HU231120B1 - Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére - Google Patents

Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére Download PDF

Info

Publication number
HU231120B1
HU231120B1 HU1300137A HUP1300137A HU231120B1 HU 231120 B1 HU231120 B1 HU 231120B1 HU 1300137 A HU1300137 A HU 1300137A HU P1300137 A HUP1300137 A HU P1300137A HU 231120 B1 HU231120 B1 HU 231120B1
Authority
HU
Hungary
Prior art keywords
euv
electromagnetic radiation
radiation generating
coherent electromagnetic
optical period
Prior art date
Application number
HU1300137A
Other languages
English (en)
Inventor
Almasi Gabor Dr
Hebling Janos Dr
Zoltan Tibai
Gyoergy Toth
Matyas Mechler
Original Assignee
Pecsi Tudomanyegyetem
Mta Tamogatott Kutatocsoportok Irodaja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pecsi Tudomanyegyetem, Mta Tamogatott Kutatocsoportok Irodaja filed Critical Pecsi Tudomanyegyetem
Priority to HU1300137A priority Critical patent/HU231120B1/hu
Priority to EP14745229.6A priority patent/EP2965391B1/en
Priority to US14/773,006 priority patent/US9548584B2/en
Priority to PCT/HU2014/000023 priority patent/WO2014135907A2/en
Publication of HUP1300137A2 publication Critical patent/HUP1300137A2/hu
Publication of HU231120B1 publication Critical patent/HU231120B1/hu

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0955—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles
    • H01S3/0959—Processes or apparatus for excitation, e.g. pumping using pumping by high energy particles by an electron beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/0903—Free-electron laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • H05H2007/041—Magnet systems, e.g. undulators, wigglers; Energisation thereof for beam bunching, e.g. undulators

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)
  • Lasers (AREA)
HU1300137A 2013-03-05 2013-03-05 Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére HU231120B1 (hu)

Priority Applications (4)

Application Number Priority Date Filing Date Title
HU1300137A HU231120B1 (hu) 2013-03-05 2013-03-05 Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére
EP14745229.6A EP2965391B1 (en) 2013-03-05 2014-03-05 Method and arrangement to generate few optical cycle coherent electromagnetic radiation in the euv-vuv domain
US14/773,006 US9548584B2 (en) 2013-03-05 2014-03-05 Method and arrangement to generate few optical cycle coherent electromagnetic radiation in the EUV-VUV domain
PCT/HU2014/000023 WO2014135907A2 (en) 2013-03-05 2014-03-05 Method and arrangement to generate few optical cycle coherent electromagnetic radiation in the euv-vuv domain

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU1300137A HU231120B1 (hu) 2013-03-05 2013-03-05 Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére

Publications (2)

Publication Number Publication Date
HUP1300137A2 HUP1300137A2 (en) 2014-09-29
HU231120B1 true HU231120B1 (hu) 2021-03-01

Family

ID=89991057

Family Applications (1)

Application Number Title Priority Date Filing Date
HU1300137A HU231120B1 (hu) 2013-03-05 2013-03-05 Eljárás és elrendezés EUV-VUV tartományba esõ, néhány optikai ciklust tartalmazó koherens elektromágneses sugárzás keltésére

Country Status (4)

Country Link
US (1) US9548584B2 (hu)
EP (1) EP2965391B1 (hu)
HU (1) HU231120B1 (hu)
WO (1) WO2014135907A2 (hu)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2697879C1 (ru) * 2018-08-14 2019-08-21 Общество с ограниченной ответственностью "АВЕСТА" (ООО "АВЕСТА") Фемтосекундный оптико-электронный комплекс для измерения поля тгц импульсов, получаемых с помощью ускорителя электронов
US11700684B2 (en) * 2021-07-07 2023-07-11 Triseka, Inc. Light source for high power coherent light, imaging system, and method of using relativistic electrons for imaging and treatment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010555A (en) * 1986-10-22 1991-04-23 Madey John M J Non-linear intractivity optical devices for free electron lasers
US7619231B2 (en) * 2007-08-30 2009-11-17 National Tsing Hua University Laser-beat-wave photocathode electron accelerator and electron radiation apparatus using the same
HU230587B1 (hu) 2011-08-18 2017-02-28 Pécsi Tudományegyetem Rövid periódusú undulátor
US9053833B2 (en) * 2013-02-27 2015-06-09 Kla-Tencor Technologies, Corporation DC high-voltage super-radiant free-electron based EUV source

Also Published As

Publication number Publication date
EP2965391B1 (en) 2017-12-27
HUP1300137A2 (en) 2014-09-29
US20160020574A1 (en) 2016-01-21
WO2014135907A2 (en) 2014-09-12
EP2965391A2 (en) 2016-01-13
WO2014135907A3 (en) 2014-12-31
US9548584B2 (en) 2017-01-17

Similar Documents

Publication Publication Date Title
EP3006953A4 (en) LASER RADAR DEVICE AND METHOD FOR GENERATING A LASER IMAGE
IL244344A0 (en) Install fund delivery and method
HK1205715A1 (zh) 用於在透明材料內執行激光成絲的方法和設備
HK1205986A1 (en) Apparatus and method for generating power
EP2985781A4 (en) LIGHT SOURCE WITH A LASER PUMPING PROCESS AND METHOD FOR GENERATING RADIATION
LT3057736T (lt) Lazerinio mikroapdirbimo būdas ir įrenginys
EP2835883A4 (en) WAVELENGTH ADJUSTABLE LASER OUTPUT METHOD AND ADJUSTABLE LASER DEVICE
GB2518948B (en) Method and apparatus for tracking an object
GB2529770B (en) Implementation concepts and related methods for optical computing devices
EP2983015A4 (en) OPTICAL ELEMENT AND OPTICAL APPARATUS
EP2918689A4 (en) LASER PROCESSING DEVICE AND LASER IRRADIATION METHOD
EP2958719A4 (en) APPARATUS AND METHOD FOR FORMING THREE-DIMENSIONAL OBJECTS USING LINEAR SOLIDIFICATION
HK1218783A1 (zh) 焦點調節方法及其裝置
EP3076722A4 (en) METHOD AND DEVICE FOR ALIGNING BEAMS
EP2999147A4 (en) METHOD AND DEVICE FOR GENERATING SIMULATED INTERFERENCE
EP2985566A4 (en) DATA GENERATION PROCESS AND DATA GENERATING DEVICE
EP2911153A4 (en) LASER FUSION DEVICE AND NUCLEAR FUSION PROCESS
EP3028233A4 (en) METHOD AND DEVICE FOR ONLINE BALANCE OF GOODS
SG11201508595SA (en) Laser Beam Shielding Member, Laser Processing Device And Laser Beam Irradiation Method
IL245128A0 (en) Device for shaping laser radiation
GB2521765B (en) Radiation measurement apparatus and method
GB2517123B (en) Method and apparatus for mounting optical components
EP2990077A4 (en) PARTICLE BEAM PROCESSING DEVICE AND METHOD OF OPERATION THEREOF
HK1204202A1 (en) A device and method for generating even and orderly -ray radiation field
HUP1300137A2 (en) Method and device for coherent electromagnetic radiation generating which comprises some optical period in euv-vuv range