HK1207416A1 - 微熱板器件及包括此類微熱板器件的傳感器 - Google Patents

微熱板器件及包括此類微熱板器件的傳感器

Info

Publication number
HK1207416A1
HK1207416A1 HK15107902.5A HK15107902A HK1207416A1 HK 1207416 A1 HK1207416 A1 HK 1207416A1 HK 15107902 A HK15107902 A HK 15107902A HK 1207416 A1 HK1207416 A1 HK 1207416A1
Authority
HK
Hong Kong
Prior art keywords
micro
hotplate device
sensor
hotplate
Prior art date
Application number
HK15107902.5A
Other languages
English (en)
Inventor
Christine Alepee
Nicolas Moser
Original Assignee
Sgx Sensortech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sgx Sensortech Sa filed Critical Sgx Sensortech Sa
Publication of HK1207416A1 publication Critical patent/HK1207416A1/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/21—Hydrocarbon
    • Y10T436/214—Acyclic [e.g., methane, octane, isoparaffin, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
HK15107902.5A 2012-07-16 2015-08-17 微熱板器件及包括此類微熱板器件的傳感器 HK1207416A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP2012063931 2012-07-16
PCT/EP2013/065037 WO2014012948A1 (en) 2012-07-16 2013-07-16 Micro-hotplate device and sensor comprising such micro-hotplate device

Publications (1)

Publication Number Publication Date
HK1207416A1 true HK1207416A1 (zh) 2016-01-29

Family

ID=48808334

Family Applications (1)

Application Number Title Priority Date Filing Date
HK15107902.5A HK1207416A1 (zh) 2012-07-16 2015-08-17 微熱板器件及包括此類微熱板器件的傳感器

Country Status (5)

Country Link
US (1) US9228967B2 (zh)
EP (1) EP2872882B1 (zh)
CN (1) CN104541161B (zh)
HK (1) HK1207416A1 (zh)
WO (1) WO2014012948A1 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014182630A1 (en) 2013-05-06 2014-11-13 Pacific Biosciences Of California , Inc. Real-time electronic sequencing
EP2975386B1 (en) 2014-07-14 2020-09-02 Sensirion AG Heater structure for a sensor device
EP3124963B1 (en) * 2015-07-28 2022-06-08 Carrier Corporation Gas detector with a thermally uniform mems die
US10190158B2 (en) 2015-08-06 2019-01-29 Pacific Biosciences Of California, Inc. Systems and methods for selectively addressing sparsely arranged electronic measurement devices
US10488358B2 (en) * 2016-05-31 2019-11-26 Ams Sensors Uk Limited Micro-hotplate devices with ring structures
US10234412B2 (en) 2016-11-04 2019-03-19 Msa Technology, Llc Identification of combustible gas species via pulsed operation of a combustible gas sensor
US10852271B2 (en) * 2016-12-14 2020-12-01 Taiwan Semiconductor Manufacturing Co., Ltd. On-chip heater
CN106744652B (zh) * 2017-02-10 2019-04-30 苏州甫一电子科技有限公司 复合结构的mems微加热芯片及其制造方法与应用
WO2018200408A1 (en) * 2017-04-26 2018-11-01 Nevada Nanotech Systems Inc. Gas sensors including microhotplates with resistive heaters, and related methods
DE102017220114B3 (de) * 2017-11-13 2019-05-16 Robert Bosch Gmbh Verfahren zum Betreiben einer Gassensorvorrichtung und Gassensorvorrichtung
DE102018201997B4 (de) * 2018-02-08 2021-07-15 Infineon Technologies Ag Emitterstruktur und Herstellungsverfahren
US10900922B2 (en) 2018-07-17 2021-01-26 Msa Technology, Llc Power reduction in combustible gas sensors
EP3827498A1 (en) 2018-07-23 2021-06-02 MSA Technology, LLC Energy harvesting from current loops
JP7156013B2 (ja) * 2018-12-26 2022-10-19 Tdk株式会社 ガスセンサ
US11268923B2 (en) 2019-06-11 2022-03-08 Msa Technology, Llc Sensor for compositions which deposit upon a surface from a gaseous matrix
US11543396B2 (en) 2019-06-11 2023-01-03 Msa Technology, Llc Gas sensor with separate contaminant detection element
US11703473B2 (en) * 2019-12-11 2023-07-18 Msa Technology, Llc Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint
CN113514502A (zh) 2020-04-10 2021-10-19 中国石油化工股份有限公司 多维度多参量气体传感器及其制备方法、气体检测方法
DE102022102969A1 (de) 2021-02-22 2022-08-25 Dräger Safety AG & Co. KGaA Gasdetektionsvorrichtung mit einem Detektor und einem Kompensator und Gasdetektionsverfahren mit einer solchen Gasdetektionsvorrichtung
CN113324697A (zh) * 2021-04-16 2021-08-31 中国科学院微电子研究所 微型皮拉尼真空传感器及其制作方法
CN113466297B (zh) * 2021-08-23 2023-11-24 安徽砺剑防务科技有限公司 一种有毒气体检测传感结构和传感器及应用

