HK1043627A1 - 檢查透孔的方法及裝置 - Google Patents

檢查透孔的方法及裝置

Info

Publication number
HK1043627A1
HK1043627A1 HK02105371.6A HK02105371A HK1043627A1 HK 1043627 A1 HK1043627 A1 HK 1043627A1 HK 02105371 A HK02105371 A HK 02105371A HK 1043627 A1 HK1043627 A1 HK 1043627A1
Authority
HK
Hong Kong
Prior art keywords
inspecting method
hole inspecting
hole
inspecting
Prior art date
Application number
HK02105371.6A
Other languages
English (en)
Inventor
Saito Mikio
Goto Noboru
Ishikawa Toshiaki
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of HK1043627A1 publication Critical patent/HK1043627A1/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95653—Through-holes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/894—Pinholes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
HK02105371.6A 2000-03-29 2002-07-19 檢查透孔的方法及裝置 HK1043627A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000092491 2000-03-29
PCT/JP2001/002641 WO2001073411A1 (fr) 2000-03-29 2001-03-29 Procede et dispositif d'inspection de trous de passage

Publications (1)

Publication Number Publication Date
HK1043627A1 true HK1043627A1 (zh) 2002-09-20

Family

ID=18607818

Family Applications (1)

Application Number Title Priority Date Filing Date
HK02105371.6A HK1043627A1 (zh) 2000-03-29 2002-07-19 檢查透孔的方法及裝置

Country Status (6)

Country Link
US (1) US20020031250A1 (zh)
EP (1) EP1197745A4 (zh)
CN (1) CN1153058C (zh)
HK (1) HK1043627A1 (zh)
TW (1) TWI243895B (zh)
WO (1) WO2001073411A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1857812A1 (en) * 2006-05-19 2007-11-21 Amcor Flexibles A/S Control system
JP5077780B2 (ja) * 2009-07-06 2012-11-21 株式会社デンソー 光検出装置
CN103630550B (zh) * 2012-08-27 2017-02-08 珠海格力电器股份有限公司 网状结构的网孔洁净度检测装置
CN103293161A (zh) * 2013-05-29 2013-09-11 浙江工业大学 竹筷胚蛀孔缺陷激光快速检测方法及其专有装置
US10295475B2 (en) 2014-09-05 2019-05-21 Rolls-Royce Corporation Inspection of machined holes
US10228669B2 (en) 2015-05-27 2019-03-12 Rolls-Royce Corporation Machine tool monitoring
CN105588846A (zh) * 2015-12-14 2016-05-18 天津华迈科技有限公司 一种光感式贴片检测组件
CN106290400A (zh) * 2016-07-29 2017-01-04 广东正业科技股份有限公司 一种应用于板的检孔方法及检孔设备
US10018458B2 (en) * 2016-09-12 2018-07-10 The Boeing Company Validating parts using a number of contiguous coupons produced from part excess
WO2019104461A1 (zh) * 2017-11-28 2019-06-06 苏州慧景光电科技有限公司 工件孔位成像检测系统
US11112351B2 (en) 2019-09-16 2021-09-07 International Business Machines Corporation Partial submersion testing for plating defects
US11162889B2 (en) 2019-09-16 2021-11-02 International Business Machines Corporation Non-destructive testing for plating defects
CN114813759B (zh) * 2022-06-24 2022-09-09 四川英创力电子科技股份有限公司 一种精密检测印制电路板上孔数的检孔装置及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4379308A (en) * 1980-02-25 1983-04-05 Cooper Industries, Inc. Apparatus for determining the parameters of figures on a surface
US4555798A (en) * 1983-06-20 1985-11-26 Kla Instruments Corporation Automatic system and method for inspecting hole quality
JPH0713598B2 (ja) * 1985-05-09 1995-02-15 大日本印刷株式会社 周期性パタ−ンの欠陥検査方法
JP2792517B2 (ja) * 1988-06-03 1998-09-03 大日本印刷株式会社 試料の検査方法
US5125035A (en) * 1989-12-18 1992-06-23 Chromalloy Gas Turbine Corporation Five axis generated hole inspection system
JPH0723847B2 (ja) * 1990-10-30 1995-03-15 大日本スクリーン製造株式会社 プリント基板のパターン検査方法
JPH04328549A (ja) * 1991-04-26 1992-11-17 Nikon Corp フォトマスクの検査方法および装置
JPH06235624A (ja) * 1992-12-15 1994-08-23 Hitachi Ltd 透明シートの検査方法とその装置
JP3224620B2 (ja) * 1993-02-05 2001-11-05 大日本印刷株式会社 周期性パターンのムラ定量化方法
JP2791265B2 (ja) * 1993-04-28 1998-08-27 大日本スクリーン製造株式会社 周期性パターン検査装置
JPH09210850A (ja) * 1996-01-31 1997-08-15 Kobe Steel Ltd 周期性パターン検査装置
DE19639854A1 (de) * 1996-09-27 1998-06-10 Vitronic Dr Ing Stein Bildvera Verfahren und Vorrichtung zur Erfassung von auf potentiell großflächigen Gegenständen aufgebrachten, optisch erfaßbaren Informationen
US6624885B1 (en) * 1999-06-10 2003-09-23 Aradigm Corporation Method and device for non-destructive analysis of perforation in a material
US6327033B1 (en) * 1999-06-21 2001-12-04 International Business Machines Corporation Detection of phase defects on photomasks by differential imaging

Also Published As

Publication number Publication date
WO2001073411A1 (fr) 2001-10-04
TWI243895B (en) 2005-11-21
CN1153058C (zh) 2004-06-09
CN1365444A (zh) 2002-08-21
EP1197745A1 (en) 2002-04-17
US20020031250A1 (en) 2002-03-14
EP1197745A4 (en) 2005-04-13

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