GB2297618B - Angular velocity sensor and process for manufacturing an angular velocity sensor - Google Patents

Angular velocity sensor and process for manufacturing an angular velocity sensor

Info

Publication number
GB2297618B
GB2297618B GB9601992A GB9601992A GB2297618B GB 2297618 B GB2297618 B GB 2297618B GB 9601992 A GB9601992 A GB 9601992A GB 9601992 A GB9601992 A GB 9601992A GB 2297618 B GB2297618 B GB 2297618B
Authority
GB
United Kingdom
Prior art keywords
angular velocity
velocity sensor
manufacturing
sensor
angular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9601992A
Other versions
GB2297618A (en
GB9601992D0 (en
Inventor
Erich Zabler
Gerhard Benz
Juergen Schirmer
Franz Laermer
Andrea Schilp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB9601992D0 publication Critical patent/GB9601992D0/en
Publication of GB2297618A publication Critical patent/GB2297618A/en
Application granted granted Critical
Publication of GB2297618B publication Critical patent/GB2297618B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
GB9601992A 1995-02-03 1996-02-01 Angular velocity sensor and process for manufacturing an angular velocity sensor Expired - Fee Related GB2297618B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1995103623 DE19503623B4 (en) 1995-02-03 1995-02-03 Yaw rate sensor

Publications (3)

Publication Number Publication Date
GB9601992D0 GB9601992D0 (en) 1996-04-03
GB2297618A GB2297618A (en) 1996-08-07
GB2297618B true GB2297618B (en) 1997-04-09

Family

ID=7753155

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9601992A Expired - Fee Related GB2297618B (en) 1995-02-03 1996-02-01 Angular velocity sensor and process for manufacturing an angular velocity sensor

Country Status (2)

Country Link
DE (1) DE19503623B4 (en)
GB (1) GB2297618B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691472A (en) * 1995-05-30 1997-11-25 Alliedsignal, Inc. Non-gimballed angular rate sensor
DE19632060B4 (en) * 1996-08-09 2012-05-03 Robert Bosch Gmbh Method for producing a rotation rate sensor
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
GB2320571B (en) * 1996-12-20 2000-09-27 Aisin Seiki Semiconductor micromachine and manufacturing method thereof
DE69718685T2 (en) * 1997-11-25 2003-09-18 Alliedsignal Inc., Morristown JUMPER BAR ACCELEROMETER
JP3307328B2 (en) * 1998-05-11 2002-07-24 株式会社デンソー Semiconductor dynamic quantity sensor
DE19828424C1 (en) 1998-06-25 1999-12-02 Litef Gmbh Micromechanical revolution rate sensor base on the Coriolis principle
JP2005195574A (en) 2003-10-20 2005-07-21 Sony Corp Angular velocity detecting device, angular velocity detecting technique with angular velocity detecting device, and manufacturing method of angular velocity detecting device
DE102008057280A1 (en) * 2008-11-14 2010-05-27 Northrop Grumman Litef Gmbh Coriolis gyroscope, device for a Coriolis gyroscope and method for operating a Coriolis gyro

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992001941A1 (en) * 1990-07-14 1992-02-06 Robert Bosch Gmbh Micro-mechanical rotational-speed sensor
EP0634629A1 (en) * 1993-01-29 1995-01-18 Murata Manufacturing Co., Ltd. Angular velocity sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623782B2 (en) * 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
DE4032559C2 (en) * 1990-10-13 2000-11-23 Bosch Gmbh Robert Yaw rate sensor and manufacturing method
DE4339190B4 (en) * 1992-11-16 2006-04-13 Denso Corp., Kariya Semiconductor accelerometer
DE4241045C1 (en) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Process for anisotropic etching of silicon
EP0618450A1 (en) * 1993-03-30 1994-10-05 Siemens Aktiengesellschaft Acceleration sensor
US5344524A (en) * 1993-06-30 1994-09-06 Honeywell Inc. SOI substrate fabrication

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992001941A1 (en) * 1990-07-14 1992-02-06 Robert Bosch Gmbh Micro-mechanical rotational-speed sensor
EP0634629A1 (en) * 1993-01-29 1995-01-18 Murata Manufacturing Co., Ltd. Angular velocity sensor

Also Published As

Publication number Publication date
GB2297618A (en) 1996-08-07
DE19503623B4 (en) 2008-01-10
GB9601992D0 (en) 1996-04-03
DE19503623A1 (en) 1996-08-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110201