HK1099079A1 - Resonant magnetometer device - Google Patents

Resonant magnetometer device

Info

Publication number
HK1099079A1
HK1099079A1 HK07105196.4A HK07105196A HK1099079A1 HK 1099079 A1 HK1099079 A1 HK 1099079A1 HK 07105196 A HK07105196 A HK 07105196A HK 1099079 A1 HK1099079 A1 HK 1099079A1
Authority
HK
Hong Kong
Prior art keywords
magnetometer device
resonant magnetometer
resonant
magnetometer
Prior art date
Application number
HK07105196.4A
Inventor
David Oury King
Kevin Michael Brunson
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/GB2004/004017 external-priority patent/WO2005029107A1/en
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of HK1099079A1 publication Critical patent/HK1099079A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Micromachines (AREA)
HK07105196.4A 2003-09-23 2007-05-16 Resonant magnetometer device HK1099079A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0322236.1A GB0322236D0 (en) 2003-09-23 2003-09-23 Resonant magnetometer device
GBGB0323157.8A GB0323157D0 (en) 2003-09-23 2003-10-03 Micro-electromechanical system (MEMS) resonant magnetometer
PCT/GB2004/004017 WO2005029107A1 (en) 2003-09-23 2004-09-21 Resonant magnetometer device

Publications (1)

Publication Number Publication Date
HK1099079A1 true HK1099079A1 (en) 2007-08-03

Family

ID=29266492

Family Applications (1)

Application Number Title Priority Date Filing Date
HK07105196.4A HK1099079A1 (en) 2003-09-23 2007-05-16 Resonant magnetometer device

Country Status (4)

Country Link
KR (1) KR20070032936A (en)
CN (1) CN1886669B (en)
GB (2) GB0322236D0 (en)
HK (1) HK1099079A1 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059557B (en) * 2007-05-22 2012-04-11 东南大学 Micro-electro-mechanical system magnetic field sensor and magnetic field measurement method
DE102009046515A1 (en) * 2009-11-09 2011-05-12 Robert Bosch Gmbh Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate
ITTO20090973A1 (en) * 2009-12-10 2011-06-11 St Microelectronics Srl TRIASSIAL INTEGRATED MAGNETOMETER OF SEMICONDUCTOR MATERIAL MADE IN MEMS TECHNOLOGY
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
EP2616771B8 (en) 2010-09-18 2018-12-19 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
KR101443730B1 (en) 2010-09-18 2014-09-23 페어차일드 세미컨덕터 코포레이션 A microelectromechanical die, and a method for making a low-quadrature-error suspension
EP2616389B1 (en) * 2010-09-18 2017-04-05 Fairchild Semiconductor Corporation Multi-die mems package
WO2012037540A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
WO2012037536A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Packaging to reduce stress on microelectromechanical systems
CN103221795B (en) 2010-09-20 2015-03-11 快捷半导体公司 Microelectromechanical pressure sensor including reference capacitor
KR101270136B1 (en) * 2011-05-13 2013-06-04 (주)마이크로인피니티 MEMS resonator
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2648334B1 (en) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Mems device front-end charge amplifier
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (en) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Enhanced silicon via with multi-material fill
CN102928793B (en) * 2012-11-19 2015-03-25 中国科学院上海微系统与信息技术研究所 Micromechanical magnetic field sensor and application thereof
US10132829B2 (en) * 2013-03-13 2018-11-20 Invensense, Inc. Heading confidence interval estimation
CN105358990B (en) * 2013-03-15 2019-05-03 应美盛股份有限公司 Use magnetometer of the magnetic material on accelerometer
TWI531806B (en) * 2014-09-18 2016-05-01 溫瓌岸 Dual-functional resonant based magnetic field sensor
CN105527589B (en) * 2014-09-29 2019-02-19 硕英股份有限公司 Magnetometer
CN105445681A (en) * 2014-09-29 2016-03-30 硕英股份有限公司 Resonance-type magnetometer
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
CN107329099B (en) * 2017-06-22 2019-08-20 东南大学 One kind rocking parallel-moving type microcomputer emf sensor
CN110542869A (en) * 2019-06-21 2019-12-06 西北工业大学 Weak magnetic field measuring device and method based on modal localization effect
CN110793510B (en) * 2019-09-26 2020-08-18 西安交通大学 Magnetoelectric compass for measuring in-plane alternating current magnetic field and manufacturing method thereof

Also Published As

Publication number Publication date
CN1886669B (en) 2011-06-15
KR20070032936A (en) 2007-03-23
CN1886669A (en) 2006-12-27
GB0323157D0 (en) 2003-11-05
GB0322236D0 (en) 2003-10-22

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20150921