CN105527589B - Magnetometer - Google Patents
Magnetometer Download PDFInfo
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- CN105527589B CN105527589B CN201410514112.9A CN201410514112A CN105527589B CN 105527589 B CN105527589 B CN 105527589B CN 201410514112 A CN201410514112 A CN 201410514112A CN 105527589 B CN105527589 B CN 105527589B
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- displacement detection
- detection electrode
- mass block
- direction displacement
- electrode
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Abstract
A kind of magnetometer, the mass block to suspend including one, one group of Y-direction displacement detection electrode, one group of Z-direction displacement detection electrode and an electric current supply module；Wherein, the mass block, the Y-direction displacement detection electrode and Z-direction displacement detection electrode respectively include several metal layers and the dielectric layer between wantonly two metal interlevel；In the mass block, corresponding to the part of the Y-direction displacement detection electrode, and corresponding to the part of the Z-direction displacement detection electrode, there are at least two metal layers to connect by through-hole respectively；The Y-direction displacement detection electrode includes two groups of electrodes, and each group includes at least two layers metal layer connected by through-hole, which also includes two groups of electrodes, and each group includes at least two layers metal layer connected by through-hole；And the electric current supply module supplies the selectable electric current for flowing through the mass block along the X-direction or Y-direction respectively.
Description
Technical field
The present invention relates to a kind of miniature magnetometers, in particular to a kind of miniature magnetometers that can measure the three axis quantity of magnetism simultaneously.
Background technique
Miniature magnetometers are that one kind is widely used in such as smartphone, wearable type device and Internet of things device
The component of (Internet of Things-IOT-devices).Miniature magnetometers can also apply Other Engineering, science and
Industrial circle.To provide the function of mgnetic observations on modern, miniature magnetometers must height aggregation, low power consumption and
Correct magnetic force/magnetic-field measurement can be provided.
In various miniature magnetometers, using Lorentz force (the Lorentz forces) principle make magnetometer,
Compared with together in practical.Because this miniature magnetometers can be made with the CMOS processing procedure of standard.Novel miniature magnetometers structure is all
It works using Lorentz force principle.
A mass block is consisted essentially of using the magnetometer of Lorentz force, by spring suspended in structure or on substrate.
A constant current is provided to the mass block, which can generate sieve with there are the magnetic force that earth magnetic field or other magnetic force objects issue
Lun Zili, the mass block is mobile to the direction perpendicular to the current direction and the magnetic force direction.Detecting is usually formed with electrode
Comb shape or finger-like, the comb shape formed with the quality block edge or interfinger, and maintain a distance；The same capacitor such as between the two.
The detecting may detect that with electrode because mass block is mobile, cause mass block and detecting produced by the variation of interelectrode relative position
Capacitance variation, generate detection signal.The detection signal is after being transformed into voltage form, as output signal.It is produced
Direction of displacement and displacement under the influence of magnetic force of the output signal representative mass block, the magnetic force value can be calculated accordingly.
Known miniature magnetometers using micro electronmechanical processing procedure or CMOS processing procedure because being made, and volume is minimum, and majority can only provide
The measurement of the single direction quantity of magnetism.The people of industry is it is also proposed that several setting by the coplanar two directions quantity of magnetism of single magnetometer measures
Meter.But it is this to design the quantity of magnetism for not being capable of measuring the third direction vertical with the plane.
WO2013159584A1 discloses a kind of micro-mechanical magnetic field sensor, which can measure two direction XY simultaneously
The quantity of magnetism.But the invention does not provide Z-direction, i.e., measures perpendicular to the quantity of magnetism in X/Y plane direction.
US 8,637,943B1 disclose a kind of multiaxis aggregation type microelectromechanicdevices devices, wherein including 3 groups of magnetometers, for measuring
The quantity of magnetism of 3 axis.
US2012/0007597A1 discloses a kind of micromechanics magnetometer structure, uses one group of XY axis magnetic force detector and one group
Z axis magnetic force detector, to provide the mgnetic observations of three axis.Wherein, the XY axis magnetic force detector and the Z axis magnetic force detector are not
With the detector of kenel.
US 8,390,283B2 provide a kind of three axle magnetometer, the wheatstone being made up of using 3 groups magnetic tunnel knot sensor
Electric bridge provides the magnetic force detecting function of three axis.
Industry need provide a kind of novel structure of miniature magnetometers at present, to provide the magnetic force detecting function of three axis.
It is also required to provide a kind of novel miniature magnetometers structure simultaneously, single mass block can be used to provide the magnetic force of three axis
Detecting function.
Being also required to provide one kind simultaneously can be using standard CMOS process characteristics, by the mgnetic observations function aggregation of three axis in list
The magnetometer of one mass block.
