GB9616224D0 - Method of surface treatment of semiconductor substrates - Google Patents

Method of surface treatment of semiconductor substrates

Info

Publication number
GB9616224D0
GB9616224D0 GBGB9616224.3A GB9616224A GB9616224D0 GB 9616224 D0 GB9616224 D0 GB 9616224D0 GB 9616224 A GB9616224 A GB 9616224A GB 9616224 D0 GB9616224 D0 GB 9616224D0
Authority
GB
United Kingdom
Prior art keywords
surface treatment
semiconductor substrates
substrates
semiconductor
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9616224.3A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9616224.3A priority Critical patent/GB9616224D0/en
Publication of GB9616224D0 publication Critical patent/GB9616224D0/en
Priority to EP97305642A priority patent/EP0822582B1/en
Priority to EP03013020A priority patent/EP1357584A3/en
Priority to DE69725245T priority patent/DE69725245T2/en
Priority to AT97305642T priority patent/ATE251341T1/en
Priority to JP20667297A priority patent/JP3540129B2/en
Priority to US08/904,953 priority patent/US6051503A/en
Priority to JP2003423892A priority patent/JP4550408B2/en
Pending legal-status Critical Current

Links

GBGB9616224.3A 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates Pending GB9616224D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GBGB9616224.3A GB9616224D0 (en) 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates
EP97305642A EP0822582B1 (en) 1996-08-01 1997-07-28 Method of etching substrates
EP03013020A EP1357584A3 (en) 1996-08-01 1997-07-28 Method of surface treatment of semiconductor substrates
DE69725245T DE69725245T2 (en) 1996-08-01 1997-07-28 Process for etching substrates
AT97305642T ATE251341T1 (en) 1996-08-01 1997-07-28 METHOD FOR ETCHING SUBSTRATES
JP20667297A JP3540129B2 (en) 1996-08-01 1997-07-31 Method of surface treatment of semiconductor substrate
US08/904,953 US6051503A (en) 1996-08-01 1997-08-01 Method of surface treatment of semiconductor substrates
JP2003423892A JP4550408B2 (en) 1996-08-01 2003-12-19 Method for surface treatment of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9616224.3A GB9616224D0 (en) 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates

Publications (1)

Publication Number Publication Date
GB9616224D0 true GB9616224D0 (en) 1996-09-11

Family

ID=10797891

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9616224.3A Pending GB9616224D0 (en) 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates

Country Status (1)

Country Link
GB (1) GB9616224D0 (en)

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