HK1135677A1 - Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon - Google Patents
Method and apparatus for improving the efficiency of purification and deposition of polycrystalline siliconInfo
- Publication number
- HK1135677A1 HK1135677A1 HK10103936.9A HK10103936A HK1135677A1 HK 1135677 A1 HK1135677 A1 HK 1135677A1 HK 10103936 A HK10103936 A HK 10103936A HK 1135677 A1 HK1135677 A1 HK 1135677A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- purification
- deposition
- improving
- efficiency
- polycrystalline silicon
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83847906P | 2006-08-18 | 2006-08-18 | |
US11/893,980 US7820126B2 (en) | 2006-08-18 | 2007-08-17 | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
PCT/US2007/076303 WO2008022348A2 (fr) | 2006-08-18 | 2007-08-20 | Procédé et appareil servant à améliorer le rendement de la purification et du dépôt de silicium polycristallin |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1135677A1 true HK1135677A1 (en) | 2010-06-11 |
Family
ID=39083199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK10103936.9A HK1135677A1 (en) | 2006-08-18 | 2010-04-21 | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
Country Status (7)
Country | Link |
---|---|
US (2) | US7820126B2 (fr) |
EP (1) | EP2069236A4 (fr) |
JP (1) | JP2010501459A (fr) |
CN (1) | CN102942182A (fr) |
CA (1) | CA2661036A1 (fr) |
HK (1) | HK1135677A1 (fr) |
WO (1) | WO2008022348A2 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1491253A1 (fr) * | 2003-06-26 | 2004-12-29 | Urea Casale S.A. | Procédé et appareil de granulation en lit fluidisé |
ITRM20050329A1 (it) * | 2005-06-24 | 2006-12-25 | Guido Fragiacomo | Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto. |
US7820126B2 (en) * | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
US20110059002A1 (en) * | 2008-04-11 | 2011-03-10 | John Allan Fallavollita | Methods and apparatus for recovery of silicon and silicon carbide from spent wafer-sawing slurry |
RU2388690C2 (ru) * | 2008-05-22 | 2010-05-10 | Общество с ограниченной ответственностью "Группа СТР" | Способ получения поликристаллического кремния |
WO2011059354A1 (fr) * | 2009-11-11 | 2011-05-19 | Shishov Sergey Vladimirovich | Procédé de production de silicium |
US20120082610A1 (en) * | 2010-10-02 | 2012-04-05 | Channon Matthew J | Fluorspar/Iodide process for reduction,purificatioin, and crystallization of silicon |
CN102344143B (zh) * | 2011-07-30 | 2012-12-19 | 常州天合光能有限公司 | 金属硅的物理提纯方法及其设备 |
DE102013209076A1 (de) | 2013-05-16 | 2014-11-20 | Wacker Chemie Ag | Reaktor zur Herstellung von polykristallinem Silicium und Verfahren zur Entfernung eines Silicium enthaltenden Belags auf einem Bauteil eines solchen Reaktors |
Family Cites Families (53)
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US3020129A (en) * | 1958-07-25 | 1962-02-06 | Gen Electric | Production of silicon of improved purity |
US3006737A (en) * | 1959-06-02 | 1961-10-31 | Guy H Moates | Apparatus for continuous preparation of ultrapure silicon |
US3012861A (en) * | 1960-01-15 | 1961-12-12 | Du Pont | Production of silicon |
US3012862A (en) * | 1960-08-16 | 1961-12-12 | Du Pont | Silicon production |
GB1103329A (en) * | 1964-09-15 | 1968-02-14 | Gen Trustee Co Ltd | Refining of silicon |