Summary of the invention
The present invention provides one kind merely with single mass block, that is, can measure the magnetometer of three axis magnetic force amounts.
The present invention also provides a kind of utilization standard CMOS process characteristics, by the mgnetic observations function aggregation of three axis in single matter
The magnetometer of gauge block
Magnetometer, the mass block to suspend including one, one group of Y-direction displacement detection electrode, one group of Z-direction displacement detection electricity
Pole and an electric current supply module.The Y-direction represent the mass block a direction in two vertical direction in the plane, and
The Z-direction represents the direction perpendicular to the plane.Wherein, the length direction of the mass block is parallel with the Y-direction, and including several
Metal layer and several dielectric layers, interact stacked manner with metal layer with dielectric layer and are formed；The Y-direction displacement detection electrode and the side Z
Several metal layers are respectively included to displacement detection electrode and between the dielectric layer of wantonly two metal interlevel.Wherein, right in the mass block
There should be at least two metal layers to connect by through-hole (via) in the part of the Y-direction displacement detection electrode；Corresponding to the Z-direction position
The part for moving detecting electrode has at least two metal layers to connect by through-hole.And the Y-direction displacement detection electrode includes two groups of electricity
Pole, each group include at least two layers metal layer connected by through-hole, which also includes two groups of electrodes, respectively
Group includes at least two layers metal layer connected by through-hole.The electric current supply module supplies the electric current for flowing through the mass block.This is logical
Hole can be filled up with metal material.In the mass block, corresponding to the part of the Y-direction displacement detection electrode, and correspond to the Z-direction
The part of displacement detection electrode can be located at Different Plane, may be alternatively located at same level.Such as it is located at same level, then two part
It is electrically insulated mutually.
The magnetometer may also include circuit for detecting, corresponding to the power supply state of the electric current supply module, be supplied according to the electric current
Blocks current is answered to flow through the direction of the mass block and the output of the Y-direction displacement detection electrode or the Z-direction displacement detection electrode,
Calculate the quantity of magnetism in tri- direction X, Y, Z.The X-direction for the mass block institute in the plane, the direction vertical with the Y-direction.
In several preferred embodiments of the invention, the mass block, the Y-direction displacement detection electrode and Z-direction displacement are detectd
Electrode is surveyed, is collectively formed in one comprising on several metal layers and several dielectric layers works that sequentially storehouse is formed, and the quality
Block is with a space and the Y-direction displacement detection electrode, the Z-direction displacement detection electrode separation.In this example, the Y-direction position
Detecting electrode and the Z-direction displacement detection electrode are moved in the side close to the mass block, is respectively formed the finger extended to the X/Y plane
Shape extends；The mass block also close to the Y-direction displacement detection electrode and the Z-direction displacement detection electrode side, formed to
The finger-like that the X/Y plane extends extends, and extends into the Y-direction displacement detection electrode and the Z-direction displacement detection electrode
In the recess portion that finger-like extends to form.
In the above-described embodiments, which is located at first and second metal layer of the works.Herein
In example, first group of electrode which detects electrode may include several finger electrodes, and second group of electrode also includes several finger-like
Electrode, the finger electrode of the two intermesh configuration, and make a pair of comprising first group of electrode finger electrode and one second
The finger electrode pair of group electrode finger electrode, the finger-like corresponding to the mass block extend.In a kind of preferred embodiments, the magnetic force
Meter includes two groups of Y-direction displacement detection electrodes, and each group's Y-direction displacement detection electrode respectively includes two groups of electrodes, is respectively positioned on the knot
First, second metal layer of structure object.Preferably pass through first and second metal layer of the Y-direction displacement detection electrode each group electrode
The connection of one through-hole.
In the above-described example, which is located at the third of the works, the 4th metal layer, with
And the five, the 6th metal layer；The third, the 4th metal layer and the five, the 6th metal layers are located at the different height in Z-direction.
In a kind of preferred embodiments, which includes two groups of Z-direction displacement detection electrodes, each group's Z-direction displacement detection electrode difference
Including two groups of electrodes, it is each positioned at third, the 4th metal layer and the five, the 6th metal layers of the works；The third, the 4th
Metal layer is located at the top of the five, the 6th metal layers.That is, first group of electricity of first group of Z-direction displacement detection electrode
Pole, first group of electrode position with second group of Z-direction displacement detection electrode is in same plane, and first group of Z-direction displacement detection is electric
Second group of electrode of pole, second group of electrode position with second group of Z-direction displacement detection electrode is in same plane.This first, second
Metal layer keeps a preset distance by an at least dielectric layer with the third to the 6th metal interlevel.
In the above-described example, connect the third of the Z-direction displacement detection electrode, the 4th metal layer by a through-hole
It connects, and connects its five, the 6th metal layer also by a through-hole.The through-hole can be filled with metal material.Furthermore the mass block
First and second metal layer can also be connected with a through-hole, the 4th, fifth metal layer pass through a through-hole connect.The through-hole can use gold
Belong to material filling.The Y-direction displacement detection electrode can be located at the mass block in the two sides of X-direction, and the two Z-directions displacement detection
Electrode also is located at the mass block in the two sides of X-direction.
The mass block provides at least 4 contacts, for the electrical communication electric current supply module, supplies the electric current supply module
Electric current selectable flow through the mass block along the X-direction or Y-direction respectively.
The circuit for detecting links the electric current supply module and the Y-direction displacement detection electrode, the Z-direction displacement detection
The each group electrode of electrode detects the Y-direction displacement detection electrode and the mass block with synchronous with the operation of the electric current supply module
Corresponding to the capacitance variations between the part of the Y-direction displacement detection electrode, to measure the mass block under magnetic fields, in the side Y
To displacement；And detect the part of the Z-direction displacement detection electrode and the mass block corresponding to the Z-direction displacement detection electrode
Between capacitance variations, to measure the mass block under magnetic fields, in the displacement of Z-direction.The circuit for detecting simultaneously further may be used
According to the displacement for flowing through direction Yu the direction Y/Z of the electric current, the magnetic field is calculated in the quantity of magnetism of X/Y/Z all directions.
In preferred embodiments of the invention, which bestows X-direction to the mass block in the electric current supply module
When electric current, the mass block is measured in the displacement of Z-direction, calculates the magnetic force of Y-direction suffered by the mass block accordingly；The circuit for detecting
When the electric current supply module bestows the electric current of X-direction to the mass block, the displacement of the mass block in the Y direction is measured, accordingly
Calculate the magnetic force of Z-direction suffered by the mass block；The circuit for detecting bestows the electricity of Y-direction in the electric current supply module to the mass block
When stream, the mass block is measured in the displacement of Z-direction, calculates the magnetic force of X-direction suffered by the mass block accordingly.
Detailed description of the invention
Fig. 1 is according to magnetometer structure plan view made by the present invention.
Fig. 2 is the electrode structure schematic diagram of an embodiment of the present invention.
Fig. 3 be Fig. 2 embodiment electrode assembly plan view, for illustrate Y-direction displacement detection electrode 211A,
The structure of 211B, 221A, 221B.
Fig. 4 shows the system diagram of magnetometer of the present invention.
Fig. 5 is the method flow diagram using the circuit for detecting of the present invention measurement all directions quantity of magnetism.
Detailed description of the invention
100 magnetometer structures
10 mass blocks
10A, 10A etch-hole
21,22 finger electrode structure
The space 21a, 22a
30 power supply modules
40 circuit for detecting
101,102 spring
107,108 common electrode
103,104,105,106 electric contact
211,221 finger electrode plate
211A, 211B, 221A, 221B displacement detection electrode
212,213,222,223 displacement detection electrode
Specific embodiment
Based on the following preferred embodiments of the invention, illustrate the contents of the present invention.But it must state, preferred embodiments of the invention are only
It is for illustrating better embodiment of the invention.The scope of the present invention is not limited to the contained example of specification.
Fig. 1 is according to magnetometer structure plan view made by the present invention.As shown, the magnetometer structure 100 includes
One mass block 10 and the two groups of finger electrode structures 21,22 for being located at its two sides.The mass block 10 and two groups of finger-like electricity are shown in figure
Pole structure 21,22 is the works made with standard CMOS processing procedure, and the mass block 10 and two groups of finger electrode structures 21,22 are distinguished
It is electrically isolated by space 21a and 22a.If the structural body is with the preparation of standard CMOS processing procedure, two groups of finger electrode knots
Structure 21,22 may include 6 layers of metal layer, and between two metal interlevels and be located at most upper and undermost dielectric layer, and position
On a substrate (not shown).Two groups of finger electrode structures 21,22 in the plane at place, extend by the X-direction into figure
Several finger electrode plates 211,221.In the following description, when the extending direction of the finger electrode plate 211,221 is X-direction
When, it is Y-direction in the coplanar direction vertical with the X-direction, as shown in coordinate in figure.The direction vertical with the plane, then
Referred to as Z-direction.
