HK164495A - Process for preparing a superconducting thin film - Google Patents

Process for preparing a superconducting thin film

Info

Publication number
HK164495A
HK164495A HK164495A HK164495A HK164495A HK 164495 A HK164495 A HK 164495A HK 164495 A HK164495 A HK 164495A HK 164495 A HK164495 A HK 164495A HK 164495 A HK164495 A HK 164495A
Authority
HK
Hong Kong
Prior art keywords
preparing
thin film
superconducting thin
superconducting
film
Prior art date
Application number
HK164495A
Other languages
English (en)
Inventor
Hideo Itozaki
Nobuhiko Fujita
Kengo Okura
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of HK164495A publication Critical patent/HK164495A/xx

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4504—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
HK164495A 1987-02-05 1995-10-19 Process for preparing a superconducting thin film HK164495A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2522287 1987-02-05
JP3377487 1987-02-17

Publications (1)

Publication Number Publication Date
HK164495A true HK164495A (en) 1995-10-27

Family

ID=26362812

Family Applications (1)

Application Number Title Priority Date Filing Date
HK164495A HK164495A (en) 1987-02-05 1995-10-19 Process for preparing a superconducting thin film

Country Status (5)

Country Link
US (1) US5478800A (de)
EP (1) EP0277885B1 (de)
CA (1) CA1339019C (de)
DE (1) DE3886429T2 (de)
HK (1) HK164495A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63206462A (ja) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk 導電性又は超伝導性薄膜の製造方法
KR0132061B1 (ko) † 1987-03-14 1998-04-24 나까하라 쯔네오 초전도 박막의 제작 방법
DE4025172C2 (de) * 1990-08-08 1993-12-23 Siemens Ag Sputtervorrichtung zur Herstellung einer dünnen Schicht aus einem Hochtemperatursupraleiter-Material und Verfahren zu deren Betrieb
IT1253055B (it) * 1991-10-09 1995-07-10 Castellini Spa Apparecchiatura per la disinfezione/sterilizzazione di unita' di filtraggio associabili ad apparecchiature mediche per la sterilizzazione dei loro fluidi di alimentazione e relativo metodo
US6004617A (en) * 1994-10-18 1999-12-21 The Regents Of The University Of California Combinatorial synthesis of novel materials
US5985356A (en) 1994-10-18 1999-11-16 The Regents Of The University Of California Combinatorial synthesis of novel materials
US20050249981A1 (en) * 2004-05-10 2005-11-10 Heraeus, Inc. Grain structure for magnetic recording media

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3932315A (en) * 1974-09-24 1976-01-13 E. I. Du Pont De Nemours & Company Superconductive barium-lead-bismuth oxides
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
US4316785A (en) * 1979-11-05 1982-02-23 Nippon Telegraph & Telephone Public Corporation Oxide superconductor Josephson junction and fabrication method therefor
JPS6096599A (ja) * 1983-10-31 1985-05-30 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導体薄膜の製造方法
JPS63206462A (ja) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk 導電性又は超伝導性薄膜の製造方法
KR0132061B1 (ko) * 1987-03-14 1998-04-24 나까하라 쯔네오 초전도 박막의 제작 방법
DE3715623A1 (de) * 1987-05-11 1988-11-24 Kernforschungsz Karlsruhe Verfahren zur herstellung von duennen supraleitenden filmen aus keramischem material

Also Published As

Publication number Publication date
CA1339019C (en) 1997-03-25
US5478800A (en) 1995-12-26
EP0277885A2 (de) 1988-08-10
DE3886429D1 (de) 1994-02-03
EP0277885A3 (en) 1989-10-11
EP0277885B1 (de) 1993-12-22
DE3886429T2 (de) 1994-07-28

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20040205

PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)