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE287629T1 (de) 1997-02-15 2005-02-15 Siemens Building Tech Ag Infrarot-strahler und dessen verwendung
SE524102C2 (sv) 1999-06-04 2004-06-29 Appliedsensor Sweden Ab Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor
WO2002050528A1 (en) * 2000-12-20 2002-06-27 Eidgenössische Technische Hochschule Zürich Microsensor and single chip integrated microsensor system
WO2002080620A1 (en) 2001-03-28 2002-10-10 Ecole Polytechnique Federale De Lausanne (Epfl) High temperature micro-hotplate
DE60102684T2 (de) 2001-07-05 2004-12-02 Microchemical Systems S.A. Chemischer Gassensor
US20040093928A1 (en) * 2002-11-20 2004-05-20 Dimeo Frank Rare earth metal sensor
US6983653B2 (en) 2002-12-13 2006-01-10 Denso Corporation Flow sensor having thin film portion and method for manufacturing the same
DE10315190A1 (de) * 2003-04-03 2004-10-21 Robert Bosch Gmbh Gassensor
DE10356508B4 (de) 2003-12-03 2019-05-02 Robert Bosch Gmbh Mikromechanische Infrarotquelle
US7406397B2 (en) * 2004-09-02 2008-07-29 International Business Machines Corporation Self heating monitor for SiGe and SOI CMOS devices
EP1815510A1 (en) * 2004-11-10 2007-08-08 Microbridge Technologies Inc. Etching technique for creation of thermally-isolated microstructures
GB2464016B (en) 2005-03-15 2010-07-28 Univ Warwick Smart sensors
GB0517869D0 (en) 2005-09-02 2005-10-12 Univ Warwick Gas-sensing semiconductor devices
FI20060389L (fi) * 2006-04-21 2007-10-22 Environics Oy Sensori
EP2278308B1 (en) 2008-04-22 2018-12-19 Ngk Spark Plug Co., Ltd. Gas sensor
WO2010022285A1 (en) * 2008-08-20 2010-02-25 The Board Of Trustees Of The University Of Illinois Device for calorimetric measurement
US8410560B2 (en) * 2010-01-21 2013-04-02 Cambridge Cmos Sensors Ltd. Electromigration reduction in micro-hotplates
CN102275868B (zh) * 2011-08-15 2014-02-19 中国人民解放军国防科学技术大学 硅微机械结构的预埋掩模湿法腐蚀工艺
CN102426176B (zh) * 2011-11-18 2013-03-27 南京工业大学 一种气体传感器及其制造工艺

Also Published As

Publication number Publication date
US9228967B2 (en) 2016-01-05
US20150212030A1 (en) 2015-07-30
EP2872882B1 (en) 2018-10-31
CN104541161A (zh) 2015-04-22
CN104541161B (zh) 2017-03-29
EP2872882A1 (en) 2015-05-20
WO2014012948A1 (en) 2014-01-23

Similar Documents

Publication Publication Date Title
HK1207416A1 (zh) 微熱板器件及包括此類微熱板器件的傳感器
EP2829480A4 (en) FEEDING AND COUNTERING DEVICE FOR MEDICINAL PRODUCTS
GB2501179B (en) Biosensor device and system
EP2911379A4 (en) PICTURE SENSOR AND PICTURE SENSOR
HK1197718A1 (zh) 氣霧產生裝置和系統
IL233438A0 (en) Polygonal system and device for creating a spray
EP2806287A4 (en) OBJECT DETECTION DEVICE
EP2821978A4 (en) DEVICE FOR THE COMMON USE OF A STATUS OF OPERATION AND SYSTEM FOR THE COMMON USE OF AN OPERATING STATUS
EP2873944A4 (en) SENSOR DEVICE AND ELECTRONIC APPARATUS
HK1206958A1 (zh) 傳感器插入裝置及傳感器插入方法
EP2891865A4 (en) MEASURING PROCESS AND MEASURING DEVICE
EP2860965A4 (en) IMAGING ELEMENT AND IMAGING DEVICE
EP2843435A4 (en) SENSOR DEVICE
EP2827116A4 (en) OPTICAL SENSOR AND ELECTRONIC DEVICE
GB2498853B (en) Drug evaluation method and drug evaluation device
EP2829889A4 (en) SENSOR DEVICE
GB201215143D0 (en) Sensor apparatus and turbocharger
EP2814016A4 (en) OBJECT DETECTION DEVICE
EP2813826A4 (en) INFRARED SENSOR AND INFRARED SENSOR DEVICE
EP2930503A4 (en) SENSOR ELEMENT AND GAS SENSOR
SI2858568T1 (sl) Pokrivna kapa in merilna naprava
EP2921872A4 (en) MAGNETIC SENSOR
EP2833406A4 (en) PICTURE ELEMENT AND PICTURE DEVICE
EP2821812A4 (en) DISTANCE SENSOR AND IMAGE SENSOR
HK1207955A1 (zh) 感測裝置及感測方法