The mass block 10 is located in structure defined in two groups of finger electrode structures 21,22.The example shown in figure
In, the 10 ontology rectangle of mass block, length direction is parallel with Y-direction.If the structural body is prepared with standard CMOS processing procedure,
The mass block 10 may include to be less than the metal layer of the metal layer number of plies of two groups of finger electrode structures 21,22, such as 6 layers, with
And between wantonly two metal interlevel and it is located at most upper and undermost dielectric layer, and be suspended on the substrate.The mass block 10
The space 21a and 22a between space and the mass block 10 and two groups of finger electrode structures 21,22 between substrate, can use
Standard CMOS process technique is formed, such as is formed with etching mode.To form these spaces, 10 pieces of the mass block upper possible necessary
Etch-hole 10A, 10A are prepared, with sharp processing procedure.But the etch-hole 10A, 10A are not any technical restriction.To maintain the mass block 10
Suspension, mass block 10 is fixed on structural body 100 with spring 101,102.If the X-direction two sides of mass block 10 each extend over out
Dry finger-like extends, the space formed between extending into the finger electrode plate 211 of the finger electrode structure 21,22,221 wantonly two finger-like
In, and certain distance is kept with the finger electrode plate 211,221.
The support spring 101,102 of the mass block 10 in the one end for leaving the mass block 10, connect an electric contact 103,
104,105,106 so that extraneous, such as the power supply module 30 (Fig. 4) supply electric current can by the electric contact 103,
104,105,106, it is selective that the mass block 10 is flowed through with X-direction or Y-direction.That is, electric current is such as by contact 103,104
It flows into, after the spring 101,101, which is flowed through with negative Y-direction, then flow to and connect via support spring 102,102
Point 105,106, such as middle arrow A.Conversely, such as being flowed by contact 103,105, then the mass block 10 is flowed through with X-direction, then by point
104,106 outflow, as shown in arrow B in figure.Furthermore if electric current is flowed by contact 104,106, then the matter is flowed through with negative X-direction
Gauge block 10, then by 103,105 outflow of point.
Magnetometer with above-mentioned body frame structure can be surveyed through the measurement to Lorentz force (the Lorentz force)
Measure the magnetic field of locality.According to Lorentz force theorem (the Lorentz Force Law), a mass block is bestowed certain strong
When the electric current of degree, the electric current bestowed with there are tellurian magnetic force can generate Lorentz force.Generated Lorentz force can incite somebody to action
The mass block is mobile to the direction both perpendicular to the current direction and magnetic force direction.For example, in example shown in the figure, when
When electric current flows through the mass block 10 with the negative Y-direction in scheming, the magnetic force of X-direction into figure can be pulled to mass block 10 far from figure
Direction (positive Z-direction).Therefore, the mass block is calculated after the constant current for supplying negative Y-direction in the displacement of Z-direction
Measure the quantity of magnetism of X-direction.
On the other hand, when bestowing the constant current of X-direction to the mass block, to the magnetic force of Y-direction, mass block 10 can be drawn
Positive Z-direction into figure.Therefore, the mass block is calculated after the constant current of supply X-direction in the displacement of Z-direction, can be surveyed
Obtain the quantity of magnetism of Y-direction.Conversely, when bestowing the constant current of X-direction to the mass block, it, can be by mass block 10 to the magnetic force of Z-direction
Pull to the negative Y-direction in figure.Therefore, the displacement of the mass block after the constant current of supply X-direction in the Y direction is calculated
Measure the quantity of magnetism of Z-direction.
To provide effective measurement to the mass block 10 in the direction X/Y and Z-direction amount of movement, preferred embodiments benefit of the invention
Link the mode of adjacent two metal layer with through-hole (vias), electrode needed for forming measurement mass displacement, that is to say, that position
Common electrode in mass block 10, and Y-direction displacement measurement electrode and the side Z in the finger electrode structure 21,22
To displacement measurement electrode.Fig. 2 is the electrode structure schematic diagram of an embodiment of the present invention.It, should in embodiment as shown in the figure
Finger electrode structure 21,22 is located at the two sides of the mass block 10.The mass block 10 the 1st, 2 metal layers (M5, M6) pass through through-hole
Connection, to be electrically connected.4th, 5 layer of metal layer (M2, M3) is connected also by through-hole, is electrically connected.Meanwhile this refers to
Shape electrode structure 21,22 the 1st, 2 metal layers (M5, M6) by through-hole connect, to be electrically connected.3rd, 4 layer of metal layer
(M3, M4) is also connect by through-hole respectively with the 5th, 6 layer of metal layer (M1, M2), is respectively electrically connected.If it is necessary, each
Through-hole can be filled with metal.
