GB2290414B - Wafer basket in wafer-holder box - Google Patents
Wafer basket in wafer-holder boxInfo
- Publication number
- GB2290414B GB2290414B GB9512022A GB9512022A GB2290414B GB 2290414 B GB2290414 B GB 2290414B GB 9512022 A GB9512022 A GB 9512022A GB 9512022 A GB9512022 A GB 9512022A GB 2290414 B GB2290414 B GB 2290414B
- Authority
- GB
- United Kingdom
- Prior art keywords
- wafer
- basket
- holder box
- holder
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15822894A JP2791971B2 (en) | 1994-06-17 | 1994-06-17 | Wafer basket in wafer storage container |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9512022D0 GB9512022D0 (en) | 1995-08-09 |
GB2290414A GB2290414A (en) | 1995-12-20 |
GB2290414B true GB2290414B (en) | 1998-07-29 |
Family
ID=15667084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9512022A Expired - Fee Related GB2290414B (en) | 1994-06-17 | 1995-06-14 | Wafer basket in wafer-holder box |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP2791971B2 (en) |
KR (1) | KR100332719B1 (en) |
DE (1) | DE19521575C2 (en) |
FR (1) | FR2725185B1 (en) |
GB (1) | GB2290414B (en) |
TW (1) | TW299485B (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW296361B (en) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
GB2350604A (en) * | 1999-06-03 | 2000-12-06 | Horizon Biscuit Company Ltd Th | Container |
DE10046942A1 (en) * | 2000-09-21 | 2002-04-25 | Infineon Technologies Ag | Process for transporting wafers |
DE10104313C1 (en) * | 2001-01-22 | 2002-08-08 | Hunke & Jochheim | Storage boxes for cassettes |
TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
TWI239931B (en) | 2003-05-19 | 2005-09-21 | Miraial Co Ltd | Lid unit for thin plate supporting container and thin plate supporting container |
DE10337570A1 (en) * | 2003-08-14 | 2005-03-17 | Infineon Technologies Ag | Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate |
JP4716928B2 (en) * | 2006-06-07 | 2011-07-06 | 信越ポリマー株式会社 | Wafer storage container |
CN102339777B (en) * | 2010-07-15 | 2013-09-11 | 家登精密工业股份有限公司 | Wafer limiting piece of wafer box |
DE102010040918B4 (en) * | 2010-09-16 | 2013-10-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Container for stacking and transporting discs of brittle material |
CN103402678A (en) | 2011-02-28 | 2013-11-20 | 株式会社钨钛合金 | Guide pad, cutting tool body, and cutting tool |
EP2682212B1 (en) | 2011-02-28 | 2020-10-07 | Tungaloy Corporation | Guide pad and cutting tool |
KR101658631B1 (en) | 2014-04-03 | 2016-09-22 | 형제기계공업 주식회사 | Snow removal equipment using the partition |
CN106784145B (en) * | 2016-12-23 | 2018-03-06 | 中赣新能源股份有限公司 | A kind of silicon chip inserted sheet method |
CN116936432B (en) * | 2023-09-14 | 2024-01-02 | 常州银河世纪微电子股份有限公司 | Wafer storage box, taking and placing device using same and taking and placing method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2259607A (en) * | 1991-09-12 | 1993-03-17 | Fluoroware Inc | Semiconductor wafer carrier |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5648126A (en) * | 1979-09-26 | 1981-05-01 | Nec Kyushu Ltd | Auxiliary carrier for replacing wafers |
JPS60160539U (en) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | Container for storing semiconductor wafers, etc. |
US4687097A (en) * | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
US4724963A (en) * | 1985-02-20 | 1988-02-16 | Empak, Inc. | Wafer processing cassette |
US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
JPH0284319U (en) * | 1988-12-20 | 1990-06-29 | ||
US5351836A (en) * | 1992-07-08 | 1994-10-04 | Daifuku Co., Ltd. | Container for plate-like objects |
-
1994
- 1994-06-17 JP JP15822894A patent/JP2791971B2/en not_active Expired - Lifetime
-
1995
- 1995-06-10 TW TW084105930A patent/TW299485B/zh not_active IP Right Cessation
- 1995-06-12 FR FR9506920A patent/FR2725185B1/en not_active Expired - Fee Related
- 1995-06-14 GB GB9512022A patent/GB2290414B/en not_active Expired - Fee Related
- 1995-06-14 DE DE19521575A patent/DE19521575C2/en not_active Expired - Fee Related
- 1995-06-16 KR KR1019950016073A patent/KR100332719B1/en not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2259607A (en) * | 1991-09-12 | 1993-03-17 | Fluoroware Inc | Semiconductor wafer carrier |
Also Published As
Publication number | Publication date |
---|---|
TW299485B (en) | 1997-03-01 |
JP2791971B2 (en) | 1998-08-27 |
JPH088332A (en) | 1996-01-12 |
DE19521575C2 (en) | 2002-04-18 |
GB2290414A (en) | 1995-12-20 |
DE19521575A1 (en) | 1995-12-21 |
KR100332719B1 (en) | 2002-10-31 |
FR2725185A1 (en) | 1996-04-05 |
FR2725185B1 (en) | 1997-10-17 |
GB9512022D0 (en) | 1995-08-09 |
KR960002468A (en) | 1996-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20090614 |