporation crucible
crucible
evaporation
Prior art date
Application number
HUE16747614A
Other languages
English (en)
Inventor
Reto Pfeiffer
Original Assignee
Flisom Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Flisom Ag filed Critical Flisom Ag
Publication of HUE052716T2 publication Critical patent/HUE052716T2/hu

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
HUE16747614A 2015-06-29 2016-06-28 Úszóval rendelkezõ párologtató olvasztótégely HUE052716T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201562186065P 2015-06-29 2015-06-29

Publications (1)

Publication Number Publication Date
HUE052716T2 true HUE052716T2 (hu) 2021-05-28

Family

ID=56567642

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE16747614A HUE052716T2 (hu) 2015-06-29 2016-06-28 Úszóval rendelkezõ párologtató olvasztótégely

Country Status (3)

Country Link
EP (1) EP3314034B8 (hu)
HU (1) HUE052716T2 (hu)
WO (1) WO2017001910A1 (hu)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018114379A1 (en) * 2016-12-22 2018-06-28 Flisom Ag Roll-to roll vapor deposition system
CN109518136B (zh) * 2019-01-24 2020-11-27 成都京东方光电科技有限公司 蒸镀结构、蒸镀系统及蒸镀结构的使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1103211A (en) * 1965-01-08 1968-02-14 Mullard Ltd Improvements in and relating to vapour deposition and evaporation sources
JPS5896872A (ja) * 1981-12-04 1983-06-09 Mitsubishi Heavy Ind Ltd 真空蒸着部

Also Published As

Publication number Publication date
WO2017001910A1 (en) 2017-01-05
EP3314034B8 (en) 2020-12-30
EP3314034A1 (en) 2018-05-02
EP3314034B1 (en) 2020-10-14

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