GB959213A - Method and apparatus for the machining of material by means of a beam of charge carriers - Google Patents

Method and apparatus for the machining of material by means of a beam of charge carriers

Info

Publication number
GB959213A
GB959213A GB2780061A GB2780061A GB959213A GB 959213 A GB959213 A GB 959213A GB 2780061 A GB2780061 A GB 2780061A GB 2780061 A GB2780061 A GB 2780061A GB 959213 A GB959213 A GB 959213A
Authority
GB
United Kingdom
Prior art keywords
currents
generator
fed
region
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2780061A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB959213A publication Critical patent/GB959213A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/08—Removing material, e.g. by cutting, by hole drilling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines

Abstract

959,213. Electron beam apparatus. CARL ZEISS-STIFTUNG, [trading as CARL ZEISS]. Aug. 1, 1961 [Aug. 6, 1960], No. 27800/61. Heading H1D. [Also in Division B3] Material is removed from a region of a workpiece 11, which may be a spinnerette, nozzle or filter, by a focused pulsating electron beam 5 which is deflected continuously by means 10 to scan the region and provide a maximum energy at the edges thereof. The beam 5 is generated by a cathode 2, control electrode 3 and anode 4 fed through an oilfilled casing 20 by a generator 17 and controlled by an adjustable bias source 18. Beam 5 passes through an adjustable apertured plate 6, electromagnetic lens 9 fed by a current source 16, and an electromagnetic deflecting system 10 controlled by a switching matrix 35. The system 10 may have four or six radially disposed electromagnetic coils, Figs. 2, 14 (not shown), dependent upon the shape to be eroded. Workpiece 11 is mounted on a table 12 adjustable by spindles 14, 15 within a vacuum chamber 13. Switch matrix 35 is fed with currents from a saw-tooth wave generator 36, sine wave generator 37, square-wave generator 38 and direct-current generator 39 and applies these currents selectively to the deflecting system 10. Various combinations of currents for scanning particular shapes are described, Figs. 3-11 (not shown); the scanning is arranged to produce maximum energy at the edges of the region. For certain shapes, reversal of the scanning currents is used. The longitudinal and transverse deflection waveforms may or may not be synchronized. The beam 5 is pulsed by a transformer 21 connected to a pulse generator 40 which is also interconnected with the switch matrix 35; the beam pulse frequency is preferably not an integral multiple of the deflection frequency. Specification 836,182 is referred to.
GB2780061A 1960-08-06 1961-08-01 Method and apparatus for the machining of material by means of a beam of charge carriers Expired GB959213A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ8187A DE1118375B (en) 1960-08-06 1960-08-06 Method and device for material processing using a charge carrier beam

Publications (1)

Publication Number Publication Date
GB959213A true GB959213A (en) 1964-05-27

Family

ID=7620408

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2780061A Expired GB959213A (en) 1960-08-06 1961-08-01 Method and apparatus for the machining of material by means of a beam of charge carriers

Country Status (4)

Country Link
CH (1) CH402216A (en)
DE (1) DE1118375B (en)
GB (1) GB959213A (en)
NL (2) NL130467C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2666593A1 (en) * 1990-09-11 1992-03-13 Balzers Hochvakuum METHOD AND DEVICE FOR DRIVING THE DENSITY OF A VAPORIZATION FLOW AND / OR ITS DISTRIBUTION.
EP2594316A4 (en) * 2010-07-14 2015-09-09 Mitsubishi Electric Corp Particle beam irradiation apparatus and particle beam therapy apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1292418B (en) * 1965-05-05 1969-04-10 Hermsdorf Keramik Veb Process for program control in the automatic processing of thin-film components in electrical engineering by means of a charge carrier beam
US5017789A (en) * 1989-03-31 1991-05-21 Loma Linda University Medical Center Raster scan control system for a charged-particle beam
DE102014004035A1 (en) 2014-03-21 2015-10-08 Probeam Ag & Co. Kgaa Method for producing small holes in workpieces

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA610681A (en) * 1957-11-20 1960-12-13 Carl Zeiss Programmed particle irradiation accelerator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2666593A1 (en) * 1990-09-11 1992-03-13 Balzers Hochvakuum METHOD AND DEVICE FOR DRIVING THE DENSITY OF A VAPORIZATION FLOW AND / OR ITS DISTRIBUTION.
GB2247856A (en) * 1990-09-11 1992-03-18 Balzers Hochvakuum Controling vapor deposition.
US5277938A (en) * 1990-09-11 1994-01-11 Balzers Aktiengesellschaft Method for controlling evaporation for vapor deposition
GB2247856B (en) * 1990-09-11 1994-05-11 Balzers Hochvakuum A method of and arrangement for controlling the density of a vapour deposition flow and/or its distribution
EP2594316A4 (en) * 2010-07-14 2015-09-09 Mitsubishi Electric Corp Particle beam irradiation apparatus and particle beam therapy apparatus

Also Published As

Publication number Publication date
NL267870A (en)
DE1118375B (en) 1961-11-30
NL130467C (en)
CH402216A (en) 1965-11-15

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