US4092446A (en) * | 1974-07-31 | 1978-05-30 | Texas Instruments Incorporated | Process of refining impure silicon to produce purified electronic grade silicon |
US4207360A (en) * | 1975-10-31 | 1980-06-10 | Texas Instruments Incorporated | Silicon seed production process |
US4213937A (en) * | 1976-09-22 | 1980-07-22 | Texas Instruments Incorporated | Silicon refinery |
US4117094A (en) * | 1977-06-13 | 1978-09-26 | Texas Instruments Incorporated | Process for silicon and trichlorosilane production |
US4138509A (en) * | 1977-12-23 | 1979-02-06 | Motorola, Inc. | Silicon purification process |
DE2933164A1 (de) * | 1979-08-16 | 1981-02-26 | Consortium Elektrochem Ind | Verfahren zum reinigen von rohsilicium |
US4519999A (en) | 1980-03-31 | 1985-05-28 | Union Carbide Corporation | Waste treatment in silicon production operations |
US4340574A (en) | 1980-08-28 | 1982-07-20 | Union Carbide Corporation | Process for the production of ultrahigh purity silane with recycle from separation columns |
US4307242A (en) | 1980-10-03 | 1981-12-22 | General Electric Company | Process for removing impurities from residual silicon powder |
CA1147698A (fr) | 1980-10-15 | 1983-06-07 | Maher I. Boulos | Epuration du silicium de qualite metallurgique |
US4388286A (en) * | 1982-01-27 | 1983-06-14 | Atlantic Richfield Company | Silicon purification |
US4642227A (en) * | 1982-08-20 | 1987-02-10 | California Institute Of Technology | Reactor for producing large particles of materials from gases |
US4981668A (en) | 1986-04-29 | 1991-01-01 | Dow Corning Corporation | Silicon carbide as a raw material for silicon production |
US4910163A (en) * | 1988-06-09 | 1990-03-20 | University Of Connecticut | Method for low temperature growth of silicon epitaxial layers using chemical vapor deposition system |
NO165288C (no) | 1988-12-08 | 1991-01-23 | Elkem As | Silisiumpulver og fremgangsmaate for fremstilling av silisiumpulver. |
JPH0687607A (ja) | 1991-09-05 | 1994-03-29 | Nec Corp | シリコンの回収方法 |
NO180532C (no) * | 1994-09-01 | 1997-05-07 | Elkem Materials | Fremgangsmåte for fjerning av forurensninger fra smeltet silisium |
US5798137A (en) | 1995-06-07 | 1998-08-25 | Advanced Silicon Materials, Inc. | Method for silicon deposition |
MY138664A (en) | 1995-10-04 | 2009-07-31 | Komatsu Ntc Ltd | Slurry managing system and slurry managing for wire saws |
US6113473A (en) | 1997-04-25 | 2000-09-05 | G.T. Equipment Technologies Inc. | Method and apparatus for improved wire saw slurry |
JP3408979B2 (ja) | 1997-12-26 | 2003-05-19 | 株式会社日平トヤマ | スラリ管理システム |
JP3296781B2 (ja) | 1998-04-21 | 2002-07-02 | 信越半導体株式会社 | 水性切削液、その製造方法、ならびにこの水性切削液を用いた切削方法 |
JP2000191312A (ja) | 1998-12-25 | 2000-07-11 | Toshiba Corp | シリコン粉末の精製方法 |
NO310142B1 (no) | 1999-03-29 | 2001-05-28 | Elkem Materials | Fremgangsmåte for fremstilling av amorft silica fra silisium og fra silisiumholdige materialer |
US6281098B1 (en) * | 1999-06-15 | 2001-08-28 | Midwest Research Institute | Process for Polycrystalline film silicon growth |
US6468886B2 (en) * | 1999-06-15 | 2002-10-22 | Midwest Research Institute | Purification and deposition of silicon by an iodide disproportionation reaction |
JP2001278612A (ja) | 2000-03-31 | 2001-10-10 | Nippei Toyama Corp | シリコンの回収方法 |
US6615817B2 (en) | 2000-03-31 | 2003-09-09 | Motoichi Horio | Recycling system of wire saw abrasive grain slurry and centrifugal separators therefor |
