HK1084190A1 - Nozzle assembly for applying a liquid to a substrate - Google Patents

Nozzle assembly for applying a liquid to a substrate

Info

Publication number
HK1084190A1
HK1084190A1 HK06104404.6A HK06104404A HK1084190A1 HK 1084190 A1 HK1084190 A1 HK 1084190A1 HK 06104404 A HK06104404 A HK 06104404A HK 1084190 A1 HK1084190 A1 HK 1084190A1
Authority
HK
Hong Kong
Prior art keywords
liquid
substrate
applying
guide plate
lower edge
Prior art date
Application number
HK06104404.6A
Other languages
English (en)
Inventor
Anatol Schwersenz
Werner Saule
Andreas Noering
Peter Dress
Christian Burgel
Martin Tschinkl
Marlene Strobl
Original Assignee
Steag Hamatech Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech Ag filed Critical Steag Hamatech Ag
Publication of HK1084190A1 publication Critical patent/HK1084190A1/xx

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/005Curtain coaters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03DAPPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D5/00Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected
    • G03D5/04Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected using liquid sprays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Nozzles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
HK06104404.6A 2002-07-19 2006-04-11 Nozzle assembly for applying a liquid to a substrate HK1084190A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10232984A DE10232984A1 (de) 2002-07-19 2002-07-19 Düsenanordnung zum Aufbringen einer Flüssigkeit auf ein Substrat
PCT/EP2003/007494 WO2004010220A1 (de) 2002-07-19 2003-07-10 Düsenanordnung zum aufbringen einer flüssigkeit auf ein substrat

Publications (1)

Publication Number Publication Date
HK1084190A1 true HK1084190A1 (en) 2006-07-21

Family

ID=30010245

Family Applications (1)

Application Number Title Priority Date Filing Date
HK06104404.6A HK1084190A1 (en) 2002-07-19 2006-04-11 Nozzle assembly for applying a liquid to a substrate

Country Status (11)

Country Link
US (1) US7419549B2 (xx)
EP (1) EP1523695B1 (xx)
JP (1) JP4528614B2 (xx)
KR (1) KR100982586B1 (xx)
CN (1) CN100476582C (xx)
AT (1) ATE373836T1 (xx)
CA (1) CA2492825C (xx)
DE (2) DE10232984A1 (xx)
HK (1) HK1084190A1 (xx)
TW (1) TWI283193B (xx)
WO (1) WO2004010220A1 (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004053337A1 (de) 2004-11-04 2006-05-11 Steag Hama Tech Ag Verfahren und Vorrichtung zum Behandeln von Substraten und Düseneinheit hierfür
CN103116251A (zh) * 2013-01-18 2013-05-22 清华大学深圳研究生院 抗变形排孔显影喷嘴及其制备方法
JP5651819B1 (ja) * 2014-03-11 2015-01-14 勝行 三好 多目的フィットネス装置
US10766802B2 (en) * 2014-11-29 2020-09-08 National Tsing Hua University Flexible 3D freeform techniques
CN104538332B (zh) * 2014-12-12 2017-06-27 深圳市华星光电技术有限公司 一种湿制程机台的腔室结构
GB2560327B (en) * 2017-03-07 2019-04-17 Technijet Digital Ltd Apparatus and method for spray treating fabric
GB201819454D0 (en) * 2018-11-29 2019-01-16 Johnson Matthey Plc Apparatus and method for coating substrates with washcoats
CN215695356U (zh) * 2021-04-16 2022-02-01 诺信公司 喷头组件、分配系统、电极片材条带以及电极

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1023842B (it) * 1974-08-08 1978-05-30 Italsider Spa Dispositivo perfezionato per insufflare una lama d aria contro un nastro rivestito da uno strato di materiale liquido, in particolare contro un nastro metallico rivestito da uno strato di zico fuso
FR2540082B1 (fr) * 1982-09-23 1987-02-06 Vuillaume Andre Appareil rinceur universel, notamment pour l'industrie papetiere, les convoyeurs a bande et analogues
DE8812493U1 (de) * 1988-10-04 1990-02-01 Nordson Corp., Westlake, Ohio Schlitzdüse
DE3932779A1 (de) * 1989-09-30 1991-04-11 Schering Ag Verfahren zum behandeln von gegenstaenden mit einer fluessigkeit, sowie vorrichtung zur durchfuehrung des verfahrens
DE19652827A1 (de) * 1996-12-18 1998-06-25 Voith Sulzer Papiermasch Gmbh Auftragwerk zum direkten oder indirekten Auftragen eines flüssigen oder pastösen Streichmediums auf eine laufende Materialbahn, insbesondere aus Papier oder Karton
JPH10270336A (ja) * 1997-03-27 1998-10-09 Yuasa Seisakusho:Kk 液体吐出装置
DE19755625A1 (de) * 1997-12-15 1999-07-01 Jagenberg Papiertech Gmbh Schlitzdüse zum Beschichten von Materialbahnen, insbesondere Papier- oder Kartonbahnen mit Pigmentstreichfarbe
JP3923676B2 (ja) * 1999-04-21 2007-06-06 株式会社東芝 基板処理方法
US6364547B1 (en) * 1999-10-25 2002-04-02 Tokyo Electron Limited Solution processing apparatus
JP3652596B2 (ja) * 1999-10-25 2005-05-25 東京エレクトロン株式会社 液処理装置
FI111562B (fi) * 2002-01-16 2003-08-15 Metso Paper Inc Menetelmä ja laitteisto käsittelyaineen syöttämiseksi liikkuvalle pinnalle

Also Published As

Publication number Publication date
DE10232984A8 (de) 2004-07-08
KR100982586B1 (ko) 2010-09-15
KR20050061439A (ko) 2005-06-22
DE50308231D1 (de) 2007-10-31
US7419549B2 (en) 2008-09-02
JP2005537124A (ja) 2005-12-08
CN1688931A (zh) 2005-10-26
ATE373836T1 (de) 2007-10-15
US20050220931A1 (en) 2005-10-06
CA2492825C (en) 2010-09-28
WO2004010220A8 (de) 2005-04-21
DE10232984A1 (de) 2004-02-05
EP1523695B1 (de) 2007-09-19
CN100476582C (zh) 2009-04-08
WO2004010220A1 (de) 2004-01-29
TWI283193B (en) 2007-07-01
JP4528614B2 (ja) 2010-08-18
TW200405826A (en) 2004-04-16
EP1523695A1 (de) 2005-04-20
CA2492825A1 (en) 2004-01-29

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20160710