HK1204491A1 - Led light source apparatus, film thickness measuring apparatus, and thin-film forming apparatus led - Google Patents

Led light source apparatus, film thickness measuring apparatus, and thin-film forming apparatus led

Info

Publication number
HK1204491A1
HK1204491A1 HK15104930.8A HK15104930A HK1204491A1 HK 1204491 A1 HK1204491 A1 HK 1204491A1 HK 15104930 A HK15104930 A HK 15104930A HK 1204491 A1 HK1204491 A1 HK 1204491A1
Authority
HK
Hong Kong
Prior art keywords
led
thin
light source
thickness measuring
film thickness
Prior art date
Application number
HK15104930.8A
Other languages
Chinese (zh)
Inventor
佐井旭陽
日向陽平
大瀧芳幸
宫内充祐
長江亦周
Original Assignee
Shincron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shincron Co Ltd filed Critical Shincron Co Ltd
Publication of HK1204491A1 publication Critical patent/HK1204491A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Led Device Packages (AREA)
HK15104930.8A 2012-02-27 2015-05-24 Led light source apparatus, film thickness measuring apparatus, and thin-film forming apparatus led HK1204491A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/054719 WO2013128537A1 (en) 2012-02-27 2012-02-27 Led light source apparatus, film thickness measuring apparatus, and thin-film forming apparatus

Publications (1)

Publication Number Publication Date
HK1204491A1 true HK1204491A1 (en) 2015-11-20

Family

ID=49053051

Family Applications (1)

Application Number Title Priority Date Filing Date
HK15104930.8A HK1204491A1 (en) 2012-02-27 2015-05-24 Led light source apparatus, film thickness measuring apparatus, and thin-film forming apparatus led

Country Status (6)

Country Link
JP (1) JP5265050B1 (en)
KR (1) KR101693397B1 (en)
CN (1) CN104169676B (en)
HK (1) HK1204491A1 (en)
TW (1) TWI515407B (en)
WO (1) WO2013128537A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106151999A (en) * 2015-01-30 2016-11-23 欧帝尔光学镀膜有限公司 Use LED or the projection system of fluorescent material converted light source
KR20180051196A (en) 2016-11-08 2018-05-16 삼성전자주식회사 Spectrometer, apparatus and method for measuring bio-information
CN107608037B (en) * 2017-09-12 2020-03-20 杭州电子科技大学 Optical fiber coupling device applied to loop-mediated isothermal amplification
JP2019144217A (en) * 2018-02-20 2019-08-29 国立大学法人千葉大学 Film thickness measurement device, vapor deposition apparatus using the same and film characteristic evaluation device
US10782120B2 (en) * 2018-07-03 2020-09-22 Kla Corporation Dual-interferometry wafer thickness gauge