SE518531C2 (sv) | 2000-05-05 | 2002-10-22 | Aga Ab | Sätt för återvinning av metaller |
DE10056957C1 (de) | 2000-11-17 | 2002-09-05 | Metallkraft As Kristiansand | Verfahren zum Herstellen nichtoxidischer Keramiken |
US6827786B2 (en) * | 2000-12-26 | 2004-12-07 | Stephen M Lord | Machine for production of granular silicon |
US6838047B2 (en) | 2001-08-28 | 2005-01-04 | Romain Louis Billiet | MEMS and MEMS components from silicon kerf |
US6780665B2 (en) * | 2001-08-28 | 2004-08-24 | Romain Louis Billiet | Photovoltaic cells from silicon kerf |
JP4369095B2 (ja) * | 2002-05-24 | 2009-11-18 | シャープ株式会社 | スラリ再生方法 |
WO2004012257A1 (fr) | 2002-07-31 | 2004-02-05 | Astropower, Inc. | Procede et appareil pour la fabrication de tranches semi-conductrices de finition immediate |
JP3820198B2 (ja) * | 2002-08-27 | 2006-09-13 | ミッドウエスト リサーチ インスティチュート | 精製シリコンの製造装置 |
US6915796B2 (en) | 2002-09-24 | 2005-07-12 | Chien-Min Sung | Superabrasive wire saw and associated methods of manufacture |
CN1299983C (zh) * | 2003-07-22 | 2007-02-14 | 龚炳生 | 光电级硅的制造方法 |
JP2007513048A (ja) * | 2003-12-04 | 2007-05-24 | ダウ・コーニング・コーポレイション | 太陽電池グレードのケイ素を生産するための、冶金グレードのケイ素から不純物を除去する方法 |
SG136952A1 (en) | 2004-06-15 | 2007-11-29 | Close The Loop Technologies Pt | A method of recycling mixed streams of ewaste (weee) |
WO2006120736A1 (fr) | 2005-05-11 | 2006-11-16 | Mitsubishi Denki Kabushiki Kaisha | Procede de production de bloc de silicium et de tranche de silicium |
ITRM20050329A1 (it) | 2005-06-24 | 2006-12-25 | Guido Fragiacomo | Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto. |
US7878883B2 (en) | 2006-01-26 | 2011-02-01 | Memc Electronics Materials, Inc. | Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control |
US7820126B2 (en) | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
US20100003364A1 (en) | 2006-11-08 | 2010-01-07 | Mohsen Daneshtalab | Reduced-hangover alcoholic beverage comprising turmeric |
JP4980793B2 (ja) | 2007-05-23 | 2012-07-18 | 新日本製鐵株式会社 | シリコン回収方法及びシリコン回収装置 |
US20110059002A1 (en) | 2008-04-11 | 2011-03-10 | John Allan Fallavollita | Methods and apparatus for recovery of silicon and silicon carbide from spent wafer-sawing slurry |
CN102388121B (zh) | 2008-12-31 | 2013-08-21 | Memc新加坡私人有限公司 | 从锯屑回收并提纯硅颗粒的方法 |
-
2007
- 2007-08-17 US US11/893,980 patent/US7820126B2/en not_active Expired - Fee Related
- 2007-08-20 CA CA002661036A patent/CA2661036A1/fr not_active Abandoned
- 2007-08-20 EP EP07841098A patent/EP2069236A4/fr not_active Withdrawn
- 2007-08-20 CN CN2012104288432A patent/CN102942182A/zh active Pending
- 2007-08-20 JP JP2009525713A patent/JP2010501459A/ja active Pending
- 2007-08-20 WO PCT/US2007/076303 patent/WO2008022348A2/fr active Application Filing
-
2010
- 2010-04-21 HK HK10103936.9A patent/HK1135677A1/xx not_active IP Right Cessation
- 2010-10-13 US US12/904,092 patent/US8580205B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN102942182A (zh) | 2013-02-27 |
US20110023778A1 (en) | 2011-02-03 |
WO2008022348A3 (fr) | 2008-04-24 |
US7820126B2 (en) | 2010-10-26 |
CA2661036A1 (fr) | 2008-02-21 |
US8580205B2 (en) | 2013-11-12 |
US20080044337A1 (en) | 2008-02-21 |
WO2008022348A2 (fr) | 2008-02-21 |
EP2069236A4 (fr) | 2013-04-03 |
JP2010501459A (ja) | 2010-01-21 |
EP2069236A2 (fr) | 2009-06-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20160820 |