GB9903110D0 - Method of fabricating etched structures - Google Patents

Method of fabricating etched structures

Info

Publication number
GB9903110D0
GB9903110D0 GBGB9903110.6A GB9903110A GB9903110D0 GB 9903110 D0 GB9903110 D0 GB 9903110D0 GB 9903110 A GB9903110 A GB 9903110A GB 9903110 D0 GB9903110 D0 GB 9903110D0
Authority
GB
United Kingdom
Prior art keywords
etched structures
fabricating
fabricating etched
structures
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9903110.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Bristol
Original Assignee
University of Bristol
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Bristol filed Critical University of Bristol
Priority to GBGB9903110.6A priority Critical patent/GB9903110D0/en
Publication of GB9903110D0 publication Critical patent/GB9903110D0/en
Priority to EP00902762A priority patent/EP1155440A1/en
Priority to CA002367064A priority patent/CA2367064A1/en
Priority to PCT/GB2000/000423 priority patent/WO2000048236A1/en
Priority to AU24503/00A priority patent/AU765894B2/en
Ceased legal-status Critical Current

Links

GBGB9903110.6A 1999-02-11 1999-02-11 Method of fabricating etched structures Ceased GB9903110D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GBGB9903110.6A GB9903110D0 (en) 1999-02-11 1999-02-11 Method of fabricating etched structures
EP00902762A EP1155440A1 (en) 1999-02-11 2000-02-10 Methods of fabricating etched structures
CA002367064A CA2367064A1 (en) 1999-02-11 2000-02-10 Methods of fabricating etched structures
PCT/GB2000/000423 WO2000048236A1 (en) 1999-02-11 2000-02-10 Methods of fabricating etched structures
AU24503/00A AU765894B2 (en) 1999-02-11 2000-02-10 Methods of fabricating etched structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9903110.6A GB9903110D0 (en) 1999-02-11 1999-02-11 Method of fabricating etched structures

Publications (1)

Publication Number Publication Date
GB9903110D0 true GB9903110D0 (en) 1999-04-07

Family

ID=10847566

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9903110.6A Ceased GB9903110D0 (en) 1999-02-11 1999-02-11 Method of fabricating etched structures

Country Status (5)

Country Link
EP (1) EP1155440A1 (en)
AU (1) AU765894B2 (en)
CA (1) CA2367064A1 (en)
GB (1) GB9903110D0 (en)
WO (1) WO2000048236A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7276453B2 (en) 2004-08-10 2007-10-02 E.I. Du Pont De Nemours And Company Methods for forming an undercut region and electronic devices incorporating the same
US7166860B2 (en) 2004-12-30 2007-01-23 E. I. Du Pont De Nemours And Company Electronic device and process for forming same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4201800A (en) * 1978-04-28 1980-05-06 International Business Machines Corp. Hardened photoresist master image mask process
JPH03198327A (en) * 1989-12-26 1991-08-29 Fujitsu Ltd Manufacture of semiconductor device
JPH03263834A (en) * 1990-03-14 1991-11-25 Matsushita Electron Corp Manufacture of semiconductor device
US5091290A (en) * 1990-12-03 1992-02-25 Micron Technology, Inc. Process for promoting adhesion of a layer of photoresist on a substrate having a previous layer of photoresist
US5736457A (en) * 1994-12-09 1998-04-07 Sematech Method of making a damascene metallization

Also Published As

Publication number Publication date
EP1155440A1 (en) 2001-11-21
WO2000048236A1 (en) 2000-08-17
AU2450300A (en) 2000-08-29
CA2367064A1 (en) 2000-08-17
AU765894B2 (en) 2003-10-02

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)