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694910U (en) * 1979-12-21 1981-07-28
JPH03162605A (en) * 1989-11-20 1991-07-12 Fuji Electric Co Ltd Infrared film thickness meter
JP2931226B2 (en) * 1995-01-26 1999-08-09 浜松ホトニクス株式会社 Optical feedback type photodetector
GB2301884A (en) * 1995-06-06 1996-12-18 Holtronic Technologies Ltd Characterising multilayer thin film systems by interferometry
JPH09113229A (en) * 1995-10-17 1997-05-02 Sony Corp Film thickness control device and film thickness detection method
GB2331764B (en) * 1997-12-01 2002-06-26 Ca Nat Research Council Sputtering method and apparatus with optical monitoring
JP4049458B2 (en) * 1998-09-14 2008-02-20 株式会社シンクロン Thin film thickness measuring apparatus and thin film thickness measuring method
JP3114972B2 (en) * 1999-03-02 2000-12-04 インターナショナル・ビジネス・マシーンズ・コーポレ−ション Film thickness inspection apparatus and film thickness inspection method
JP2002004046A (en) * 2000-06-20 2002-01-09 Canon Inc Method and system for film deposition
JP3852556B2 (en) 2000-09-08 2006-11-29 オムロン株式会社 Film thickness measuring method and film thickness sensor using the method
JP3823745B2 (en) * 2001-03-14 2006-09-20 オムロン株式会社 Film thickness measuring method and film thickness sensor using the method
JP3944693B2 (en) * 2001-10-04 2007-07-11 オムロン株式会社 Film thickness measuring device
JP3797476B2 (en) * 2001-10-25 2006-07-19 横河電機株式会社 Thickness / component measurement method and apparatus
JP4208069B2 (en) * 2003-03-26 2009-01-14 住友大阪セメント株式会社 Refractive index and thickness measuring apparatus and measuring method
WO2005017489A2 (en) * 2003-07-11 2005-02-24 Svt Associates, Inc. Film mapping system
JP4484531B2 (en) * 2004-01-21 2010-06-16 大日本印刷株式会社 Film thickness pass / fail inspection method and apparatus
JP2005214927A (en) * 2004-02-02 2005-08-11 Yamagata Public Corp For The Development Of Industry Optical interference measuring method using parallel optical heterodyne detection method
JP4698166B2 (en) * 2004-06-03 2011-06-08 株式会社シンクロン Thin film forming method, film thickness measuring method and film thickness measuring apparatus
JP4547612B2 (en) * 2004-06-25 2010-09-22 旭硝子株式会社 Film thickness control method and apparatus, and optical multilayer film manufacturing method
JP2006139044A (en) 2004-11-12 2006-06-01 Shinka Cho Led light source device
JP2006250851A (en) * 2005-03-14 2006-09-21 Toppan Printing Co Ltd Method and apparatus for detecting irregularity in film thickness
JP2006275704A (en) * 2005-03-29 2006-10-12 Toppan Printing Co Ltd Film thickness irregularity detection method
JP4878632B2 (en) * 2009-07-03 2012-02-15 株式会社シンクロン Optical film thickness meter and thin film forming apparatus equipped with optical film thickness meter
JP2012021856A (en) * 2010-07-14 2012-02-02 Keyence Corp Interference thickness meter

Also Published As

Publication number Publication date
KR20140121338A (en) 2014-10-15
CN104169676A (en) 2014-11-26
JP5265050B1 (en) 2013-08-14
KR101693397B1 (en) 2017-01-06
JPWO2013128537A1 (en) 2015-07-30
CN104169676B (en) 2019-01-15
WO2013128537A1 (en) 2013-09-06
TW201335568A (en) 2013-09-01
TWI515407B (en) 2016-01-01

Similar Documents

Publication Publication Date Title
HK1177265A1 (en) Light source device and projector
TWI563114B (en) Film deposition apparatus
HK1187398A1 (en) Optical film thickness measurement apparatus and thin-film forming apparatus using optical film thickness measurement apparatus
HK1179353A1 (en) Light source device and projector
EP2702928A4 (en) Light source device
EP2803900A4 (en) Bulb-type light source device
EP2878978A4 (en) Optical sheet and surface light source apparatus
EP2789897A4 (en) Light source and illuminating device
EP2690345A4 (en) Lighting device and light source device
EP2604177A4 (en) Light source device
EP2801745A4 (en) Light bulb-type light source device
EP2716967A4 (en) Light source device
EP2604178B8 (en) Light source apparatus
EP2738451A4 (en) Light source device
EP2883822A4 (en) Glass film conveying device
EP2893310A4 (en) Devices and methods for measuring light
EP2660505A4 (en) Medical light source device
EP2626617A4 (en) Medical light source device
EP2889243A4 (en) Glass film transfer apparatus
EP2827575A4 (en) Light source device
EP2808598A4 (en) Surface light source device
EP2741119A4 (en) Light source device
EP2940494A4 (en) Light diffusion film
EP2882002A4 (en) Light source unit
HK1204490A1 (en) Device for measuring film thickness and device for forming film