SG10201608496UA - Crucible - Google Patents

Crucible

Info

Publication number
SG10201608496UA
SG10201608496UA SG10201608496UA SG10201608496UA SG10201608496UA SG 10201608496U A SG10201608496U A SG 10201608496UA SG 10201608496U A SG10201608496U A SG 10201608496UA SG 10201608496U A SG10201608496U A SG 10201608496UA SG 10201608496U A SG10201608496U A SG 10201608496UA
Authority
SG
Singapore
Prior art keywords
crucible
Prior art date
Application number
SG10201608496UA
Inventor
Yen-Kuang Tan Kelvin
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to SG10201608496UA priority Critical patent/SG10201608496UA/en
Priority to TW106103293A priority patent/TWI599667B/en
Priority to CN201710249202.3A priority patent/CN106906444B/en
Priority to US15/491,208 priority patent/US10017848B2/en
Publication of SG10201608496UA publication Critical patent/SG10201608496UA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
SG10201608496UA 2016-10-11 2016-10-11 Crucible SG10201608496UA (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SG10201608496UA SG10201608496UA (en) 2016-10-11 2016-10-11 Crucible
TW106103293A TWI599667B (en) 2016-10-11 2017-01-26 Crucible
CN201710249202.3A CN106906444B (en) 2016-10-11 2017-04-17 crucible
US15/491,208 US10017848B2 (en) 2016-10-11 2017-04-19 Crucible

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG10201608496UA SG10201608496UA (en) 2016-10-11 2016-10-11 Crucible

Publications (1)

Publication Number Publication Date
SG10201608496UA true SG10201608496UA (en) 2018-05-30

Family

ID=59210581

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201608496UA SG10201608496UA (en) 2016-10-11 2016-10-11 Crucible

Country Status (4)

Country Link
US (1) US10017848B2 (en)
CN (1) CN106906444B (en)
SG (1) SG10201608496UA (en)
TW (1) TWI599667B (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3572672A (en) * 1968-11-22 1971-03-30 Rca Corp Vacuum evaporation apparatus
JPH01306555A (en) * 1988-06-06 1989-12-11 Agency Of Ind Science & Technol Crucible for evaporation source
US20050051097A1 (en) * 2003-09-08 2005-03-10 Jan Koninckx Covering assembly for crucible used for evaporation of raw materials
KR100651258B1 (en) 2004-10-11 2006-11-29 두산디앤디 주식회사 Multi-nozzle crucible assembly for OLED deposition process
US7780439B2 (en) * 2004-11-17 2010-08-24 Duncan Enterprises Kilns for the processing ceramics and methods for using such kilns
WO2006132309A1 (en) * 2005-06-09 2006-12-14 Nippon Crucible Co., Ltd. Crucible type continuous melting furnace
US20070178225A1 (en) * 2005-12-14 2007-08-02 Keiji Takanosu Vapor deposition crucible, thin-film forming apparatus comprising the same, and method of producing display device
US20080160472A1 (en) * 2006-12-27 2008-07-03 Yu-Feng Chang Sinter furnace for sapphire crystal growth
EP1967606A1 (en) * 2007-03-08 2008-09-10 Applied Materials, Inc. Evaporation crucible and evaporation apparatus with adapted evaporation characteristic
KR101015336B1 (en) * 2008-08-22 2011-02-16 삼성모바일디스플레이주식회사 Inner plate and crucible assembly for deposition having the same
TWI397617B (en) * 2010-02-12 2013-06-01 Masahiro Hoshino Metal silicon purification device
DE102011000502A1 (en) * 2011-02-04 2012-08-09 Solibro Gmbh Separator and method of making a crucible therefor
TW201303055A (en) * 2011-07-07 2013-01-16 Hon Hai Prec Ind Co Ltd Crucible, vacuum evaporation system and method using the same
KR101197271B1 (en) * 2012-01-04 2012-11-05 지제이엠 주식회사 Crucible apparatus for organic thin film deposition
CN103757590B (en) * 2013-12-31 2016-04-20 深圳市华星光电技术有限公司 A kind of coating equipment Crucible equipment
CN104404450B (en) * 2014-10-28 2018-06-01 深圳市华星光电技术有限公司 For the crucible of subliming type OLED material vapor deposition

Also Published As

Publication number Publication date
TW201814072A (en) 2018-04-16
US20180100230A1 (en) 2018-04-12
CN106906444A (en) 2017-06-30
CN106906444B (en) 2019-01-04
US10017848B2 (en) 2018-07-10
TWI599667B (en) 2017-09-21

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