GB9214617D0 - Improvements in or relating to interferometers - Google Patents
Improvements in or relating to interferometersInfo
- Publication number
- GB9214617D0 GB9214617D0 GB9214617A GB9214617A GB9214617D0 GB 9214617 D0 GB9214617 D0 GB 9214617D0 GB 9214617 A GB9214617 A GB 9214617A GB 9214617 A GB9214617 A GB 9214617A GB 9214617 D0 GB9214617 D0 GB 9214617D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- noise
- measurement
- signal
- interferometers
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
Abstract
An optical interferometer wherein laser noise is reduced or removed by providing an additional optical path (15) in which the noise present can be ascertained and then subtracted from the measurement signal, also containing noise, such that the output signal has an improved signal to noise ratio. The noise may be identified using a-reference interferometer and both the measurement and noise signals may be appropriately processed (11, 24) and filtered (26, 28) before the subtraction stage (30). The system may also be adaptable to other forms of electromagnetic radiation. <IMAGE>
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9214617A GB2268582B (en) | 1992-07-09 | 1992-07-09 | Improvements in or relating to interferometers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9214617A GB2268582B (en) | 1992-07-09 | 1992-07-09 | Improvements in or relating to interferometers |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9214617D0 true GB9214617D0 (en) | 1992-08-26 |
GB2268582A GB2268582A (en) | 1994-01-12 |
GB2268582B GB2268582B (en) | 1995-12-20 |
Family
ID=10718465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9214617A Expired - Fee Related GB2268582B (en) | 1992-07-09 | 1992-07-09 | Improvements in or relating to interferometers |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2268582B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112424562A (en) * | 2018-05-18 | 2021-02-26 | 密歇根大学董事会 | Path fluctuation monitoring for frequency modulation interferometer |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4436922C2 (en) * | 1994-10-15 | 1997-07-31 | Jenoptik Technologie Gmbh | Interferometer arrangement for frequency and environmental independent length measurement |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3706347A1 (en) * | 1987-02-27 | 1988-09-08 | Fraunhofer Ges Forschung | LASER INTERFEROMETER FOR INTERFEROMETRIC LENGTH MEASUREMENT |
FR2650664B1 (en) * | 1989-08-01 | 1991-11-15 | Micro Controle | INTERFEROMETRY DISPLACEMENT MEASUREMENT DEVICE |
GB9018215D0 (en) * | 1990-08-20 | 1990-10-03 | Nat Res Dev | Optical apparatus |
-
1992
- 1992-07-09 GB GB9214617A patent/GB2268582B/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112424562A (en) * | 2018-05-18 | 2021-02-26 | 密歇根大学董事会 | Path fluctuation monitoring for frequency modulation interferometer |
CN112424562B (en) * | 2018-05-18 | 2023-07-07 | 密歇根大学董事会 | Path fluctuation monitoring for frequency modulated interferometers |
Also Published As
Publication number | Publication date |
---|---|
GB2268582A (en) | 1994-01-12 |
GB2268582B (en) | 1995-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20110709 |