HK1207416A1 - 微熱板器件及包括此類微熱板器件的傳感器 - Google Patents

微熱板器件及包括此類微熱板器件的傳感器

Info

Publication number
HK1207416A1
HK1207416A1 HK15107902.5A HK15107902A HK1207416A1 HK 1207416 A1 HK1207416 A1 HK 1207416A1 HK 15107902 A HK15107902 A HK 15107902A HK 1207416 A1 HK1207416 A1 HK 1207416A1
Authority
HK
Hong Kong
Prior art keywords
micro
hotplate device
sensor
hotplate
Prior art date
Application number
HK15107902.5A
Other languages
English (en)
Inventor
Christine Alepee
Nicolas Moser
Original Assignee
Sgx Sensortech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sgx Sensortech Sa filed Critical Sgx Sensortech Sa
Publication of HK1207416A1 publication Critical patent/HK1207416A1/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/21—Hydrocarbon
    • Y10T436/214—Acyclic [e.g., methane, octane, isoparaffin, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
HK15107902.5A 2012-07-16 2015-08-17 微熱板器件及包括此類微熱板器件的傳感器 HK1207416A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP2012063931 2012-07-16
PCT/EP2013/065037 WO2014012948A1 (en) 2012-07-16 2013-07-16 Micro-hotplate device and sensor comprising such micro-hotplate device

Publications (1)

Publication Number Publication Date
HK1207416A1 true HK1207416A1 (zh) 2016-01-29

Family

ID=48808334

Family Applications (1)

Application Number Title Priority Date Filing Date
HK15107902.5A HK1207416A1 (zh) 2012-07-16 2015-08-17 微熱板器件及包括此類微熱板器件的傳感器

Country Status (5)

Country Link
US (1) US9228967B2 (zh)
EP (1) EP2872882B1 (zh)
CN (1) CN104541161B (zh)
HK (1) HK1207416A1 (zh)
WO (1) WO2014012948A1 (zh)

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US10273149B2 (en) 2015-07-28 2019-04-30 Carrier Corporation Gas detector with a thermally uniform MEMS die
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US10488358B2 (en) * 2016-05-31 2019-11-26 Ams Sensors Uk Limited Micro-hotplate devices with ring structures
US10234412B2 (en) 2016-11-04 2019-03-19 Msa Technology, Llc Identification of combustible gas species via pulsed operation of a combustible gas sensor
US10852271B2 (en) * 2016-12-14 2020-12-01 Taiwan Semiconductor Manufacturing Co., Ltd. On-chip heater
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CN110651179B (zh) * 2017-04-26 2023-08-15 内华达纳米技术系统公司 包含具有电阻加热器的微热板的气体传感器及相关方法
DE102017220114B3 (de) * 2017-11-13 2019-05-16 Robert Bosch Gmbh Verfahren zum Betreiben einer Gassensorvorrichtung und Gassensorvorrichtung
DE102018201997B4 (de) * 2018-02-08 2021-07-15 Infineon Technologies Ag Emitterstruktur und Herstellungsverfahren
US10900922B2 (en) 2018-07-17 2021-01-26 Msa Technology, Llc Power reduction in combustible gas sensors
EP3827498A1 (en) 2018-07-23 2021-06-02 MSA Technology, LLC Energy harvesting from current loops
JP7156013B2 (ja) * 2018-12-26 2022-10-19 Tdk株式会社 ガスセンサ
US11543396B2 (en) 2019-06-11 2023-01-03 Msa Technology, Llc Gas sensor with separate contaminant detection element
US11268923B2 (en) 2019-06-11 2022-03-08 Msa Technology, Llc Sensor for compositions which deposit upon a surface from a gaseous matrix
US11703473B2 (en) 2019-12-11 2023-07-18 Msa Technology, Llc Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint
CN113514502A (zh) * 2020-04-10 2021-10-19 中国石油化工股份有限公司 多维度多参量气体传感器及其制备方法、气体检测方法
DE102022102969A1 (de) 2021-02-22 2022-08-25 Dräger Safety AG & Co. KGaA Gasdetektionsvorrichtung mit einem Detektor und einem Kompensator und Gasdetektionsverfahren mit einer solchen Gasdetektionsvorrichtung
CN113324697A (zh) * 2021-04-16 2021-08-31 中国科学院微电子研究所 微型皮拉尼真空传感器及其制作方法
CN113466297B (zh) * 2021-08-23 2023-11-24 安徽砺剑防务科技有限公司 一种有毒气体检测传感结构和传感器及应用

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US20040093928A1 (en) * 2002-11-20 2004-05-20 Dimeo Frank Rare earth metal sensor
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CN102426176B (zh) * 2011-11-18 2013-03-27 南京工业大学 一种气体传感器及其制造工艺

Also Published As

Publication number Publication date
WO2014012948A1 (en) 2014-01-23
US9228967B2 (en) 2016-01-05
EP2872882B1 (en) 2018-10-31
CN104541161B (zh) 2017-03-29
CN104541161A (zh) 2015-04-22
EP2872882A1 (en) 2015-05-20
US20150212030A1 (en) 2015-07-30

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