GB9618781D0 - An electromechanical sensor device and a method of manufacturing it - Google Patents
An electromechanical sensor device and a method of manufacturing itInfo
- Publication number
- GB9618781D0 GB9618781D0 GB9618781A GB9618781A GB9618781D0 GB 9618781 D0 GB9618781 D0 GB 9618781D0 GB 9618781 A GB9618781 A GB 9618781A GB 9618781 A GB9618781 A GB 9618781A GB 9618781 D0 GB9618781 D0 GB 9618781D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacturing
- sensor device
- electromechanical sensor
- electromechanical
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9510479A FR2738705B1 (en) | 1995-09-07 | 1995-09-07 | ELECTROMECHANICAL SENSOR DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9618781D0 true GB9618781D0 (en) | 1996-10-23 |
GB2304903A GB2304903A (en) | 1997-03-26 |
Family
ID=9482335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9618781A Withdrawn GB2304903A (en) | 1995-09-07 | 1996-09-09 | An electromechanical sensor device and a method of manufacturing it |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE19636543A1 (en) |
FR (1) | FR2738705B1 (en) |
GB (1) | GB2304903A (en) |
NO (1) | NO963719L (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2320571B (en) * | 1996-12-20 | 2000-09-27 | Aisin Seiki | Semiconductor micromachine and manufacturing method thereof |
US6359333B1 (en) * | 1998-03-31 | 2002-03-19 | Honeywell International Inc. | Wafer-pair having deposited layer sealed chambers |
AU3517600A (en) | 1999-03-17 | 2000-10-04 | Input/Output, Inc. | Calibration of sensors |
FI108986B (en) | 1999-07-01 | 2002-04-30 | Emfitech Oy | Process for producing a sensor element and a sensor element |
JP4134853B2 (en) * | 2003-09-05 | 2008-08-20 | 株式会社デンソー | Capacitive mechanical sensor device |
GB0421416D0 (en) * | 2004-09-25 | 2004-10-27 | Europ Technology For Business | Gyroscopes and accelerometers |
JP4380618B2 (en) * | 2005-10-21 | 2009-12-09 | 株式会社デンソー | Sensor device |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4277814A (en) * | 1979-09-04 | 1981-07-07 | Ford Motor Company | Semiconductor variable capacitance pressure transducer assembly |
JPS58154254A (en) * | 1982-03-10 | 1983-09-13 | Hitachi Ltd | Semiconductor device |
US4829818A (en) * | 1983-12-27 | 1989-05-16 | Honeywell Inc. | Flow sensor housing |
JPS60150660A (en) * | 1984-01-17 | 1985-08-08 | Mitsubishi Electric Corp | Semiconductor device |
IT1203535B (en) * | 1986-02-10 | 1989-02-15 | Marelli Autronica | PROCEDURE FOR THE REALIZATION OF THE MECHANICAL AND ELECTRICAL CONNECTION BETWEEN TWO BODIES IN PARTICULAR BETWEEN THE MEMBRANE AND THE SUPPORT OF A THICK FILM PRESSURE SENSOR AND DEVICES REALIZED WITH SUCH PROCEDURE |
JPH0736444B2 (en) * | 1986-12-19 | 1995-04-19 | 工業技術院長 | Tactile sensor |
DE69013104T2 (en) * | 1989-07-29 | 1995-03-23 | Shimadzu Corp | Semiconductor radiation image detector and its manufacturing method. |
JPH0797056B2 (en) * | 1990-03-02 | 1995-10-18 | 株式会社富士電機総合研究所 | Distributed tactile sensor |
US5164328A (en) * | 1990-06-25 | 1992-11-17 | Motorola, Inc. | Method of bump bonding and sealing an accelerometer chip onto an integrated circuit chip |
US5346857A (en) * | 1992-09-28 | 1994-09-13 | Motorola, Inc. | Method for forming a flip-chip bond from a gold-tin eutectic |
-
1995
- 1995-09-07 FR FR9510479A patent/FR2738705B1/en not_active Expired - Fee Related
-
1996
- 1996-09-06 NO NO963719A patent/NO963719L/en unknown
- 1996-09-09 DE DE1996136543 patent/DE19636543A1/en not_active Withdrawn
- 1996-09-09 GB GB9618781A patent/GB2304903A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
NO963719L (en) | 1997-03-10 |
DE19636543A1 (en) | 1997-03-13 |
NO963719D0 (en) | 1996-09-06 |
FR2738705B1 (en) | 1997-11-07 |
GB2304903A (en) | 1997-03-26 |
FR2738705A1 (en) | 1997-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |