HK1077412A1 - Linear motor and x-y stage - Google Patents

Linear motor and x-y stage

Info

Publication number
HK1077412A1
HK1077412A1 HK05109327.0A HK05109327A HK1077412A1 HK 1077412 A1 HK1077412 A1 HK 1077412A1 HK 05109327 A HK05109327 A HK 05109327A HK 1077412 A1 HK1077412 A1 HK 1077412A1
Authority
HK
Hong Kong
Prior art keywords
stage
linear motor
linear
motor
Prior art date
Application number
HK05109327.0A
Other languages
English (en)
Inventor
Kim Houng Joong
Sakai Keijiro
Shibata Hitoshi
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of HK1077412A1 publication Critical patent/HK1077412A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/28—Layout of windings or of connections between windings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
HK05109327.0A 2003-11-18 2005-10-20 Linear motor and x-y stage HK1077412A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003387344A JP4089597B2 (ja) 2003-11-18 2003-11-18 リニアモータ及びｘｙステージ

Publications (1)

Publication Number Publication Date
HK1077412A1 true HK1077412A1 (en) 2006-02-10

Family

ID=34567440

Family Applications (1)

Application Number Title Priority Date Filing Date
HK05109327.0A HK1077412A1 (en) 2003-11-18 2005-10-20 Linear motor and x-y stage

Country Status (5)

Country Link
US (1) US7250696B2 (xx)
JP (1) JP4089597B2 (xx)
KR (1) KR100595783B1 (xx)
CN (1) CN100527573C (xx)
HK (1) HK1077412A1 (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4708093B2 (ja) * 2005-06-01 2011-06-22 山洋電気株式会社 リニアモータ
JP5084189B2 (ja) * 2006-07-04 2012-11-28 Ｊｕｋｉ株式会社 リニアモータ及び部品搭載装置
US8884473B2 (en) * 2008-11-18 2014-11-11 Hitachi Metals, Ltd. Mover, armature, and linear motor
TWI460966B (zh) * 2009-01-23 2014-11-11 Hitachi Metals Ltd Moving elements and linear motors
WO2010103575A1 (ja) * 2009-03-13 2010-09-16 株式会社日立製作所 リニアモータ
JP6634018B2 (ja) * 2013-09-18 2020-01-22 イー．ヴィー．アール． モーターズ リミテッドＥ．Ｖ．Ｒ． Ｍｏｔｏｒｓ Ｌｔｄ． 多極電気機械
JP6082380B2 (ja) * 2014-12-26 2017-02-15 Thk株式会社 リニアアクチュエータ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241268A (en) * 1979-09-20 1980-12-23 Popov Alexandr D Linear induction motor
JPH10327571A (ja) * 1997-05-23 1998-12-08 Nikon Corp リニアパルスモータ
JP3395155B2 (ja) 1999-05-07 2003-04-07 株式会社日立製作所 リニアモータ及びその製造方法
KR100720753B1 (ko) * 2000-04-19 2007-05-22 가부시키가이샤 야스카와덴키 영구자석형 동기 리니어모터
JP3945142B2 (ja) * 2000-10-12 2007-07-18 株式会社日立製作所 リニアモータ及びその制御方法
JP3945148B2 (ja) * 2000-11-02 2007-07-18 株式会社日立製作所 Ｘｙテーブル及びｘｙｚテーブル
JP4061834B2 (ja) * 2000-11-02 2008-03-19 株式会社日立製作所 リニアモータ
JP4061835B2 (ja) * 2000-11-06 2008-03-19 株式会社日立製作所 電動機
JP3945149B2 (ja) * 2000-11-06 2007-07-18 株式会社日立製作所 リニアモータとその製造方法
JP3945150B2 (ja) * 2000-11-06 2007-07-18 株式会社日立製作所 リニアモータ
JP3861593B2 (ja) * 2000-12-11 2006-12-20 株式会社日立製作所 リニアモータ
JP3855873B2 (ja) * 2002-07-31 2006-12-13 株式会社日立製作所 直線駆動装置及びそれを用いた製造装置
JP3855914B2 (ja) * 2002-11-12 2006-12-13 株式会社日立製作所 直線駆動装置
JP3821101B2 (ja) * 2003-02-04 2006-09-13 株式会社日立製作所 直線駆動装置、その制御方法及びｘｙテーブル

Also Published As

Publication number Publication date
JP4089597B2 (ja) 2008-05-28
US20050104454A1 (en) 2005-05-19
CN100527573C (zh) 2009-08-12
KR20050048458A (ko) 2005-05-24
US7250696B2 (en) 2007-07-31
JP2005151726A (ja) 2005-06-09
CN1619927A (zh) 2005-05-25
KR100595783B1 (ko) 2006-07-03

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20130818