HU9902355D0 - High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors - Google Patents

High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors

Info

Publication number
HU9902355D0
HU9902355D0 HU9902355A HUP9902355A HU9902355D0 HU 9902355 D0 HU9902355 D0 HU 9902355D0 HU 9902355 A HU9902355 A HU 9902355A HU P9902355 A HUP9902355 A HU P9902355A HU 9902355 D0 HU9902355 D0 HU 9902355D0
Authority
HU
Hungary
Prior art keywords
semiconductors
lifetime
measurement
high sensitivity
charge carriers
Prior art date
Application number
HU9902355A
Other languages
Hungarian (hu)
Inventor
Tibor Pavelka
Original Assignee
Semilab Felvezetoe Fiz Lab Rt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semilab Felvezetoe Fiz Lab Rt filed Critical Semilab Felvezetoe Fiz Lab Rt
Priority to HU9902355A priority Critical patent/HUP9902355A2/en
Publication of HU9902355D0 publication Critical patent/HU9902355D0/en
Priority to PCT/HU2000/000077 priority patent/WO2001004610A2/en
Publication of HUP9902355A2 publication Critical patent/HUP9902355A2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2648—Characterising semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
HU9902355A 1999-07-12 1999-07-12 High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors HUP9902355A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
HU9902355A HUP9902355A2 (en) 1999-07-12 1999-07-12 High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors
PCT/HU2000/000077 WO2001004610A2 (en) 1999-07-12 2000-07-12 Method and apparatus for sensitive measurement of the lifetime of minority carriers in semiconductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU9902355A HUP9902355A2 (en) 1999-07-12 1999-07-12 High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors

Publications (2)

Publication Number Publication Date
HU9902355D0 true HU9902355D0 (en) 1999-09-28
HUP9902355A2 HUP9902355A2 (en) 2001-07-30

Family

ID=89998710

Family Applications (1)

Application Number Title Priority Date Filing Date
HU9902355A HUP9902355A2 (en) 1999-07-12 1999-07-12 High sensitivity method and apparatus for the measurement of the lifetime of minority charge carriers in semiconductors

Country Status (2)

Country Link
HU (1) HUP9902355A2 (en)
WO (1) WO2001004610A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111624158A (en) * 2020-06-10 2020-09-04 苏州科技大学 Online laser pulse ultrafast dynamics detection equipment and application method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6704275B2 (en) 2016-03-28 2020-06-03 株式会社ディスコ Device wafer evaluation method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236817B2 (en) * 1973-07-27 1977-09-19
DE3407850A1 (en) * 1984-02-29 1985-09-05 Hahn-Meitner-Institut für Kernforschung Berlin GmbH, 1000 Berlin MICROWAVE MEASURING METHOD AND MEASURING APPARATUS FOR CONTACTLESS AND DESTRUCTION-FREE EXAMINATION OF PHOTO-SENSITIVE MATERIALS
US5406214A (en) * 1990-12-17 1995-04-11 Semilab Felvezeto Fizikai Lab, Rt Method and apparatus for measuring minority carrier lifetime in semiconductor materials

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111624158A (en) * 2020-06-10 2020-09-04 苏州科技大学 Online laser pulse ultrafast dynamics detection equipment and application method thereof

Also Published As

Publication number Publication date
WO2001004610A3 (en) 2001-08-09
WO2001004610A2 (en) 2001-01-18
HUP9902355A2 (en) 2001-07-30

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Legal Events

Date Code Title Description
FA9A Lapse of provisional patent protection due to relinquishment or protection considered relinquished