Under above-mentioned framework, in figure the M5/M6 metal layer of finger electrode structure 21,22 formed the finger electrode structure 21,
22 Y-direction displacement detection electrode 211A, 211B, 221A, 221B.The electrode 211,221 is fixed on finger electrode structure 21,22
On, it will not move.Fig. 3 shows the plan view of this embodiment of the invention electrode assembly, for illustrating the Y-direction displacement detection electricity
The structure of pole 211A, 211B, 221A, 221B.As shown, to form Y-direction detecting electrode the group of by electrode 211A, 211A
First group of electrode, electrode 211B, 211B form the Y-direction detecting group of second group of electrode of electrode；Electrode 221A, 221A shape
Second group, electrode first group of electrode is detected at the Y-direction, electrode 221B, 221B form the Y-direction and detect second group, electrode
Second group of electrode.The electrode belonged to group is electrically connected, and is organized electrode with him and electrically completely cut off.Conducting wire L1, L2, L3, L4 in figure is aobvious
Show its electrical communication mode, but is not its mode of connection physically.Each group electrode can use different metal layer and form conducting wire
Form link and isolation.For example, the Y-direction detecting electrode group of first group of electrode 211A, 211A can be with the first metal layers
M6 makees conducting wire, and second group of electrode 211B, 211B can make conducting wire with second metal layer M5.The rest may be inferred by analogy.Each group electrode simultaneously passes through this
Wire link is to circuit for detecting 40 (Fig. 4).
As shown in Fig. 2, the M5/M6 metal layer of the mass block 10 forms community electrode 107, in the magnetometer by Lorenz
When power, it may occur that movement.It is common that the component of the movement (arrow Y-direction, the i.e. Y-direction of Fig. 1 in Fig. 3) in the Y direction can change this
Individual distances of electrode 107 and Y-direction displacement detection electrode first group of electrode 211A, 221A and second group of electrode 211B, 221B,
Thus make the variation corresponding with the interelectrode capacitor generation of Y-direction displacement detection electrode each group of common electrode 107.Variable quantity warp
After Y-direction displacement detection electrode 211A, 211B, 221A, 221B detecting, send to rear class circuit for detecting 40 (Fig. 4), be converted into example
Such as voltage signal, the displacement of the Y-direction is calculated accordingly.
Similarly, M3/M4 the and M1/M2 metal layer of finger electrode structure 21,22 is respectively formed the finger electrode structure in Fig. 2
21,22 Z-direction displacement detection electrode 212,213 and 222,223.The electrode 212,213 and 222,223 is fixed on finger electrode
In structure 21,22, it will not move.The M2/M3 metal layer of the mass block 10 forms community electrode 108, in the magnetometer by labor
When Lun Zili, it may occur that movement.The movement can change the common electrode 108 and Z in the component of Z-direction (arrow Z-direction in figure)
Individual distances of direction displacement detection electrode 212,213 and 222,223, thus make common electrode 108 and Z-direction displacement detection electricity
Capacitor and common electrode 108 between pole 212,222 is corresponding with the capacitor generation between Z-direction displacement detection electrode 213,223
Variation.After the variable quantity is detected via Z-direction displacement detection electrode 212,213 and 222,223, send to rear class circuit for detecting 40
(Fig. 4), is converted into such as voltage signal, calculates the displacement of the Z-direction accordingly.
In the present embodiment, which includes two groups, i.e. group of electrode 211A, 211B and the
Two crowds electrode 221A, 221B is located at the X-direction two sides of the mass block 10.The Z-direction displacement detection electrode also includes two
Group, i.e. group of electrode 212,213 and 222, the 223 of second group, are also located at the X-direction two sides of the mass block 10.But
Those skilled in the art know that these detecting electrodes substantially only need to include a group.And using being more than two groups, also belong to feasible.
Although above structure uses specific metal layer equal as detecting electrode and shared electrode, those skilled in the art
Know, can use the metal layer combination as present invention detecting electrode and shared electrode in standard CMOS structure, certainly not
It is limited to mode shown by the embodiment.Furthermore magnetometer structure of the invention is also not necessarily limited to make using CMOS processing procedure, any
The production method for forming metal layer and dielectric substance layer stack architecture, may serve to make magnetometer of the invention.On in addition,
It states the direction the X/Y displacement detection electrode and Z-direction displacement detection electrode of embodiment, and corresponding common electrode and is not formed in
Same level.But it can also change by simple, form it into same level, and reduce structural thickness.
