GB2310951B - Micromachined devices - Google Patents

Micromachined devices

Info

Publication number
GB2310951B
GB2310951B GB9625722A GB9625722A GB2310951B GB 2310951 B GB2310951 B GB 2310951B GB 9625722 A GB9625722 A GB 9625722A GB 9625722 A GB9625722 A GB 9625722A GB 2310951 B GB2310951 B GB 2310951B
Authority
GB
United Kingdom
Prior art keywords
micromachined devices
micromachined
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9625722A
Other versions
GB9625722D0 (en
GB2310951A (en
Inventor
Nicholas Martyn Shorrocks
Martin James Walker
Ralph Nicklin
Andrew Duncan Parsons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
GEC Marconi Ltd
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Marconi Ltd, Marconi Co Ltd filed Critical GEC Marconi Ltd
Publication of GB9625722D0 publication Critical patent/GB9625722D0/en
Priority to US08/811,410 priority Critical patent/US5942791A/en
Priority to FR9702616A priority patent/FR2745956B1/en
Publication of GB2310951A publication Critical patent/GB2310951A/en
Application granted granted Critical
Publication of GB2310951B publication Critical patent/GB2310951B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
GB9625722A 1996-03-06 1996-12-11 Micromachined devices Expired - Fee Related GB2310951B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US08/811,410 US5942791A (en) 1996-03-06 1997-03-04 Micromachined devices having microbridge structure
FR9702616A FR2745956B1 (en) 1996-03-06 1997-03-05 METHOD FOR MANUFACTURING A MICRO-BRIDGE STRUCTURE (S) FOR A MICRO-FACTORY DEVICE, AND PRODUCTS THUS OBTAINED

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9604786.5A GB9604786D0 (en) 1996-03-06 1996-03-06 Micromachined devices

Publications (3)

Publication Number Publication Date
GB9625722D0 GB9625722D0 (en) 1997-01-29
GB2310951A GB2310951A (en) 1997-09-10
GB2310951B true GB2310951B (en) 2001-04-11

Family

ID=10789965

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9604786.5A Pending GB9604786D0 (en) 1996-03-06 1996-03-06 Micromachined devices
GB9625722A Expired - Fee Related GB2310951B (en) 1996-03-06 1996-12-11 Micromachined devices

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9604786.5A Pending GB9604786D0 (en) 1996-03-06 1996-03-06 Micromachined devices

Country Status (1)

Country Link
GB (2) GB9604786D0 (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0138023A2 (en) * 1983-09-07 1985-04-24 Nissan Motor Co., Ltd. Semiconductor vibration detection device with lever structure
US4682503A (en) * 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
GB2194344A (en) * 1986-07-18 1988-03-02 Nissan Motor Pressure transducer and method of fabricating same
GB2200246A (en) * 1985-09-12 1988-07-27 Plessey Co Plc Thermal detector array
US5148260A (en) * 1989-09-07 1992-09-15 Kabushiki Kaisha Toshiba Semiconductor device having an improved air-bridge lead structure
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
EP0539311A2 (en) * 1991-10-23 1993-04-28 International Business Machines Corporation Buried air dielectric isolation of silicon islands
WO1994005046A2 (en) * 1992-08-24 1994-03-03 Conductus, Inc. Freestanding structures of perovskite-type oxide materials
US5446284A (en) * 1994-01-25 1995-08-29 Loral Infrared & Imaging Systems, Inc. Monolithic detector array apparatus
EP0701135A1 (en) * 1994-08-19 1996-03-13 Hughes Aircraft Company Single-wafer tunneling sensor and low-cost IC manufacturing method

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0138023A2 (en) * 1983-09-07 1985-04-24 Nissan Motor Co., Ltd. Semiconductor vibration detection device with lever structure
GB2200246A (en) * 1985-09-12 1988-07-27 Plessey Co Plc Thermal detector array
US4682503A (en) * 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
GB2194344A (en) * 1986-07-18 1988-03-02 Nissan Motor Pressure transducer and method of fabricating same
US5148260A (en) * 1989-09-07 1992-09-15 Kabushiki Kaisha Toshiba Semiconductor device having an improved air-bridge lead structure
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
EP0539311A2 (en) * 1991-10-23 1993-04-28 International Business Machines Corporation Buried air dielectric isolation of silicon islands
WO1994005046A2 (en) * 1992-08-24 1994-03-03 Conductus, Inc. Freestanding structures of perovskite-type oxide materials
US5446284A (en) * 1994-01-25 1995-08-29 Loral Infrared & Imaging Systems, Inc. Monolithic detector array apparatus
EP0701135A1 (en) * 1994-08-19 1996-03-13 Hughes Aircraft Company Single-wafer tunneling sensor and low-cost IC manufacturing method

Also Published As

Publication number Publication date
GB9625722D0 (en) 1997-01-29
GB9604786D0 (en) 1996-09-25
GB2310951A (en) 1997-09-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20041211