GB9616738D0 - Micromachined accelerometer - Google Patents

Micromachined accelerometer

Info

Publication number
GB9616738D0
GB9616738D0 GBGB9616738.2A GB9616738A GB9616738D0 GB 9616738 D0 GB9616738 D0 GB 9616738D0 GB 9616738 A GB9616738 A GB 9616738A GB 9616738 D0 GB9616738 D0 GB 9616738D0
Authority
GB
United Kingdom
Prior art keywords
micromachined accelerometer
micromachined
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9616738.2A
Other versions
GB2312959A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of GB9616738D0 publication Critical patent/GB9616738D0/en
Publication of GB2312959A publication Critical patent/GB2312959A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
GB9616738A 1996-05-10 1996-08-09 Method of making electrodes for accelerometers and other sensors Withdrawn GB2312959A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9609775.3A GB9609775D0 (en) 1996-05-10 1996-05-10 Micromachined accelerometer

Publications (2)

Publication Number Publication Date
GB9616738D0 true GB9616738D0 (en) 1996-09-25
GB2312959A GB2312959A (en) 1997-11-12

Family

ID=10793480

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9609775.3A Pending GB9609775D0 (en) 1996-05-10 1996-05-10 Micromachined accelerometer
GB9616738A Withdrawn GB2312959A (en) 1996-05-10 1996-08-09 Method of making electrodes for accelerometers and other sensors

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9609775.3A Pending GB9609775D0 (en) 1996-05-10 1996-05-10 Micromachined accelerometer

Country Status (1)

Country Link
GB (2) GB9609775D0 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US5092174A (en) * 1989-10-19 1992-03-03 Texas Instruments Incorporated Capacitance accelerometer
US5189916A (en) * 1990-08-24 1993-03-02 Ngk Spark Plug Co., Ltd. Pressure sensor
DE4102805A1 (en) * 1991-01-31 1992-08-13 Bosch Gmbh Robert CAPACITIVE ACCELERATION SENSOR

Also Published As

Publication number Publication date
GB2312959A (en) 1997-11-12
GB9609775D0 (en) 1996-07-17

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)