There is no particular restriction for the material of the metal layer, if the electrical conductance that tool is excellent, and be suitable for processing, that is, it can be applicable to this
Invention.Applicable material includes: copper, silver, gold, aluminium and its alloy.The material of the through-hole and its packing material is also without special limit
System, if the electrical conductance that tool is excellent, and be suitable for processing, that is, it can be applicable to the present invention.Applicable material includes: copper, silver, gold, aluminium
And its alloy.The material of metal layer can be identical or different with through-hole and its packing material.The dielectric layer preferably uses Gao Jie
Electric material, such as silicon or oxide, the nitrogen oxides of metal etc..The thickness of each metal layer and dielectric layer is also not particularly limited,
But as the magnetometer be with the production of standard CMOS processing procedure, then the thickness of each metal layer and dielectric layer preferably with standard Manufacturing Process phase
Together, to simplify processing procedure.
The mass block 10 is suspended on structural body preferably by spring 101,102.If the spring 101,102 usually may include
The metal layer of dried layer and the dielectric layer between metal layer.The metal layer and dielectric layer material of spring 101,102 are preferably and matter
Gauge block 10 and finger electrode structure 21,22 are identical.But this also non-any technical limitation.It makes the mass block to suspend and refers to
The technology of shape electrode structure has been the prior art.It is not required to repeat herein.
Fig. 4 shows the system diagram of magnetometer of the present invention.As shown, the magnetometer includes the mass block 10 of above-mentioned suspension,
Finger electrode structure 21,22 positioned at the mass block two sides supplies electricity to the electric contact 103,104,105,106 of the mass block 10
The power supply module 30 of stream, connect detecting electrode 211A in the power supply module 30 and the finger electrode structure 21,22,
211B, 221A, 221B and 212,213 and 222,223, it is electric with the detecting of Z-direction displacement in the Y direction for detecting mass block 10
Road 40.The circuit for detecting 40 can be equipped with or external microcontroller or micro computer (not shown), to calculate the mass block 10 in the Y direction
With Z-direction displacement, and with reference to the power supply module 30 operation mode information, the side of the mass block is flowed through including electric current
To the Y-direction and Z-direction displacement are converted into earth magnetism or other magnetic fields in X, Y, the quantity of magnetism of Z-direction.
The circuit for detecting 40 has belonged to the prior art according to the technology in 10 displacement calculation magnetic field of mass block.It is not required to go to live in the household of one's in-laws on getting married herein
It states.Now only make one with regard to detecting/calculation method that the circuit for detecting 40 is used in response to 100 special construction of magnetometer of the present invention to say
It is bright.Fig. 5 indicates that circuit for detecting 40 of the present invention measures the method flow diagram of all directions quantity of magnetism.It needs first to illustrate, this method is used
The sequence of X, Y, Z-direction magnetic force are calculated, not any technical restriction.It is calculated with different order, still can get correct result.
The magnetometer structure can be fabricated separately, then combine with such as power supply module 30, circuit for detecting 40 etc..But
Identical structural body can also be made in jointly with the circuit frameworks such as the power supply module 30, circuit for detecting 40 and other mechanical frameworks
In, to simplify interface therebetween.
Shown in Fig. 5, when measuring magnetic field, the power supply module 30 is set 501 first, Fig. 1 is provided with to the mass block 10
In Y-direction constant current.That is, make electric current by contact 103,104 enter mass block 10, then by contact 105,106 from
It opens, or mass block 10 is entered by contact 105,106, then left by contact 103,104.In step 502 after electric current is stablized, measurement
Displacement of the mass block in Z-direction, and the quantity of magnetism in step 503 according to the displacement calculation X-direction of the Z-direction.
Later, change the X-direction that setting is provided with the power supply module 30 to the mass block 10 in Fig. 1 in step 504
Constant current.That is, electric current is made to enter mass block 10 by contact 103,105, then left by contact 104,106.In step 505
After electric current is stablized, the mass block is measured in the displacement of Z-direction, and the displacement calculation Y in step 506 according to the Z-direction
The quantity of magnetism in direction.
The person of connecing still makes the power supply module 30 be provided with the constant current of X-direction to the mass block 10 in step 507.In step
Rapid 508 after electric current is stablized, measure the displacement of the mass block in the Y direction, and the displacement in step 509 according to the Y-direction
Calculate the quantity of magnetism of Z-direction.So complete the measurement in the tri- direction magnetic field X/Y/Z.
Using the three-dimensional space quantity of magnetism measured by magnetometer of the present invention, various applications can be provided in, such as longitude and latitude is sentenced
It is disconnected, height above sea level judgement etc..The present invention provides the magnetic force that a kind of design is simple, is easy to make and can be fully compatible with standard CMOS processing procedure
Meter.The magnetometer apply simple circuit control, can correct measurement three-dimensional space the quantity of magnetism.Really belong to a kind of hair not seen before
It is bright.
