GB932418A - Production of a silicon film - Google Patents

Production of a silicon film

Info

Publication number
GB932418A
GB932418A GB243260A GB243260A GB932418A GB 932418 A GB932418 A GB 932418A GB 243260 A GB243260 A GB 243260A GB 243260 A GB243260 A GB 243260A GB 932418 A GB932418 A GB 932418A
Authority
GB
United Kingdom
Prior art keywords
dichlorosilane
carrier
silicon
batch
wise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB243260A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck and Co Inc
Original Assignee
Merck and Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck and Co Inc filed Critical Merck and Co Inc
Publication of GB932418A publication Critical patent/GB932418A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/282—Carbides, silicides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Silicon Compounds (AREA)
GB243260A 1959-02-13 1960-01-22 Production of a silicon film Expired GB932418A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79297559A 1959-02-13 1959-02-13

Publications (1)

Publication Number Publication Date
GB932418A true GB932418A (en) 1963-07-24

Family

ID=25158681

Family Applications (1)

Application Number Title Priority Date Filing Date
GB243260A Expired GB932418A (en) 1959-02-13 1960-01-22 Production of a silicon film

Country Status (4)

Country Link
BE (1) BE587334A (enExample)
FR (1) FR1247628A (enExample)
GB (1) GB932418A (enExample)
NL (1) NL248040A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661637A (en) * 1969-01-02 1972-05-09 Siemens Ag Method for epitactic precipitation of silicon at low temperatures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661637A (en) * 1969-01-02 1972-05-09 Siemens Ag Method for epitactic precipitation of silicon at low temperatures

Also Published As

Publication number Publication date
FR1247628A (fr) 1960-12-02
BE587334A (fr) 1960-08-05
NL248040A (enExample)

Similar Documents

Publication Publication Date Title
BE590002R (fr) Procédé pour l'alimentation continue des cuves d'électrolyse de l'alumine.
GB1014226A (en) Improvements in or relating to the treatment of diamonds
GB932418A (en) Production of a silicon film
ZM11774A1 (en) Process for the treatment of material containing zinc and silica for recovering of zinc
YU36050B (en) Process for the electrolytic deposition of gold coatings
GB1003365A (en) Method of preparing a photo-sensitive resistive coating
FR1262879A (fr) Procédé de fabrication de couches extérieures de métal précieux, conductrices de l'électricité, sur des supports non conducteurs de l'électricité et produit obtenu suivant ce procédé
BE591099A (fr) Procédé et solutions pour la production de revêtements chimiques sur le zinc et ses alliages
GB851986A (en) Improvements in or relating to methods of producing semi-conductor devices
CA534938A (en) Method of carrying out exothermic chemical reactions
FR1202578A (fr) Procédé de liquéfaction de chlore contenant de l'hydrogène
GB869955A (en) Improvements in and relating to the production of 2:2-dipyridyl
JPS56129377A (en) Manufacture of polycrystalline silicone semiconductor
BE596784A (fr) Procédé de préparation de l'isothiocyanate de méthyle et produit obtenu.
JPS5252570A (en) Device for production of compound semiconductor
FR1286111A (fr) Procédé de production de mélanges gazeux contenant de l'acétylène
GB701708A (en) Improvements relating to the manufacture of tetraethyllead
JPS5213969A (en) Process for making ornament or display piece made of clay-like materia l containing mainly grain powder
ZA711910B (en) Process for the production of acetylene containing solutions useful for the alkynols synthesis and process of alkynols which makes use of said solutions
GB1013887A (en) Process for the production of highly pure zirconium or hafnium
BE590886A (fr) Procédé de fabrication d'un récipient contenant des électrodes.
CA531539A (en) Process of making agglomerates containing 2,2'-dithiobis benzothiazole and product thereof
AU206039B2 (en) Improvements in or relating tothe treatment of articles formed of high temperature nickel alloys
CA531493A (en) Process and apparatus for the production of hydrogen cyanide
CA531792A (en) Process and apparatus for the production of hydrogen cyanide