GB0323157D0 - Micro-electromechanical system (MEMS) resonant magnetometer - Google Patents

Micro-electromechanical system (MEMS) resonant magnetometer

Info

Publication number
GB0323157D0
GB0323157D0 GBGB0323157.8A GB0323157A GB0323157D0 GB 0323157 D0 GB0323157 D0 GB 0323157D0 GB 0323157 A GB0323157 A GB 0323157A GB 0323157 D0 GB0323157 D0 GB 0323157D0
Authority
GB
United Kingdom
Prior art keywords
mems
micro
electromechanical system
resonant magnetometer
magnetometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0323157.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of GB0323157D0 publication Critical patent/GB0323157D0/en
Priority to CN2004800346536A priority Critical patent/CN1886669B/en
Priority to KR1020067005787A priority patent/KR20070032936A/en
Priority to PCT/GB2004/004017 priority patent/WO2005029107A1/en
Priority to US10/572,379 priority patent/US7394245B2/en
Priority to EP04768563A priority patent/EP1664815A1/en
Priority to JP2006527464A priority patent/JP4604037B2/en
Priority to HK07105196.4A priority patent/HK1099079A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
GBGB0323157.8A 2003-09-23 2003-10-03 Micro-electromechanical system (MEMS) resonant magnetometer Ceased GB0323157D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN2004800346536A CN1886669B (en) 2003-09-23 2004-09-21 Resonant magnetometer device
KR1020067005787A KR20070032936A (en) 2003-09-23 2004-09-21 Resonant magnetometer device
PCT/GB2004/004017 WO2005029107A1 (en) 2003-09-23 2004-09-21 Resonant magnetometer device
US10/572,379 US7394245B2 (en) 2003-09-23 2004-09-21 Resonant magnetometer device
EP04768563A EP1664815A1 (en) 2003-09-23 2004-09-21 Resonant magnetometer device
JP2006527464A JP4604037B2 (en) 2003-09-23 2004-09-21 Resonant magnetometer device
HK07105196.4A HK1099079A1 (en) 2003-09-23 2007-05-16 Resonant magnetometer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0322236.1A GB0322236D0 (en) 2003-09-23 2003-09-23 Resonant magnetometer device

Publications (1)

Publication Number Publication Date
GB0323157D0 true GB0323157D0 (en) 2003-11-05

Family

ID=29266492

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB0322236.1A Ceased GB0322236D0 (en) 2003-09-23 2003-09-23 Resonant magnetometer device
GBGB0323157.8A Ceased GB0323157D0 (en) 2003-09-23 2003-10-03 Micro-electromechanical system (MEMS) resonant magnetometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB0322236.1A Ceased GB0322236D0 (en) 2003-09-23 2003-09-23 Resonant magnetometer device

Country Status (4)

Country Link
KR (1) KR20070032936A (en)
CN (1) CN1886669B (en)
GB (2) GB0322236D0 (en)
HK (1) HK1099079A1 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059557B (en) * 2007-05-22 2012-04-11 东南大学 Micro-electro-mechanical system magnetic field sensor and magnetic field measurement method
DE102009046515A1 (en) * 2009-11-09 2011-05-12 Robert Bosch Gmbh Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate
ITTO20090973A1 (en) * 2009-12-10 2011-06-11 St Microelectronics Srl TRIASSIAL INTEGRATED MAGNETOMETER OF SEMICONDUCTOR MATERIAL MADE IN MEMS TECHNOLOGY
WO2012037538A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
KR101871865B1 (en) 2010-09-18 2018-08-02 페어차일드 세미컨덕터 코포레이션 Multi-die mems package
EP2616772B1 (en) 2010-09-18 2016-06-22 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
KR20130052652A (en) 2010-09-18 2013-05-22 페어차일드 세미컨덕터 코포레이션 Sealed packaging for microelectromechanical systems
WO2012037501A2 (en) 2010-09-18 2012-03-22 Cenk Acar Flexure bearing to reduce quadrature for resonating micromachined devices
CN103221795B (en) 2010-09-20 2015-03-11 快捷半导体公司 Microelectromechanical pressure sensor including reference capacitor
KR101270136B1 (en) * 2011-05-13 2013-06-04 (주)마이크로인피니티 MEMS resonator
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
KR102058489B1 (en) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 Mems device front-end charge amplifier
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (en) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Enhanced silicon via with multi-material fill
CN102928793B (en) * 2012-11-19 2015-03-25 中国科学院上海微系统与信息技术研究所 Micromechanical magnetic field sensor and application thereof
US10132829B2 (en) * 2013-03-13 2018-11-20 Invensense, Inc. Heading confidence interval estimation
WO2014151370A1 (en) * 2013-03-15 2014-09-25 Invensense, Inc. Magnetometer using magnetic materials on accelerometer
TWI531806B (en) * 2014-09-18 2016-05-01 溫瓌岸 Dual-functional resonant based magnetic field sensor
CN105445681A (en) * 2014-09-29 2016-03-30 硕英股份有限公司 Resonance-type magnetometer
CN105527589B (en) * 2014-09-29 2019-02-19 硕英股份有限公司 Magnetometer
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
CN107329099B (en) * 2017-06-22 2019-08-20 东南大学 One kind rocking parallel-moving type microcomputer emf sensor
CN110542869A (en) * 2019-06-21 2019-12-06 西北工业大学 Weak magnetic field measuring device and method based on modal localization effect
CN110793510B (en) * 2019-09-26 2020-08-18 西安交通大学 Magnetoelectric compass for measuring in-plane alternating current magnetic field and manufacturing method thereof

Also Published As

Publication number Publication date
KR20070032936A (en) 2007-03-23
CN1886669B (en) 2011-06-15
GB0322236D0 (en) 2003-10-22
CN1886669A (en) 2006-12-27
HK1099079A1 (en) 2007-08-03

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)