Claims (19)
1. a kind of magnetometer, the mass block to suspend including one, one group of Y-direction displacement detection electrode, one group of Z-direction displacement detection
Electrode and an electric current supply module；
The Y-direction represent the mass block a direction in two vertical direction in the plane, the mass block in the plane
Other direction in two vertical direction is X-direction, and the Z-direction represents the direction perpendicular to the plane；Wherein,
The length direction of the mass block is parallel with the Y-direction, and including several metal layers and several dielectric layers, with dielectric layer and gold
Belong to layer interaction stacked manner to be formed；
The Y-direction displacement detection electrode and Z-direction displacement detection electrode respectively include several metal layers and between wantonly two metal layers
Between dielectric layer；
In the mass block, corresponding to the part of the Y-direction displacement detection electrode, there are at least two metal layers to connect by through-hole；It is right
There should be at least two metal layers to connect by through-hole in the part of the Z-direction displacement detection electrode；And
The Y-direction displacement detection electrode includes two groups of electrodes, and each group includes at least two layers metal layer connected by through-hole, the Z
Direction displacement detection electrode also includes two groups of electrodes, and each group includes at least two layers metal layer connected by through-hole；And
The electric current supply module supplies the selectable electric current for flowing through the mass block along the X-direction or Y-direction respectively.
2. magnetometer as described in claim 1, it is characterised in that: the through-hole is filled with metal material.
3. magnetometer as described in claim 1, it is characterised in that: in the mass block, correspond to the Y-direction displacement detection electrode
Part, with correspond to the Z-direction displacement detection electrode part be located at Different Plane.
4. magnetometer as described in claim 1, it is characterised in that: in the mass block, correspond to the Y-direction displacement detection electrode
Part, be located at same level with the part for corresponding to the Z-direction displacement detection electrode, and be electrically insulated mutually.
5. magnetometer as described in claim 1, it is characterised in that: further include a circuit for detecting, correspond to the electric current and supply mould
The power supply state of block, according to the electric current supply module electric current flow through the mass block direction and the Y-direction displacement detection electrode or
The output of the Z-direction displacement detection electrode calculates the quantity of magnetism in tri- direction X, Y, Z；Wherein, which is where the mass block
In plane, the direction vertical with the Y-direction.
6. magnetometer as described in claim 1, it is characterised in that: the Y-direction displacement detection electrode and the Z-direction displacement detection
Electrode is respectively formed the finger-like extended to X/Y plane and extends, which is X-direction and the side Y in the side close to the mass block
To the plane of formation；The mass block also close to the Y-direction displacement detection electrode and the Z-direction displacement detection electrode side,
It forms the finger-like extended to the X/Y plane to extend, and extends into the Y-direction displacement detection electrode and the Z-direction displacement detection
In the recess portion that the finger-like of electrode extends to form.
7. magnetometer as described in claim 1, it is characterised in that: the mass block, the Y-direction displacement detection electrode and the side Z
To displacement detection electrode, it is collectively formed in one comprising on several metal layers and several dielectric layers works that sequentially storehouse is formed,
And the mass block is with a space and the Y-direction displacement detection electrode, the Z-direction displacement detection electrode separation.
8. magnetometer as claimed in claim 7, it is characterised in that: the Y-direction displacement detection electrode is located at the of the works
One and second metal layer；First group of electrode of Y-direction displacement detection electrode includes several finger electrodes, and second group of electrode also includes
Several finger electrodes, the finger electrode of the two intermesh configuration, and make it is a pair of comprising first group of electrode finger electrode with
The finger electrode pair of one second group of electrode finger electrode, the finger-like corresponding to the mass block extend.
9. magnetometer as claimed in claim 7, it is characterised in that: the magnetometer includes the Y-direction displacement detection electrode first
Group and second group, the Y-direction displacement detection electrode, first group, the Y-direction displacement detection electrode and the Y-direction displacement detection electrode
Second group respectively includes two groups of electrodes, is respectively positioned on the first, second metal layer of the works.
10. magnetometer as claimed in claim 8, it is characterised in that: the Y-direction displacement detection electrode each group electrode first with
Second metal layer is connected by a through-hole.
11. magnetometer as claimed in claim 8 or 9, it is characterised in that: the Z-direction displacement detection electrode is located at the knot
The third of structure object, the 4th metal layer and the five, the 6th metal layers；The third, the 4th metal layer and the five, the 6th metals
Layer is located at the different height in Z-direction.
12. magnetometer as claimed in claim 11, it is characterised in that: the magnetometer includes the Z-direction displacement detection electrode
A group and second group, the Z-direction displacement detection electrode, first group, the Z-direction displacement detection electrode and the Z-direction displacement detection electricity
Pole second group respectively includes two groups of electrodes, is each positioned at third, the 4th metal layer and the five, the 6th metal layers of the works；
The third, the 4th metal layer are located at the top of the five, the 6th metal layers.
