GB9512022D0 - Wafer basket in wafer-holder box - Google Patents

Wafer basket in wafer-holder box

Info

Publication number
GB9512022D0
GB9512022D0 GBGB9512022.6A GB9512022A GB9512022D0 GB 9512022 D0 GB9512022 D0 GB 9512022D0 GB 9512022 A GB9512022 A GB 9512022A GB 9512022 D0 GB9512022 D0 GB 9512022D0
Authority
GB
United Kingdom
Prior art keywords
wafer
basket
holder box
holder
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9512022.6A
Other versions
GB2290414B (en
GB2290414A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd, Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Publication of GB9512022D0 publication Critical patent/GB9512022D0/en
Publication of GB2290414A publication Critical patent/GB2290414A/en
Application granted granted Critical
Publication of GB2290414B publication Critical patent/GB2290414B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB9512022A 1994-06-17 1995-06-14 Wafer basket in wafer-holder box Expired - Fee Related GB2290414B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15822894A JP2791971B2 (en) 1994-06-17 1994-06-17 Wafer basket in wafer storage container

Publications (3)

Publication Number Publication Date
GB9512022D0 true GB9512022D0 (en) 1995-08-09
GB2290414A GB2290414A (en) 1995-12-20
GB2290414B GB2290414B (en) 1998-07-29

Family

ID=15667084

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9512022A Expired - Fee Related GB2290414B (en) 1994-06-17 1995-06-14 Wafer basket in wafer-holder box

Country Status (6)

Country Link
JP (1) JP2791971B2 (en)
KR (1) KR100332719B1 (en)
DE (1) DE19521575C2 (en)
FR (1) FR2725185B1 (en)
GB (1) GB2290414B (en)
TW (1) TW299485B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW296361B (en) * 1995-06-26 1997-01-21 Kakizaki Seisakusho Kk
US5788082A (en) * 1996-07-12 1998-08-04 Fluoroware, Inc. Wafer carrier
GB2350604A (en) * 1999-06-03 2000-12-06 Horizon Biscuit Company Ltd Th Container
DE10046942A1 (en) * 2000-09-21 2002-04-25 Infineon Technologies Ag Process for transporting wafers
DE10104313C1 (en) * 2001-01-22 2002-08-08 Hunke & Jochheim Storage boxes for cassettes
TW511649U (en) * 2001-09-12 2002-11-21 Ind Tech Res Inst Wafer retainer
TWI239931B (en) 2003-05-19 2005-09-21 Miraial Co Ltd Lid unit for thin plate supporting container and thin plate supporting container
DE10337570A1 (en) * 2003-08-14 2005-03-17 Infineon Technologies Ag Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate
JP4716928B2 (en) * 2006-06-07 2011-07-06 信越ポリマー株式会社 Wafer storage container
CN102339777B (en) * 2010-07-15 2013-09-11 家登精密工业股份有限公司 Wafer limiting piece of wafer box
DE102010040918B4 (en) * 2010-09-16 2013-10-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Container for stacking and transporting discs of brittle material
CN103402678A (en) 2011-02-28 2013-11-20 株式会社钨钛合金 Guide pad, cutting tool body, and cutting tool
WO2012117813A1 (en) 2011-02-28 2012-09-07 株式会社タンガロイ Guide pad, cutting tool body, and cutting tool
KR101658631B1 (en) 2014-04-03 2016-09-22 형제기계공업 주식회사 Snow removal equipment using the partition
CN106784145B (en) * 2016-12-23 2018-03-06 中赣新能源股份有限公司 A kind of silicon chip inserted sheet method
CN116936432B (en) * 2023-09-14 2024-01-02 常州银河世纪微电子股份有限公司 Wafer storage box, taking and placing device using same and taking and placing method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648126A (en) * 1979-09-26 1981-05-01 Nec Kyushu Ltd Auxiliary carrier for replacing wafers
JPS60160539U (en) * 1984-04-02 1985-10-25 ソニー株式会社 Container for storing semiconductor wafers, etc.
US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4724963A (en) * 1985-02-20 1988-02-16 Empak, Inc. Wafer processing cassette
US4684021A (en) * 1986-06-23 1987-08-04 Fluoroware, Inc. Bottom loading wafer carrier box
JPH0284319U (en) * 1988-12-20 1990-06-29
US5154301A (en) * 1991-09-12 1992-10-13 Fluoroware, Inc. Wafer carrier
US5351836A (en) * 1992-07-08 1994-10-04 Daifuku Co., Ltd. Container for plate-like objects

Also Published As

Publication number Publication date
DE19521575A1 (en) 1995-12-21
FR2725185B1 (en) 1997-10-17
TW299485B (en) 1997-03-01
GB2290414B (en) 1998-07-29
JPH088332A (en) 1996-01-12
KR100332719B1 (en) 2002-10-31
DE19521575C2 (en) 2002-04-18
FR2725185A1 (en) 1996-04-05
KR960002468A (en) 1996-01-26
GB2290414A (en) 1995-12-20
JP2791971B2 (en) 1998-08-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090614