HK1084562A1 - Leak detector system and method for vacuum pumping leak detector - Google Patents

Leak detector system and method for vacuum pumping leak detector

Info

Publication number
HK1084562A1
HK1084562A1 HK06103049.9A HK06103049A HK1084562A1 HK 1084562 A1 HK1084562 A1 HK 1084562A1 HK 06103049 A HK06103049 A HK 06103049A HK 1084562 A1 HK1084562 A1 HK 1084562A1
Authority
HK
Hong Kong
Prior art keywords
leak detector
vacuum pumping
detector system
leak
vacuum
Prior art date
Application number
HK06103049.9A
Other languages
English (en)
Inventor
Anthony Liepert
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of HK1084562A1 publication Critical patent/HK1084562A1/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressor (AREA)
HK06103049.9A 2004-05-14 2006-03-09 Leak detector system and method for vacuum pumping leak detector HK1084562A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/845,991 US7189066B2 (en) 2004-05-14 2004-05-14 Light gas vacuum pumping system

Publications (1)

Publication Number Publication Date
HK1084562A1 true HK1084562A1 (en) 2006-07-21

Family

ID=34936481

Family Applications (1)

Application Number Title Priority Date Filing Date
HK06103049.9A HK1084562A1 (en) 2004-05-14 2006-03-09 Leak detector system and method for vacuum pumping leak detector

Country Status (5)

Country Link
US (1) US7189066B2 (xx)
EP (1) EP1596066B1 (xx)
JP (1) JP2005330967A (xx)
CN (1) CN100460685C (xx)
HK (1) HK1084562A1 (xx)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101375063B (zh) * 2006-01-31 2011-04-27 株式会社荏原制作所 真空泵单元
JP2008088880A (ja) * 2006-09-29 2008-04-17 Anest Iwata Corp 真空排気装置
DE202009003980U1 (de) * 2009-03-24 2010-08-19 Vacuubrand Gmbh + Co Kg Vakuumpumpe
EP2458218A1 (en) * 2010-11-30 2012-05-30 Converteam Technology Ltd A system for maintaining a high vacuum
CN102654117B (zh) * 2011-03-04 2014-10-22 中国科学院沈阳科学仪器研制中心有限公司 一种真空泵用排气装置
EP2710267B1 (en) * 2011-05-20 2017-07-12 BP Exploration Operating Company Limited Pump
US8806919B2 (en) * 2011-07-29 2014-08-19 Vacuum Technology Inc. Leak detection apparatus and method
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
CN104632629A (zh) * 2013-11-13 2015-05-20 中国科学院沈阳科学仪器股份有限公司 用于高效抽除小分子量气体的真空系统
KR102154082B1 (ko) * 2014-05-30 2020-09-09 가부시키가이샤 에바라 세이사꾸쇼 진공 배기 시스템
CN104791223A (zh) * 2015-03-23 2015-07-22 苏州固基电子科技有限公司 一种具有管道泄露检测功能的气阀
US9982666B2 (en) 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
US10094381B2 (en) * 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
DE102015215982B4 (de) * 2015-08-21 2017-03-16 Magna Powertrain Bad Homburg GmbH Pumpe sowie System zur Versorgung eines Verbrauchers
TWI630359B (zh) * 2016-04-13 2018-07-21 復盛股份有限公司 壓縮設備
CN105865724A (zh) * 2016-04-18 2016-08-17 浙江优机机械科技有限公司 一种紧松与增泄同步智能阀门试验台及检测方法
CN106762641A (zh) * 2016-11-28 2017-05-31 陈琼 一种真空联合机组
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
CN108533494B (zh) * 2018-06-19 2024-02-20 浙江维朋制冷设备有限公司 一种真空泵
US11872424B2 (en) * 2019-10-04 2024-01-16 Hamilton Sundstrand Corporation Process water gas management of electrolyzer system with membrane

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4735084A (en) 1985-10-01 1988-04-05 Varian Associates, Inc. Method and apparatus for gross leak detection
DE4140366A1 (de) * 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
DE4408877A1 (de) * 1994-03-16 1995-09-21 Leybold Ag Testgaslecksucher
DE9405028U1 (de) * 1994-03-24 1994-06-09 Leybold AG, 50968 Köln Testgas-Lecksuchgerät
US5542828A (en) 1994-11-17 1996-08-06 Grenci; Charles A. Light-gas-isolation, oil-free, scroll vaccum-pump system
DE69630981T2 (de) * 1995-02-28 2004-12-30 Anest Iwata Corp. Kontrollsystem für zweistufige Vakuumpumpe
US5616015A (en) * 1995-06-07 1997-04-01 Varian Associates, Inc. High displacement rate, scroll-type, fluid handling apparatus
DE19638506A1 (de) * 1996-09-20 1998-03-26 Leybold Vakuum Gmbh Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher
JP2001207984A (ja) * 1999-11-17 2001-08-03 Teijin Seiki Co Ltd 真空排気装置
FR2822200B1 (fr) * 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
WO2003023229A1 (fr) 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide

Also Published As

Publication number Publication date
US20050254981A1 (en) 2005-11-17
JP2005330967A (ja) 2005-12-02
CN100460685C (zh) 2009-02-11
EP1596066A1 (en) 2005-11-16
CN1707102A (zh) 2005-12-14
EP1596066B1 (en) 2011-10-19
US7189066B2 (en) 2007-03-13

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20130511