HU175322B - Sposob izgotovlenija fazovoj maski s strukturoj amplitudnoj maski - Google Patents

Sposob izgotovlenija fazovoj maski s strukturoj amplitudnoj maski

Info

Publication number
HU175322B
HU175322B HU77ZE454A HUZE000454A HU175322B HU 175322 B HU175322 B HU 175322B HU 77ZE454 A HU77ZE454 A HU 77ZE454A HU ZE000454 A HUZE000454 A HU ZE000454A HU 175322 B HU175322 B HU 175322B
Authority
HU
Hungary
Prior art keywords
mask
making phase
amplitude
mask structure
phase mask
Prior art date
Application number
HU77ZE454A
Other languages
English (en)
Inventor
Hartmut Haensel
Wulf Polack
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of HU175322B publication Critical patent/HU175322B/hu

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Polarising Elements (AREA)
HU77ZE454A 1976-04-30 1977-02-03 Sposob izgotovlenija fazovoj maski s strukturoj amplitudnoj maski HU175322B (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19261376A DD126361A1 (hu) 1976-04-30 1976-04-30

Publications (1)

Publication Number Publication Date
HU175322B true HU175322B (hu) 1980-06-28

Family

ID=5504372

Family Applications (1)

Application Number Title Priority Date Filing Date
HU77ZE454A HU175322B (hu) 1976-04-30 1977-02-03 Sposob izgotovlenija fazovoj maski s strukturoj amplitudnoj maski

Country Status (4)

Country Link
JP (1) JPS52133756A (hu)
DD (1) DD126361A1 (hu)
DE (1) DE2650817A1 (hu)
HU (1) HU175322B (hu)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0090924B1 (en) * 1982-04-05 1987-11-11 International Business Machines Corporation Method of increasing the image resolution of a transmitting mask and improved masks for performing the method
JPS62291660A (ja) * 1986-06-10 1987-12-18 Nec Corp 半導体装置の製造方法
US4902899A (en) * 1987-06-01 1990-02-20 International Business Machines Corporation Lithographic process having improved image quality
US5234780A (en) * 1989-02-13 1993-08-10 Kabushiki Kaisha Toshiba Exposure mask, method of manufacturing the same, and exposure method using the same
JPH0763676A (ja) * 1993-08-27 1995-03-10 Mitsubishi Electric Corp 位相シフトレティクル性能検査装置及び性能検査方法
US5415953A (en) * 1994-02-14 1995-05-16 E. I. Du Pont De Nemours And Company Photomask blanks comprising transmissive embedded phase shifter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029939B2 (hu) * 1972-07-05 1975-09-27

Also Published As

Publication number Publication date
DD126361A1 (hu) 1977-07-13
JPS52133756A (en) 1977-11-09
DE2650817A1 (de) 1977-11-17

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