GB9824077D0 - A method and apparatus for etching a substrate - Google Patents

A method and apparatus for etching a substrate

Info

Publication number
GB9824077D0
GB9824077D0 GBGB9824077.3A GB9824077A GB9824077D0 GB 9824077 D0 GB9824077 D0 GB 9824077D0 GB 9824077 A GB9824077 A GB 9824077A GB 9824077 D0 GB9824077 D0 GB 9824077D0
Authority
GB
United Kingdom
Prior art keywords
etching
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9824077.3A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9824077.3A priority Critical patent/GB9824077D0/en
Publication of GB9824077D0 publication Critical patent/GB9824077D0/en
Priority to US09/245,861 priority patent/US6187685B1/en
Priority to JP2000580243A priority patent/JP4163857B2/en
Priority to AT99954133T priority patent/ATE458273T1/en
Priority to EP99954133A priority patent/EP1131847B1/en
Priority to PCT/GB1999/003630 priority patent/WO2000026956A1/en
Priority to DE69942034T priority patent/DE69942034D1/en
Priority to KR10-2001-7005610A priority patent/KR100514150B1/en
Priority to JP2006013130A priority patent/JP2006148156A/en
Ceased legal-status Critical Current

Links

GBGB9824077.3A 1997-08-01 1998-11-04 A method and apparatus for etching a substrate Ceased GB9824077D0 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GBGB9824077.3A GB9824077D0 (en) 1998-11-04 1998-11-04 A method and apparatus for etching a substrate
US09/245,861 US6187685B1 (en) 1997-08-01 1999-02-08 Method and apparatus for etching a substrate
JP2000580243A JP4163857B2 (en) 1998-11-04 1999-11-03 Method and apparatus for etching a substrate
AT99954133T ATE458273T1 (en) 1998-11-04 1999-11-03 METHOD FOR ETCHING A SUBSTRATE
EP99954133A EP1131847B1 (en) 1998-11-04 1999-11-03 A method for etching a substrate
PCT/GB1999/003630 WO2000026956A1 (en) 1998-11-04 1999-11-03 A method and apparatus for etching a substrate
DE69942034T DE69942034D1 (en) 1998-11-04 1999-11-03 METHOD OF HEATING A SUBSTRATE
KR10-2001-7005610A KR100514150B1 (en) 1998-11-04 1999-11-03 A method and apparatus for etching a substrate
JP2006013130A JP2006148156A (en) 1998-11-04 2006-01-20 Method of etching substrate and equipment thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9824077.3A GB9824077D0 (en) 1998-11-04 1998-11-04 A method and apparatus for etching a substrate

Publications (1)

Publication Number Publication Date
GB9824077D0 true GB9824077D0 (en) 1998-12-30

Family

ID=10841778

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9824077.3A Ceased GB9824077D0 (en) 1997-08-01 1998-11-04 A method and apparatus for etching a substrate

Country Status (1)

Country Link
GB (1) GB9824077D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)