HK1252418A1 - 具有連續的凹進部的電路板模塊以及與之相關的聲音轉換器組件以及製作方法 - Google Patents

具有連續的凹進部的電路板模塊以及與之相關的聲音轉換器組件以及製作方法

Info

Publication number
HK1252418A1
HK1252418A1 HK18111715.1A HK18111715A HK1252418A1 HK 1252418 A1 HK1252418 A1 HK 1252418A1 HK 18111715 A HK18111715 A HK 18111715A HK 1252418 A1 HK1252418 A1 HK 1252418A1
Authority
HK
Hong Kong
Prior art keywords
circuit board
production method
transducer assembly
board module
sonic transducer
Prior art date
Application number
HK18111715.1A
Other languages
English (en)
Inventor
Clerici Beltrami Andrea Rusconi
Ferruccio Bottoni
Original Assignee
USound GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USound GmbH filed Critical USound GmbH
Publication of HK1252418A1 publication Critical patent/HK1252418A1/zh

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/02Loudspeakers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021Transducers for transforming electrical into mechanical energy or vice versa
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0058Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/007Interconnections between the MEMS and external electrical signals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0035Testing
    • B81C99/004Testing during manufacturing
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/20Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2807Enclosures comprising vibrating or resonating arrangements
    • H04R1/2811Enclosures comprising vibrating or resonating arrangements for loudspeaker transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006Interconnection of transducer parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0257Microphones or microspeakers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/01Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0315Cavities
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00Microstructural systems or auxiliary parts thereof
    • B81B2207/01Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/012Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00Microstructural systems or auxiliary parts thereof
    • B81B2207/09Packages
    • B81B2207/091Arrangements for connecting external electrical signals to mechanical structures inside the package
    • B81B2207/097Interconnects arranged on the substrate or the lid, and covered by the package seal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0061Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00Assembling of devices or systems from individually processed components
    • B81C3/001Bonding of two components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0005Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/0025Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Otolaryngology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
HK18111715.1A 2015-05-13 2018-09-12 具有連續的凹進部的電路板模塊以及與之相關的聲音轉換器組件以及製作方法 HK1252418A1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015107557.1A DE102015107557A1 (de) 2015-05-13 2015-05-13 Leiterplattenmodul mit durchgehender Aussparung sowie diesbezügliche Schallwandleranordnung sowie Herstellungsverfahren

Publications (1)

Publication Number Publication Date
HK1252418A1 true HK1252418A1 (zh) 2019-05-24

Family

ID=56014977

Family Applications (1)

Application Number Title Priority Date Filing Date
HK18111715.1A HK1252418A1 (zh) 2015-05-13 2018-09-12 具有連續的凹進部的電路板模塊以及與之相關的聲音轉換器組件以及製作方法

Country Status (11)

Country Link
US (1) US10206046B2 (zh)
EP (1) EP3295680B1 (zh)
KR (1) KR20180014727A (zh)
CN (1) CN107836121B (zh)
AU (1) AU2016261304B2 (zh)
CA (1) CA2985723A1 (zh)
DE (1) DE102015107557A1 (zh)
HK (1) HK1252418A1 (zh)
MY (1) MY178847A (zh)
SG (2) SG10201907304XA (zh)
WO (1) WO2016180841A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
TWI707586B (zh) * 2018-08-14 2020-10-11 美律實業股份有限公司 微機電揚聲器
US11078071B2 (en) 2018-10-19 2021-08-03 Encite Llc Haptic actuators fabricated by roll-to-roll processing
DE102019101325A1 (de) 2019-01-17 2020-07-23 USound GmbH Herstellungsverfahren für mehrere MEMS-Schallwandler
KR102375721B1 (ko) * 2019-11-04 2022-03-17 (주)에스제이인스트루먼트 초음파 트랜스듀서 조립체

Family Cites Families (18)

* Cited by examiner, † Cited by third party
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US3701865A (en) * 1971-06-25 1972-10-31 Industrial Research Prod Inc Acoustic transducer having diaphragm pivoted in its surround
DE4229244A1 (de) * 1992-09-02 1994-03-03 Basf Ag Verfahren zur Herstellung von Mikrostrukturkörpern
US5870482A (en) 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
US8617934B1 (en) 2000-11-28 2013-12-31 Knowles Electronics, Llc Methods of manufacture of top port multi-part surface mount silicon condenser microphone packages
US7166910B2 (en) * 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
CN101198854B (zh) 2005-06-10 2012-06-20 米其林研究和技术股份有限公司 附着于电子封装外壳的压电传感器的使用
DE102005053767B4 (de) * 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
CN201114763Y (zh) * 2007-10-09 2008-09-10 东莞泉声电子有限公司 一种硅传声器
JP5269659B2 (ja) * 2009-03-17 2013-08-21 株式会社オーディオテクニカ コンデンサマイクロホンユニット、コンデンサマイクロホンユニットの製造方法、及びコンデンサマイクロホン
US8338208B2 (en) * 2009-12-31 2012-12-25 Texas Instruments Incorporated Micro-electro-mechanical system having movable element integrated into leadframe-based package
JP5348073B2 (ja) * 2010-06-01 2013-11-20 船井電機株式会社 電気音響変換素子搭載基板及びマイクロホンユニット、並びにそれらの製造方法
US9407997B2 (en) * 2010-10-12 2016-08-02 Invensense, Inc. Microphone package with embedded ASIC
DE102011084393A1 (de) 2011-10-13 2013-04-18 Robert Bosch Gmbh Mikromechanische Funktionsvorrichtung, insbesondere Lautsprechervorrichtung, und entsprechendes Herstellungsverfahren
CN103999484B (zh) 2011-11-04 2017-06-30 美商楼氏电子有限公司 作为声学设备中的屏障的嵌入式电介质和制造方法
DE102011086764A1 (de) 2011-11-22 2013-05-23 Robert Bosch Gmbh MEMS-Chippackage und Verfahren zum Herstellen eines MEMS-Chippackages
CN102655617B (zh) * 2012-05-24 2015-09-30 歌尔声学股份有限公司 麦克风及其装配方法
DE102012209235B4 (de) * 2012-05-31 2023-08-10 Robert Bosch Gmbh Sensormodul mit zwei mikromechanischen Sensorelementen
US9082883B2 (en) * 2013-03-04 2015-07-14 Unisem (M) Berhad Top port MEMS cavity package and method of manufacture thereof

Also Published As

Publication number Publication date
MY178847A (en) 2020-10-21
US20180091905A1 (en) 2018-03-29
US10206046B2 (en) 2019-02-12
SG11201709340PA (en) 2017-12-28
CN107836121A (zh) 2018-03-23
CA2985723A1 (en) 2016-11-17
EP3295680A1 (de) 2018-03-21
SG10201907304XA (en) 2019-09-27
AU2016261304B2 (en) 2020-10-08
WO2016180841A1 (de) 2016-11-17
CN107836121B (zh) 2020-10-23
DE102015107557A1 (de) 2016-11-17
AU2016261304A1 (en) 2017-12-14
KR20180014727A (ko) 2018-02-09
EP3295680B1 (de) 2019-07-10

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