13. magnetometer as claimed in claim 12, it is characterised in that: first, second metal layer, with the third to the 6th gold medal
Belong to interlayer, a preset distance is kept by an at least dielectric layer.
14. magnetometer as claimed in claim 12, it is characterised in that: the third of the Z-direction displacement detection electrode, the 4th metal
Layer is connected by a through-hole, and connects its five, the 6th metal layer also by a through-hole.
15. magnetometer as claimed in claim 14, it is characterised in that: first and second metal layer of the mass block is logical by one
Hole connection, the 4th, fifth metal layer by a through-hole connection.
16. magnetometer as described in claim 1, it is characterised in that: the mass block provides at least 4 contacts, and electron-donating connection should
Electric current supply module, the electric current for supplying the electric current supply module is selectable to flow through the quality along the X-direction or Y-direction respectively
Block.
17. magnetometer as claimed in claim 5, it is characterised in that: the circuit for detecting connects the electric current supply module, and should
The each group electrode of Y-direction displacement detection electrode, the Z-direction displacement detection electrode, with synchronous with the operation of the electric current supply module,
It detects the Y-direction displacement detection electrode and the mass block and corresponds to capacitance variations between the part of the Y-direction displacement detection electrode, with
The mass block is measured under magnetic fields, in the displacement of Y-direction；And detect the Z-direction displacement detection electrode and the mass block
Corresponding to capacitance variations between the part of the Z-direction displacement detection electrode, to measure the mass block under magnetic fields, in Z-direction
Displacement.
18. magnetometer as claimed in claim 17, it is characterised in that: flow through side of the circuit for detecting according further to the electric current
To the displacement with the direction Y/Z, the magnetic field is calculated in the quantity of magnetism of X/Y/Z all directions.
19. magnetometer as claimed in claim 5, it is characterised in that: the circuit for detecting is in the electric current supply module to the quality
When block bestows the electric current of X-direction, the mass block is measured in the displacement of Z-direction, calculates the magnetic of Y-direction suffered by the mass block accordingly
Power；The circuit for detecting measures the mass block in the Y direction when the electric current supply module bestows the electric current of X-direction to the mass block
Displacement, calculate the magnetic force of Z-direction suffered by the mass block accordingly；The circuit for detecting is in the electric current supply module to the mass block
When bestowing the electric current of Y-direction, the mass block is measured in the displacement of Z-direction, calculates the magnetic of X-direction suffered by the mass block accordingly
Power.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514112.9A CN105527589B (en) | 2014-09-29 | 2014-09-29 | Magnetometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410514112.9A CN105527589B (en) | 2014-09-29 | 2014-09-29 | Magnetometer |
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| Publication Number | Publication Date |
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| CN105527589A CN105527589A (en) | 2016-04-27 |
| CN105527589B true CN105527589B (en) | 2019-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410514112.9A Expired - Fee Related CN105527589B (en) | 2014-09-29 | 2014-09-29 | Magnetometer |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1886669A (en) * | 2003-09-23 | 2006-12-27 | 秦内蒂克有限公司 | Resonant magnetometer device |
| CN102116851A (en) * | 2009-12-10 | 2011-07-06 | 意法半导体股份有限公司 | Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology |
| CN103528575A (en) * | 2013-10-18 | 2014-01-22 | 上海宏力半导体制造有限公司 | Three-dimensional AMRMEMS (Anisotropic Magneto Resistive Micro-Electro-Mechanical System) three-axis magnetometer structure and magnetometer |
| TW201423136A (en) * | 2012-10-12 | 2014-06-16 | Memsic Inc | Monolithic three-axis magnetic field sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9116198B2 (en) * | 2012-02-10 | 2015-08-25 | Memsic, Inc. | Planar three-axis magnetometer |
-
2014
- 2014-09-29 CN CN201410514112.9A patent/CN105527589B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1886669A (en) * | 2003-09-23 | 2006-12-27 | 秦内蒂克有限公司 | Resonant magnetometer device |
| CN102116851A (en) * | 2009-12-10 | 2011-07-06 | 意法半导体股份有限公司 | Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology |
| TW201423136A (en) * | 2012-10-12 | 2014-06-16 | Memsic Inc | Monolithic three-axis magnetic field sensor |
| CN103528575A (en) * | 2013-10-18 | 2014-01-22 | 上海宏力半导体制造有限公司 | Three-dimensional AMRMEMS (Anisotropic Magneto Resistive Micro-Electro-Mechanical System) three-axis magnetometer structure and magnetometer |
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| CN105527589A (en) | 2016-04-27 |
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